JPS6166935U - - Google Patents

Info

Publication number
JPS6166935U
JPS6166935U JP1984152032U JP15203284U JPS6166935U JP S6166935 U JPS6166935 U JP S6166935U JP 1984152032 U JP1984152032 U JP 1984152032U JP 15203284 U JP15203284 U JP 15203284U JP S6166935 U JPS6166935 U JP S6166935U
Authority
JP
Japan
Prior art keywords
compound
container
compound vapor
valve body
guide hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1984152032U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0112263Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984152032U priority Critical patent/JPH0112263Y2/ja
Publication of JPS6166935U publication Critical patent/JPS6166935U/ja
Application granted granted Critical
Publication of JPH0112263Y2 publication Critical patent/JPH0112263Y2/ja
Expired legal-status Critical Current

Links

JP1984152032U 1984-10-08 1984-10-08 Expired JPH0112263Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984152032U JPH0112263Y2 (enExample) 1984-10-08 1984-10-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984152032U JPH0112263Y2 (enExample) 1984-10-08 1984-10-08

Publications (2)

Publication Number Publication Date
JPS6166935U true JPS6166935U (enExample) 1986-05-08
JPH0112263Y2 JPH0112263Y2 (enExample) 1989-04-11

Family

ID=30710120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984152032U Expired JPH0112263Y2 (enExample) 1984-10-08 1984-10-08

Country Status (1)

Country Link
JP (1) JPH0112263Y2 (enExample)

Also Published As

Publication number Publication date
JPH0112263Y2 (enExample) 1989-04-11

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