JPS6165736A - Table mechanism - Google Patents
Table mechanismInfo
- Publication number
- JPS6165736A JPS6165736A JP59185625A JP18562584A JPS6165736A JP S6165736 A JPS6165736 A JP S6165736A JP 59185625 A JP59185625 A JP 59185625A JP 18562584 A JP18562584 A JP 18562584A JP S6165736 A JPS6165736 A JP S6165736A
- Authority
- JP
- Japan
- Prior art keywords
- static pressure
- feed screw
- nut
- guide surface
- bed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007246 mechanism Effects 0.000 title claims abstract description 22
- 230000003068 static effect Effects 0.000 claims abstract description 42
- 238000001514 detection method Methods 0.000 claims abstract description 6
- 230000008878 coupling Effects 0.000 claims abstract description 5
- 238000010168 coupling process Methods 0.000 claims abstract description 5
- 238000005859 coupling reaction Methods 0.000 claims abstract description 5
- 230000004044 response Effects 0.000 claims description 2
- 239000012530 fluid Substances 0.000 abstract description 12
- 238000006073 displacement reaction Methods 0.000 abstract description 4
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002028 Biomass Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
- B23Q1/385—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports in which the thickness of the fluid-layer is adjustable
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/58—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism a single sliding pair
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
- B23Q5/38—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously
- B23Q5/40—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously by feed shaft, e.g. lead screw
- B23Q5/408—Nut bearings therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
- F16C29/025—Hydrostatic or aerostatic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2322/00—Apparatus used in shaping articles
- F16C2322/39—General buildup of machine tools, e.g. spindles, slides, actuators
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Machine Tool Units (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は超精密な工作機械や測定器、その他生塵システ
ム等、特に、半導体ウェハ基板の表面研削仕上げ、磁気
ヘッドの研削加工、レンズ加工機に用い、位置決め制御
を必要とするテーブル機構に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention is applicable to ultra-precision machine tools, measuring instruments, other raw dust systems, etc., especially surface grinding of semiconductor wafer substrates, grinding of magnetic heads, and lens processing. This invention relates to a table mechanism that is used in a machine and requires positioning control.
一般的に位置決め制御機能を要するテーブル機構は、ね
じ送り方式が多く利用されている。In general, table mechanisms that require a positioning control function often use a screw feed system.
このねじ送り機構の形態は、送りねじを支持台に軸架し
、テーブルにナツトを固着し、該ナツトは送りねじと螺
合し送りねじを回動させ、テーブルを軸方向に送り移動
させるものである。This screw feed mechanism has a feed screw mounted on a support base, a nut fixed to a table, and the nut is threaded onto the feed screw to rotate the feed screw and feed the table in the axial direction. It is.
ねじ送り機構は、テーブル案内面と送りねじとの取付誤
差による茶内精反が低下したり、ねじの自重によるたわ
みを生じたり、ねじの振れ廻りによる外乱が、ナツトを
介してテーブルに伝達され運動精度が低下する問題があ
り、これらの除去は非常に難しい。特に前述の半導体ウ
ェハ、磁気ヘッド、レンズのように、仮加工物が硬脆材
でＯま、被加工物に振動などが発生すると、例え＆ｉ微
振動でチッピングを生じたりする。そのため被加工物の
送り制御についても摺動案内面の凹凸などの影□ 響の
ない平滑な定速送り機構が要求される。そこでナットを
テーブルに静圧によって結合し、ねじの送り系の誤差に
影響されないことが望まい・カー、まだ精度、剛性の点
で満足に値するものがな（・。The screw feed mechanism has problems such as a reduction in internal tension due to installation errors between the table guide surface and the feed screw, deflection due to the screw's own weight, and disturbances caused by the wobbling of the screw that are transmitted to the table via the nut. There is a problem that movement accuracy decreases, and their removal is very difficult. In particular, when the temporary workpiece is a hard and brittle material such as the semiconductor wafer, magnetic head, or lens described above, if vibration or the like occurs in the workpiece, even slight vibrations may cause chipping. Therefore, in controlling the feed of the workpiece, a smooth constant-speed feed mechanism is required that is not affected by unevenness of the sliding guide surface. Therefore, it is desirable to connect the nut to the table using static pressure so that it is not affected by errors in the screw feed system, but there is still nothing that is satisfactory in terms of accuracy and rigidity.
本発明の目的は、上記の点を考慮して、送りねじ系の誤
差の影響を受けず、高精度に位置決めを行なうと共に、
テーブルの摺動方向の推力伝達に静圧流体を用いて、非
接触にテーフ諏しを駆動し、その上、テーブル剛性を高
め得るように構成したテーブル機構を提供せんとするも
のである。In consideration of the above points, an object of the present invention is to perform positioning with high precision without being affected by errors in the feed screw system, and to
It is an object of the present invention to provide a table mechanism configured to use static pressure fluid to transmit thrust in the sliding direction of the table to drive the tapered joints in a non-contact manner and to increase the rigidity of the table.
