JPS617556A - 二次イオン質量分析計 - Google Patents
二次イオン質量分析計Info
- Publication number
- JPS617556A JPS617556A JP60115303A JP11530385A JPS617556A JP S617556 A JPS617556 A JP S617556A JP 60115303 A JP60115303 A JP 60115303A JP 11530385 A JP11530385 A JP 11530385A JP S617556 A JPS617556 A JP S617556A
- Authority
- JP
- Japan
- Prior art keywords
- mass spectrometer
- secondary ion
- ion
- ions
- ion mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Tubes For Measurement (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60115303A JPS617556A (ja) | 1985-05-30 | 1985-05-30 | 二次イオン質量分析計 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60115303A JPS617556A (ja) | 1985-05-30 | 1985-05-30 | 二次イオン質量分析計 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS617556A true JPS617556A (ja) | 1986-01-14 |
| JPH0351253B2 JPH0351253B2 (cs) | 1991-08-06 |
Family
ID=14659289
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60115303A Granted JPS617556A (ja) | 1985-05-30 | 1985-05-30 | 二次イオン質量分析計 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS617556A (cs) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1987001452A1 (fr) * | 1985-08-29 | 1987-03-12 | Hitachi, Ltd. | Spectroscope de masse |
| JPH01255146A (ja) * | 1988-04-02 | 1989-10-12 | Kokuritsu Kogai Kenkyusho | 高圧質量分析法のためのイオン化方法及び装置 |
| JPH01255147A (ja) * | 1988-04-02 | 1989-10-12 | Kokuritsu Kogai Kenkyusho | 高圧質量分析法のためのイオン化法 |
| WO2007139425A1 (fr) * | 2006-05-29 | 2007-12-06 | Blashenkov Nikolai Mikhailovic | Ioniseur à bande d'une source d'ions d'un spectromètre en masse |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5364089A (en) * | 1976-11-19 | 1978-06-08 | Hitachi Ltd | Solid ion source |
-
1985
- 1985-05-30 JP JP60115303A patent/JPS617556A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5364089A (en) * | 1976-11-19 | 1978-06-08 | Hitachi Ltd | Solid ion source |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1987001452A1 (fr) * | 1985-08-29 | 1987-03-12 | Hitachi, Ltd. | Spectroscope de masse |
| JPH01255146A (ja) * | 1988-04-02 | 1989-10-12 | Kokuritsu Kogai Kenkyusho | 高圧質量分析法のためのイオン化方法及び装置 |
| JPH01255147A (ja) * | 1988-04-02 | 1989-10-12 | Kokuritsu Kogai Kenkyusho | 高圧質量分析法のためのイオン化法 |
| WO2007139425A1 (fr) * | 2006-05-29 | 2007-12-06 | Blashenkov Nikolai Mikhailovic | Ioniseur à bande d'une source d'ions d'un spectromètre en masse |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0351253B2 (cs) | 1991-08-06 |
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