JPS6176308U - - Google Patents

Info

Publication number
JPS6176308U
JPS6176308U JP16100784U JP16100784U JPS6176308U JP S6176308 U JPS6176308 U JP S6176308U JP 16100784 U JP16100784 U JP 16100784U JP 16100784 U JP16100784 U JP 16100784U JP S6176308 U JPS6176308 U JP S6176308U
Authority
JP
Japan
Prior art keywords
position detection
detection means
speed
speed position
certain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16100784U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16100784U priority Critical patent/JPS6176308U/ja
Publication of JPS6176308U publication Critical patent/JPS6176308U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Machine Tool Sensing Apparatuses (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Description

【図面の簡単な説明】
第１図は本考案の第１の実施例を示す説明図、
第２図は本考案の実施例の速度変化図、第３図は
第１の実施例の説明図、第４図は第２の実施例の
説明図、第５図は第３の実施例の説明図である。 １…移動ブロツク、３…低速用の精位置スケー
ル、４…高速用の粗位置スケール、５…精位置検
出ヘツド、６…粗位置検出ヘツド。

Claims (1)

    【実用新案登録請求の範囲】
  1. 高速用の位置検出手段と低速用の位置検出手段
    とを併設し、一定速度以上では高速用の位置検出
    手段のみで位置を検出し、一定速度以下では高速
    用の位置検出手段を基準に、精密な位置検出手段
    を併用して精密な位置を求めることを特徴とする
    位置検出装置。
JP16100784U 1984-10-26 1984-10-26 Pending JPS6176308U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16100784U JPS6176308U (ja) 1984-10-26 1984-10-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16100784U JPS6176308U (ja) 1984-10-26 1984-10-26

Publications (1)

Publication Number Publication Date
JPS6176308U true JPS6176308U (ja) 1986-05-22

Family

ID=30718918

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16100784U Pending JPS6176308U (ja) 1984-10-26 1984-10-26

Country Status (1)

Country Link
JP (1) JPS6176308U (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005181057A (ja) * 2003-12-18 2005-07-07 Yaskawa Electric Corp リニアスケール
JP2009036637A (ja) * 2007-08-01 2009-02-19 Sony Corp 変位測定装置
JP2010040946A (ja) * 2008-08-07 2010-02-18 Sinfonia Technology Co Ltd 真空処理装置
JP2010040945A (ja) * 2008-08-07 2010-02-18 Sinfonia Technology Co Ltd 真空処理装置
JP2011149716A (ja) * 2010-01-19 2011-08-04 Nikon Corp エンコーダ装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005181057A (ja) * 2003-12-18 2005-07-07 Yaskawa Electric Corp リニアスケール
JP4543420B2 (ja) * 2003-12-18 2010-09-15 株式会社安川電機 リニアスケール
JP2009036637A (ja) * 2007-08-01 2009-02-19 Sony Corp 変位測定装置
JP2010040946A (ja) * 2008-08-07 2010-02-18 Sinfonia Technology Co Ltd 真空処理装置
JP2010040945A (ja) * 2008-08-07 2010-02-18 Sinfonia Technology Co Ltd 真空処理装置
JP2011149716A (ja) * 2010-01-19 2011-08-04 Nikon Corp エンコーダ装置

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