JPS6176308U - - Google Patents
Info
- Publication number
- JPS6176308U JPS6176308U JP16100784U JP16100784U JPS6176308U JP S6176308 U JPS6176308 U JP S6176308U JP 16100784 U JP16100784 U JP 16100784U JP 16100784 U JP16100784 U JP 16100784U JP S6176308 U JPS6176308 U JP S6176308U
- Authority
- JP
- Japan
- Prior art keywords
- position detection
- detection means
- speed
- speed position
- certain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 8
- 238000010586 diagram Methods 0.000 description 6
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Machine Tool Sensing Apparatuses (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16100784U JPS6176308U (US07652168-20100126-C00068.png) | 1984-10-26 | 1984-10-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16100784U JPS6176308U (US07652168-20100126-C00068.png) | 1984-10-26 | 1984-10-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6176308U true JPS6176308U (US07652168-20100126-C00068.png) | 1986-05-22 |
Family
ID=30718918
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16100784U Pending JPS6176308U (US07652168-20100126-C00068.png) | 1984-10-26 | 1984-10-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6176308U (US07652168-20100126-C00068.png) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005181057A (ja) * | 2003-12-18 | 2005-07-07 | Yaskawa Electric Corp | リニアスケール |
JP2009036637A (ja) * | 2007-08-01 | 2009-02-19 | Sony Corp | 変位測定装置 |
JP2010040946A (ja) * | 2008-08-07 | 2010-02-18 | Sinfonia Technology Co Ltd | 真空処理装置 |
JP2010040945A (ja) * | 2008-08-07 | 2010-02-18 | Sinfonia Technology Co Ltd | 真空処理装置 |
JP2011149716A (ja) * | 2010-01-19 | 2011-08-04 | Nikon Corp | エンコーダ装置 |
-
1984
- 1984-10-26 JP JP16100784U patent/JPS6176308U/ja active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005181057A (ja) * | 2003-12-18 | 2005-07-07 | Yaskawa Electric Corp | リニアスケール |
JP4543420B2 (ja) * | 2003-12-18 | 2010-09-15 | 株式会社安川電機 | リニアスケール |
JP2009036637A (ja) * | 2007-08-01 | 2009-02-19 | Sony Corp | 変位測定装置 |
JP2010040946A (ja) * | 2008-08-07 | 2010-02-18 | Sinfonia Technology Co Ltd | 真空処理装置 |
JP2010040945A (ja) * | 2008-08-07 | 2010-02-18 | Sinfonia Technology Co Ltd | 真空処理装置 |
JP2011149716A (ja) * | 2010-01-19 | 2011-08-04 | Nikon Corp | エンコーダ装置 |