JPS6168005U - - Google Patents

Info

Publication number
JPS6168005U
JPS6168005U JP15403184U JP15403184U JPS6168005U JP S6168005 U JPS6168005 U JP S6168005U JP 15403184 U JP15403184 U JP 15403184U JP 15403184 U JP15403184 U JP 15403184U JP S6168005 U JPS6168005 U JP S6168005U
Authority
JP
Japan
Prior art keywords
enclosure
clean
air
front side
clean room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15403184U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0237764Y2 (env
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15403184U priority Critical patent/JPH0237764Y2/ja
Publication of JPS6168005U publication Critical patent/JPS6168005U/ja
Application granted granted Critical
Publication of JPH0237764Y2 publication Critical patent/JPH0237764Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Warehouses Or Storage Devices (AREA)
JP15403184U 1984-10-11 1984-10-11 Expired JPH0237764Y2 (env)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15403184U JPH0237764Y2 (env) 1984-10-11 1984-10-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15403184U JPH0237764Y2 (env) 1984-10-11 1984-10-11

Publications (2)

Publication Number Publication Date
JPS6168005U true JPS6168005U (env) 1986-05-09
JPH0237764Y2 JPH0237764Y2 (env) 1990-10-12

Family

ID=30712025

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15403184U Expired JPH0237764Y2 (env) 1984-10-11 1984-10-11

Country Status (1)

Country Link
JP (1) JPH0237764Y2 (env)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62200610U (env) * 1986-06-10 1987-12-21
JPS6348706U (env) * 1986-09-17 1988-04-02
JPS6348707U (env) * 1986-09-17 1988-04-02

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62200610U (env) * 1986-06-10 1987-12-21
JPS6348706U (env) * 1986-09-17 1988-04-02
JPS6348707U (env) * 1986-09-17 1988-04-02

Also Published As

Publication number Publication date
JPH0237764Y2 (env) 1990-10-12

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