JPS63112282U - - Google Patents

Info

Publication number
JPS63112282U
JPS63112282U JP286187U JP286187U JPS63112282U JP S63112282 U JPS63112282 U JP S63112282U JP 286187 U JP286187 U JP 286187U JP 286187 U JP286187 U JP 286187U JP S63112282 U JPS63112282 U JP S63112282U
Authority
JP
Japan
Prior art keywords
panel
baffle
closed
vacuum state
low temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP286187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP286187U priority Critical patent/JPS63112282U/ja
Publication of JPS63112282U publication Critical patent/JPS63112282U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP286187U 1987-01-14 1987-01-14 Pending JPS63112282U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP286187U JPS63112282U (enrdf_load_stackoverflow) 1987-01-14 1987-01-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP286187U JPS63112282U (enrdf_load_stackoverflow) 1987-01-14 1987-01-14

Publications (1)

Publication Number Publication Date
JPS63112282U true JPS63112282U (enrdf_load_stackoverflow) 1988-07-19

Family

ID=30782093

Family Applications (1)

Application Number Title Priority Date Filing Date
JP286187U Pending JPS63112282U (enrdf_load_stackoverflow) 1987-01-14 1987-01-14

Country Status (1)

Country Link
JP (1) JPS63112282U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008101576A (ja) * 2006-10-20 2008-05-01 Toppan Printing Co Ltd クライオポンプ及びそれを用いた真空装置
JP2014509365A (ja) * 2011-02-09 2014-04-17 ブルックス オートメーション インコーポレイテッド クライオポンプ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008101576A (ja) * 2006-10-20 2008-05-01 Toppan Printing Co Ltd クライオポンプ及びそれを用いた真空装置
JP2014509365A (ja) * 2011-02-09 2014-04-17 ブルックス オートメーション インコーポレイテッド クライオポンプ
JP2017015098A (ja) * 2011-02-09 2017-01-19 ブルックス オートメーション インコーポレイテッド クライオポンプ
US9926919B2 (en) 2011-02-09 2018-03-27 Brooks Automation, Inc. Cryopump

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