JPS6174947U - - Google Patents
Info
- Publication number
- JPS6174947U JPS6174947U JP15845984U JP15845984U JPS6174947U JP S6174947 U JPS6174947 U JP S6174947U JP 15845984 U JP15845984 U JP 15845984U JP 15845984 U JP15845984 U JP 15845984U JP S6174947 U JPS6174947 U JP S6174947U
- Authority
- JP
- Japan
- Prior art keywords
- diffusion pump
- oil diffusion
- cooling tank
- cooling
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 7
- 238000009792 diffusion process Methods 0.000 claims description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000012774 insulation material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15845984U JPS6174947U (enExample) | 1984-10-22 | 1984-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15845984U JPS6174947U (enExample) | 1984-10-22 | 1984-10-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6174947U true JPS6174947U (enExample) | 1986-05-21 |
Family
ID=30716438
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15845984U Pending JPS6174947U (enExample) | 1984-10-22 | 1984-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6174947U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009147894A1 (ja) * | 2008-06-05 | 2009-12-10 | 株式会社日立ハイテクノロジーズ | イオンビーム装置 |
| WO2025141822A1 (ja) * | 2023-12-27 | 2025-07-03 | 株式会社日立ハイテク | 荷電粒子線装置、試料冷却機構、及び連続断面加工観察方法 |
-
1984
- 1984-10-22 JP JP15845984U patent/JPS6174947U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009147894A1 (ja) * | 2008-06-05 | 2009-12-10 | 株式会社日立ハイテクノロジーズ | イオンビーム装置 |
| JP5097823B2 (ja) * | 2008-06-05 | 2012-12-12 | 株式会社日立ハイテクノロジーズ | イオンビーム装置 |
| WO2025141822A1 (ja) * | 2023-12-27 | 2025-07-03 | 株式会社日立ハイテク | 荷電粒子線装置、試料冷却機構、及び連続断面加工観察方法 |