JPS6176355U - - Google Patents
Info
- Publication number
- JPS6176355U JPS6176355U JP16042184U JP16042184U JPS6176355U JP S6176355 U JPS6176355 U JP S6176355U JP 16042184 U JP16042184 U JP 16042184U JP 16042184 U JP16042184 U JP 16042184U JP S6176355 U JPS6176355 U JP S6176355U
- Authority
- JP
- Japan
- Prior art keywords
- silicon wafer
- groove
- globe
- utility
- cross
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
Landscapes
- Weting (AREA)
Description
図面は、本考案のシリコン・ウエハー・キヤビ
ラリイ・カラムを示す拡大図である。
1…シリコン・ウエハー、2…キヤピラリイ・
カラム溝。
The drawing is an enlarged view of the silicon wafer cavity column of the present invention. 1...Silicon wafer, 2...Capillary
Column groove.
Claims (1)
ハー・キヤピラリイ・カラム。 A silicon wafer capillary column consisting of a groove with a V-globe cross section.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16042184U JPS6176355U (en) | 1984-10-25 | 1984-10-25 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16042184U JPS6176355U (en) | 1984-10-25 | 1984-10-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6176355U true JPS6176355U (en) | 1986-05-22 |
Family
ID=30718343
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16042184U Pending JPS6176355U (en) | 1984-10-25 | 1984-10-25 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6176355U (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3630006A (en) * | 1969-11-05 | 1971-12-28 | Antonio A Sandoval | Spiral capillary gas chromatographic column |
JPS58195149A (en) * | 1982-04-26 | 1983-11-14 | マイクロセンサ−・テクノロジ−・インコ−ポレ−テツド | Small-sized gas chromatograph device |
-
1984
- 1984-10-25 JP JP16042184U patent/JPS6176355U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3630006A (en) * | 1969-11-05 | 1971-12-28 | Antonio A Sandoval | Spiral capillary gas chromatographic column |
JPS58195149A (en) * | 1982-04-26 | 1983-11-14 | マイクロセンサ−・テクノロジ−・インコ−ポレ−テツド | Small-sized gas chromatograph device |