JPS6174947U - - Google Patents

Info

Publication number
JPS6174947U
JPS6174947U JP15845984U JP15845984U JPS6174947U JP S6174947 U JPS6174947 U JP S6174947U JP 15845984 U JP15845984 U JP 15845984U JP 15845984 U JP15845984 U JP 15845984U JP S6174947 U JPS6174947 U JP S6174947U
Authority
JP
Japan
Prior art keywords
diffusion pump
oil diffusion
cooling tank
cooling
electron microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15845984U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15845984U priority Critical patent/JPS6174947U/ja
Publication of JPS6174947U publication Critical patent/JPS6174947U/ja
Pending legal-status Critical Current

Links

JP15845984U 1984-10-22 1984-10-22 Pending JPS6174947U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15845984U JPS6174947U (enrdf_load_stackoverflow) 1984-10-22 1984-10-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15845984U JPS6174947U (enrdf_load_stackoverflow) 1984-10-22 1984-10-22

Publications (1)

Publication Number Publication Date
JPS6174947U true JPS6174947U (enrdf_load_stackoverflow) 1986-05-21

Family

ID=30716438

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15845984U Pending JPS6174947U (enrdf_load_stackoverflow) 1984-10-22 1984-10-22

Country Status (1)

Country Link
JP (1) JPS6174947U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009147894A1 (ja) * 2008-06-05 2009-12-10 株式会社日立ハイテクノロジーズ イオンビーム装置
WO2025141822A1 (ja) * 2023-12-27 2025-07-03 株式会社日立ハイテク 荷電粒子線装置、試料冷却機構、及び連続断面加工観察方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009147894A1 (ja) * 2008-06-05 2009-12-10 株式会社日立ハイテクノロジーズ イオンビーム装置
JP5097823B2 (ja) * 2008-06-05 2012-12-12 株式会社日立ハイテクノロジーズ イオンビーム装置
WO2025141822A1 (ja) * 2023-12-27 2025-07-03 株式会社日立ハイテク 荷電粒子線装置、試料冷却機構、及び連続断面加工観察方法

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