JPS6169165U - - Google Patents
Info
- Publication number
- JPS6169165U JPS6169165U JP15343084U JP15343084U JPS6169165U JP S6169165 U JPS6169165 U JP S6169165U JP 15343084 U JP15343084 U JP 15343084U JP 15343084 U JP15343084 U JP 15343084U JP S6169165 U JPS6169165 U JP S6169165U
- Authority
- JP
- Japan
- Prior art keywords
- contact probe
- probe
- circular contact
- circular
- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 12
- 238000010586 diagram Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Measuring Leads Or Probes (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Description
第1図および第2図はこの考案の四端子プロー
ブを示し、第1図はその平面図、第2図は第1図
の−線断面図、第3図は従来例を示す図であ
る。 1……薄膜試料、10……円形接触型探針、1
1……点接触型探針、12,13……点接触型測
定用探針。
ブを示し、第1図はその平面図、第2図は第1図
の−線断面図、第3図は従来例を示す図であ
る。 1……薄膜試料、10……円形接触型探針、1
1……点接触型探針、12,13……点接触型測
定用探針。
Claims (1)
- 円計接触型探針と、この円形接触型探針の中心
に配置される接触型探針と、この接触型探針と前
記円形接触型探針との間に配置される2つの測定
用探針とを具備してなる四端子プローブ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15343084U JPS6169165U (ja) | 1984-10-11 | 1984-10-11 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15343084U JPS6169165U (ja) | 1984-10-11 | 1984-10-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6169165U true JPS6169165U (ja) | 1986-05-12 |
Family
ID=30711452
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15343084U Pending JPS6169165U (ja) | 1984-10-11 | 1984-10-11 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6169165U (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61187465U (ja) * | 1985-05-14 | 1986-11-21 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5796274A (en) * | 1980-10-17 | 1982-06-15 | Onera (Off Nat Aerospatiale) | Ohmmeter device |
-
1984
- 1984-10-11 JP JP15343084U patent/JPS6169165U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5796274A (en) * | 1980-10-17 | 1982-06-15 | Onera (Off Nat Aerospatiale) | Ohmmeter device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61187465U (ja) * | 1985-05-14 | 1986-11-21 |