JPS6172249A - Register mark measuring method of separation film in separation film sticking device for photomechanical process - Google Patents

Abstract

PURPOSE:To detect the position of a mark consisting of longitudinal and transverse index lines with one one-dimensional camera by performing measurement with the one-dimensional camera whose measuring reference line is inclined at 45 deg. to longitudinal and transverse index lines constituting the register mark of a separation film. CONSTITUTION:A pair of one-dimensional measuring camera 15 attached to a film moving holder 13 check the placing position of a separation film 12 on a film moving base 11 and detect the deviation from a preliminarily set origin position and input this deviation to a computer. The moving mechanism of an estimate measuring light base 14 is moved by the command of the computer, and the separation film 12 is moved optionally in the X direction, the Y direction, and the rotation direction so that it coincides with the origin position. In this state, longitudinal and transverse index lines 21 and 22 of a register mark 20 of the separation film 12 are parallel with the X direction and the Y direction respectively. Since measuring cameras are installed with measuring reference lines inclined at 45 deg. to the X direction and the Y direction, measuring reference lines cross longitudinal and transverse index lines at 45 deg., and the intersection is switched for longitudinal and transverse index lines successively to perform measurement.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method for measuring register marks on a decomposition film in a narrow path for pasting a decomposition film for photolithography.

(Prior art) Conventionally, in order to form several transparent film bases with separation films attached to each separation color removal in multicolor printing,
The separation film for each separation color must be accurately aligned and attached to the transparent film base for each minute hand color using the punch hole of the transparent film base as a reference, but for this purpose, the transparent film to which each separation film is attached must be The positions of each decomposition film on the film base are sequentially stored in a computer based on the X-Y coordinates determined by the punch hole position on the transparent film base, the rotation angle, and the register mark attached to the decomposition film, and the transparent The decomposition film to be attached to the film base is sequentially positioned at a specific origin position determined based on its register mark, and the transparent film is positioned at the punch hole position while the positioned decomposition film is sequentially gripped at the origin position. A decomposition film pasting device for photolithography is sometimes used, in which the decomposition film is moved to a decomposition film pasting position stored in the computer based on the X-Y coordinates and rotation angle of the film base, and then pasted.

As shown in FIG. 5, the register mark 2 attached to the decomposition film 1 consists of a vertical marked line 3 and a number of horizontal marked lines 4°4... which intersect at right angles to the marked mark FJ3. The decomposed film is placed on the film moving stage 6 of the decomposed film pasting device 5 for photolithography shown in FIG. On the other hand, they are placed in alignment with the Y direction perpendicular to the horizontal plane. Therefore, when a one-dimensional camera is used as the measuring camera 8 attached to the film moving frame 7 for register mark measurement, it is necessary to measure each one of the register marks 2, 2 and detect its x-Y coordinates and rotation angle. This required a pair of measurement cameras for measuring the vertical marked line 3 and a measuring camera for measuring the horizontal marked line 4, that is, a total of four measuring cameras.

In addition, if you use a two-dimensional camera that can measure and detect both vertical and horizontal marking lines 3.4, you can measure and detect register marks 2 at two locations.
．． However, the two-dimensional camera is expensive and has the drawback that the control section becomes complicated.

(Problems to be Solved by the Invention) The present invention provides a method for measuring a register mark on a decomposition film in a decomposition film pasting device for photolithography, in which the position of a register mark consisting of vertical and horizontal gauge lines is detected.
The purpose of this invention is to provide a register mark measurement method that can be handled using a one-dimensional camera.

(Means for Solving the Problems) The register mark measuring method according to the present invention is such that the measurement reference line is installed at an angle of 45 degrees with respect to the vertical and horizontal marked lines constituting the register mark of the decomposition film. It is characterized by measuring register marks with a one-dimensional camera.

(Function) The separation film is placed so that the register marks displayed on both ends of the film correspond to a pair of measurement cameras (-dimensional cameras), and the vertical gauge line of the register mark is placed in the X direction. , the horizontal gauge line is oriented in the Y direction, and the measurement camera has its measurement reference line oriented at 45 degrees with respect to the X and Y directions.
Since the camera is tilted at an angle of 100 degrees, when the measurement camera is moved above the separation film and the measurement camera operates the register mark on the separation film, the measurement base LK line is aligned with the vertical and horizontal reference lines. They intersect at an inclination angle of 45°.

Therefore, if the intersection of each of the vertical and horizontal marked lines and the measurement reference line is sequentially switched and measured for each vertical and horizontal marked line, the vertical and horizontal marked lines can be measured using one one-dimensional camera. The position of the register mark can be detected.

In addition, not only when the measurement reference line is inclined at 45 degrees with respect to the marked line as described above, but also when the measurement reference line intersects with a predetermined angle of inclination (for example, when the measurement reference line is inclined at 6° with respect to the vertical marked line).
0°, 30° to the horizontal marking line, etc.)
The above action is performed, but the measurement reference line intersects the vertical and horizontal marked lines at the same angle of inclination, and the measuring reference line is changed vertically and horizontally at the point where each marked line can be measured and detected more accurately. An excellent method is to measure at an angle of 45 degrees with respect to the horizontal marking line.

(Example) Next, the configuration of an embodiment of the present invention will be explained with reference to the drawings.

