JPS6175565U - - Google Patents

Info

Publication number
JPS6175565U
JPS6175565U JP16042284U JP16042284U JPS6175565U JP S6175565 U JPS6175565 U JP S6175565U JP 16042284 U JP16042284 U JP 16042284U JP 16042284 U JP16042284 U JP 16042284U JP S6175565 U JPS6175565 U JP S6175565U
Authority
JP
Japan
Prior art keywords
silicon wafer
diaphragm
glass plate
check valve
gas flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16042284U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0144861Y2 (US20030199744A1-20031023-C00003.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984160422U priority Critical patent/JPH0144861Y2/ja
Publication of JPS6175565U publication Critical patent/JPS6175565U/ja
Application granted granted Critical
Publication of JPH0144861Y2 publication Critical patent/JPH0144861Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Check Valves (AREA)
JP1984160422U 1984-10-25 1984-10-25 Expired JPH0144861Y2 (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984160422U JPH0144861Y2 (US20030199744A1-20031023-C00003.png) 1984-10-25 1984-10-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984160422U JPH0144861Y2 (US20030199744A1-20031023-C00003.png) 1984-10-25 1984-10-25

Publications (2)

Publication Number Publication Date
JPS6175565U true JPS6175565U (US20030199744A1-20031023-C00003.png) 1986-05-21
JPH0144861Y2 JPH0144861Y2 (US20030199744A1-20031023-C00003.png) 1989-12-25

Family

ID=30718344

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984160422U Expired JPH0144861Y2 (US20030199744A1-20031023-C00003.png) 1984-10-25 1984-10-25

Country Status (1)

Country Link
JP (1) JPH0144861Y2 (US20030199744A1-20031023-C00003.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5864449U (ja) * 1981-10-26 1983-04-30 日本電気株式会社 マイクロ弁
JPS59110967A (ja) * 1982-12-16 1984-06-27 Nec Corp 弁素子の製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5864449U (ja) * 1981-10-26 1983-04-30 日本電気株式会社 マイクロ弁
JPS59110967A (ja) * 1982-12-16 1984-06-27 Nec Corp 弁素子の製造方法

Also Published As

Publication number Publication date
JPH0144861Y2 (US20030199744A1-20031023-C00003.png) 1989-12-25

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