JPS6166936U - - Google Patents
Info
- Publication number
- JPS6166936U JPS6166936U JP1984152033U JP15203384U JPS6166936U JP S6166936 U JPS6166936 U JP S6166936U JP 1984152033 U JP1984152033 U JP 1984152033U JP 15203384 U JP15203384 U JP 15203384U JP S6166936 U JPS6166936 U JP S6166936U
- Authority
- JP
- Japan
- Prior art keywords
- container
- compound
- holder
- compound vapor
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000001875 compounds Chemical class 0.000 claims description 14
- 238000005507 spraying Methods 0.000 claims description 7
- 238000001816 cooling Methods 0.000 claims 1
- 230000003247 decreasing effect Effects 0.000 claims 1
- 230000007547 defect Effects 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 230000000630 rising effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984152033U JPS6166936U (enExample) | 1984-10-08 | 1984-10-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984152033U JPS6166936U (enExample) | 1984-10-08 | 1984-10-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6166936U true JPS6166936U (enExample) | 1986-05-08 |
Family
ID=30710121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984152033U Pending JPS6166936U (enExample) | 1984-10-08 | 1984-10-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6166936U (enExample) |
-
1984
- 1984-10-08 JP JP1984152033U patent/JPS6166936U/ja active Pending
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