First, the entire decomposition film pasting device for photolithography will be explained. The decomposition film 12 stored in the film storage case 9 is taken out by the film take-out arm 10 equipped with a vacuum-type suction gripper (not shown). The film is then placed on the film moving stage 11. Then, a vacuum-type suction/holding tool (not shown) is attached, and the film moving stand 13, which moves in the X direction, suction-holds the decomposed film 12 on the film moving stand 11 and transfers it onto the register measuring light stand 14. At this time, the pair of one-dimensional measuring cameras 15.15 attached to the film moving stand 13 or the substitute position of the decomposition film 12 on the film moving stand 11 are checked to check for deviations from the preset origin position. The detection is inputted to a computer, and a moving mechanism (not shown) of the register measuring light stand 14 is operated according to the command from the computer, and the molecular K film 12 is arbitrarily moved in the X direction, Y direction, and rotational direction to match the origin position. do. In this state, the vertical and horizontal marked lines 21 and 22 of the register mark 20 of the decomposition film 12 are parallel to the X and Y directions, respectively.

On the other hand, the transparent film base stored in the new base storage case 16 is sucked and held by a base moving frame 17 with a dowel pin puncher equipped with a vacuum-type suction gripping tool (not shown), and placed on a vacuum tensioning stand 18 with a dowel pin puncher 1=-. A pin puncher (not shown) punches a pin hole for alignment with the decomposed film 12, and a suction mechanism (not shown) fixes it on a vacuum biasing table 18 with a matching bin punch tray.

Then, one tensioning frame equipped with an adhesive tape applicator (not shown) moves onto the register measuring light stand 14, and suction-grips both ends of the decomposition film 12 with a pair of suction grippers (not shown), and then It is then transferred onto a transparent film base and pasted with adhesive tape.

However, the film transfer! l] The mount frame 13 has both M3E parts placed on a pair of rails 23 and 23 in the X direction extending from the film moving table 11 to the register measuring light stand 14, and the film moving table 11 (31 register) A pulse motor 25 is attached to the base of one end of the stand frame 24 formed to straddle the measurement light stand 14, and the pulse motor 25 is linked to a pulse scale (not shown) fixed in the same direction and length as the rail 23. The film moving frame 13 is moved to the rail 23.2 by the forward and reverse rotation of the pulse motor 25.
3.1:. On the pedestal frame 24, a pair of rails 27°, 27°, 28°, 27°, 27°, 27°, 27°, 27°, 27°, 27°, 27°, 27°, 27°, 27°, 28. Laying '28 and these rails 27゜2
7.28.28 A pair of bedplate frames 29.
Pulse motors 31, 3 are mounted on the bracket 30.30 on which the motor 29 is placed and protrudes from the number frame 29.29.
Ball screws 32 and 32 which are rotated by the rotation piece V' are screwed in by the pulse motors 31 and 31, and the plywood frame 29.

Rails 33.33 are laid parallel to each other along the X direction at symmetrical positions in the Y direction on the base plate frame 29.29, and a pair of movable plates 34.34 move on the rails 33.33. A pulse motor 36.3 is mounted on a bracket 35.35 protruding from the movable plate 34.34.
6, the movable plates 34, . 34 ht It is designed to move an arbitrary width in the X direction. Furthermore, the measurement camera 1 is mounted on the movable plate 34.
5.15. Vacuum-type suction gripping tools 39, 39 are installed in symmetrical positions facing downward. When the film moving stand 13 is moved onto the film moving stand 11, the three suction gripping tools adsorb the decomposed film 12, and in this state, the film moving stand 13 moves onto the register measuring light stand 14.
It is supposed to move upwards.

Measurement/J-mera 15. ．． 15 is installed in an inclined manner with respect to the X and Y directions as shown in FIG. Register mark 2 of decomposed film 12
0 [Vertical and horizontal gauge lines 21.22 and 4 respectively
The collars intersect at a 5° angle.

(Effects) The present invention provides a method for measuring register marks on a decomposition film in a decomposition film pasting device for photolithography, in which the present invention provides a method for detecting the position of a - register mark consisting of vertical and horizontal gauge lines.
This can be done with one one-dimensional camera, reducing the number of -dimensional cameras used, or preventing the cost increase and complication of the υ1t2IItsi structure due to the use of two-dimensional cameras.
Furthermore, because of the 45° inclination angle of the measurement reference line, there is an effect that the measurement and detection of the marked line can be made more accurate.

[Brief explanation of the drawing]

Fig. 1 is a perspective view of the film moving frame, Fig. 2 is a plan view of the disassembled film pasting device for photolithography, Fig. 3 is its front view, Fig. 4 is a plan view showing a conventional example, and Fig. 5 is a plan view of the disassembled film pasting device for photolithography. FIG. 2 is a perspective view of a molecule K film. 12... Decomposition film 13... Film moving stand 15... Measuring camera 20... Register mark 21.22... Marked line

Claims (1)

[Claims] Each decomposition film pasting position on the transparent film base to which the decomposition film is pasted is sequentially determined based on the X-Y coordinates determined by the punch hole position on the transparent film base, the rotation angle, and the register mark attached to the decomposition film. The decomposition films to be stored in the computer and attached to the transparent film base are sequentially positioned at specific origin positions determined based on the register marks, and the positioned decomposition films are sequentially gripped at the origin positions. Photolithography decomposition film pasting after being moved to the decomposition film pasting position stored in the computer based on the X-Y coordinates and rotation angle of the transparent film base positioned at the punch hole position. In the apparatus, the measurement reference line of the one-dimensional camera that detects the vertical and horizontal gauge lines that make up the register mark of the separation film is installed at an angle of 45 degrees to the vertical and horizontal gauge lines, and A method for measuring a register mark on a decomposition film in a decomposition film pasting device for photolithography, characterized in that the intersection point between one side and a measurement reference line is sequentially switched and measured for each vertical and horizontal marking line.