JPS6444629U - - Google Patents
Info
- Publication number
- JPS6444629U JPS6444629U JP13867887U JP13867887U JPS6444629U JP S6444629 U JPS6444629 U JP S6444629U JP 13867887 U JP13867887 U JP 13867887U JP 13867887 U JP13867887 U JP 13867887U JP S6444629 U JPS6444629 U JP S6444629U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- exhaust
- drawing chamber
- bottom plate
- vacuum pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 238000002039 particle-beam lithography Methods 0.000 claims 1
- 108010083687 Ion Pumps Proteins 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13867887U JPS6444629U (enExample) | 1987-09-10 | 1987-09-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13867887U JPS6444629U (enExample) | 1987-09-10 | 1987-09-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6444629U true JPS6444629U (enExample) | 1989-03-16 |
Family
ID=31401239
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13867887U Pending JPS6444629U (enExample) | 1987-09-10 | 1987-09-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6444629U (enExample) |
-
1987
- 1987-09-10 JP JP13867887U patent/JPS6444629U/ja active Pending