JPS6166935U - - Google Patents
Info
- Publication number
- JPS6166935U JPS6166935U JP1984152032U JP15203284U JPS6166935U JP S6166935 U JPS6166935 U JP S6166935U JP 1984152032 U JP1984152032 U JP 1984152032U JP 15203284 U JP15203284 U JP 15203284U JP S6166935 U JPS6166935 U JP S6166935U
- Authority
- JP
- Japan
- Prior art keywords
- compound
- container
- compound vapor
- valve body
- guide hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 150000001875 compounds Chemical class 0.000 claims description 16
- 238000005507 spraying Methods 0.000 claims description 4
- 230000007547 defect Effects 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984152032U JPH0112263Y2 (enExample) | 1984-10-08 | 1984-10-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984152032U JPH0112263Y2 (enExample) | 1984-10-08 | 1984-10-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6166935U true JPS6166935U (enExample) | 1986-05-08 |
| JPH0112263Y2 JPH0112263Y2 (enExample) | 1989-04-11 |
Family
ID=30710120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984152032U Expired JPH0112263Y2 (enExample) | 1984-10-08 | 1984-10-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0112263Y2 (enExample) |
-
1984
- 1984-10-08 JP JP1984152032U patent/JPH0112263Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0112263Y2 (enExample) | 1989-04-11 |