JPS6173670U - - Google Patents

Info

Publication number
JPS6173670U
JPS6173670U JP15547184U JP15547184U JPS6173670U JP S6173670 U JPS6173670 U JP S6173670U JP 15547184 U JP15547184 U JP 15547184U JP 15547184 U JP15547184 U JP 15547184U JP S6173670 U JPS6173670 U JP S6173670U
Authority
JP
Japan
Prior art keywords
reaction tube
tubular body
reaction
semiconductor substrate
rolling elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15547184U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0220213Y2 (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15547184U priority Critical patent/JPH0220213Y2/ja
Publication of JPS6173670U publication Critical patent/JPS6173670U/ja
Application granted granted Critical
Publication of JPH0220213Y2 publication Critical patent/JPH0220213Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP15547184U 1984-10-15 1984-10-15 Expired JPH0220213Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15547184U JPH0220213Y2 (enrdf_load_html_response) 1984-10-15 1984-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15547184U JPH0220213Y2 (enrdf_load_html_response) 1984-10-15 1984-10-15

Publications (2)

Publication Number Publication Date
JPS6173670U true JPS6173670U (enrdf_load_html_response) 1986-05-19
JPH0220213Y2 JPH0220213Y2 (enrdf_load_html_response) 1990-06-01

Family

ID=30713482

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15547184U Expired JPH0220213Y2 (enrdf_load_html_response) 1984-10-15 1984-10-15

Country Status (1)

Country Link
JP (1) JPH0220213Y2 (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPH0220213Y2 (enrdf_load_html_response) 1990-06-01

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