JPS6170710U - - Google Patents

Info

Publication number
JPS6170710U
JPS6170710U JP1984156917U JP15691784U JPS6170710U JP S6170710 U JPS6170710 U JP S6170710U JP 1984156917 U JP1984156917 U JP 1984156917U JP 15691784 U JP15691784 U JP 15691784U JP S6170710 U JPS6170710 U JP S6170710U
Authority
JP
Japan
Prior art keywords
light
target work
light receiving
receiving means
laser processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1984156917U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984156917U priority Critical patent/JPS6170710U/ja
Publication of JPS6170710U publication Critical patent/JPS6170710U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP1984156917U 1984-10-16 1984-10-16 Pending JPS6170710U (me)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984156917U JPS6170710U (me) 1984-10-16 1984-10-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984156917U JPS6170710U (me) 1984-10-16 1984-10-16

Publications (1)

Publication Number Publication Date
JPS6170710U true JPS6170710U (me) 1986-05-14

Family

ID=30714923

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984156917U Pending JPS6170710U (me) 1984-10-16 1984-10-16

Country Status (1)

Country Link
JP (1) JPS6170710U (me)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009511279A (ja) * 2005-10-18 2009-03-19 エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド レーザ処理中の対象物リアルタイムトポグラフィートラッキング

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5954908A (ja) * 1982-09-22 1984-03-29 Fujitsu Ltd 表面位置検出方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5954908A (ja) * 1982-09-22 1984-03-29 Fujitsu Ltd 表面位置検出方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009511279A (ja) * 2005-10-18 2009-03-19 エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド レーザ処理中の対象物リアルタイムトポグラフィートラッキング

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