送りねじと螺合するナツトを固着し、ベッドと該ベッド
上に形成された案内面に係合案内されて摺動可能に載置
された嬶】、テーブルと、該第１テーブルの案内面と同
一の案内面に係合案内されて摺動可能に載置された第２
テーブルと、摺動方向に直交し、前記第１テーブルと第
２テーブルの各下面張出部の対向面に複数個の静圧バッ
ドからなる静圧支持部と、前記対向面の隙間を検出する
検出手段とを設け、前記第１テーブルは駆動モータに連
動する前記送りねじに係合するナットを介して直進し、
前記第２テーブルは前記第１テーブルとの対向面に設け
た静圧支持部の静圧結合によって摺動方向に駆動し、併
せて前記第２テーブルは前記第１テーブルとの隙間を検
出する検出手段からの検出信号によって、前記静圧支持
部の静圧バッドに差圧を供給して、隙間を補正するよう
に構成したものである。A table with a nut screwed into the feed screw fixed thereon and slidably mounted on the bed and the guide surface formed on the bed while being engaged and guided; a table; and a guide surface of the first table. A second plate is slidably placed on the same guide surface while being engaged and guided.
Detecting a gap between a table, a static pressure support section that is perpendicular to the sliding direction and is composed of a plurality of static pressure pads on opposing surfaces of each of the lower projecting parts of the first table and the second table, and the opposing surface. a detection means, the first table moves straight through a nut that engages with the feed screw that is interlocked with a drive motor;
The second table is driven in the sliding direction by static pressure coupling of a static pressure support provided on a surface facing the first table, and the second table also detects a gap between the second table and the first table. The gap is corrected by supplying a differential pressure to the static pressure pad of the static pressure support section in response to a detection signal from the means.
以下本発明の実施例を図面に基づいて記述する。 Embodiments of the present invention will be described below based on the drawings.
第１図は本発明に係るベッドと該ベッド上に形成された
案内部を含むテーブル機＋１ｎの斜視図である。１はベ
ッド、２．６は静圧案内部、４は被駆動第２テーブル、
５はモータ、６および７は支持台、８は送りねじである
。FIG. 1 is a perspective view of a table machine +1n including a bed and a guide portion formed on the bed according to the present invention. 1 is a bed, 2.6 is a static pressure guide, 4 is a driven second table,
5 is a motor, 6 and 7 are support stands, and 8 is a feed screw.
第２図は第１図のベッド１および該ベッド１上に形成さ
れた案内部２．６を除いたテーブル機構の斜視図である
。第２テーブル４は水平面張出部４ａ、４ｂ、４Ｃ１４
ｄおよび下面張出部４ｅ、４ｆを形成し、これらの両面
には、各複数の静圧バッド４ｇ、４ｈが配設されている
。その上前記第２テーブル４の下面は算１テーブル９を
配設するｆこめの断面路コ字型の切欠部４１が形成され
ている。（詳細は後述する）。上記算２テーブル４は前
記第１図記載のベッド１と該ベッド１上に形成された静
圧第内部２および６に該第２テーブルの水平面張出部４
ａ、４ｂ、４Ｃ１４ｄおよび下面張出部４ｅ、４［と係
合して、矢印入方向に直進運動する。FIG. 2 is a perspective view of the table mechanism excluding the bed 1 of FIG. 1 and the guide portion 2.6 formed on the bed 1. The second table 4 has horizontal projecting parts 4a, 4b, 4C14
d and lower surface projecting portions 4e, 4f are formed, and a plurality of static pressure pads 4g, 4h are disposed on both surfaces thereof. Furthermore, the lower surface of the second table 4 is formed with a notch 41 having a U-shaped cross section and an f-shape in which the arithmetic table 9 is disposed. (Details will be explained later). The above-mentioned arithmetic table 4 has the bed 1 shown in FIG.
a, 4b, 4C14d and lower surface projecting portions 4e, 4[, and move straight in the direction of the arrow.
第３図は駆動第１テーブルの斜視図である。９は駆動第
１テーブルで、前述の静圧案内部２および乙に案内され
る水平面張出部９ａ、９ｂおよび下面張出部９Ｃを形成
し、該張出部の両面にそれぞれに対応し″′Ｃ複数の静
圧・２ノド９ｄ、９ｅが配設されている。該下面張出部
９Ｃはナツト１０を同着し、該ナツト１０は送りねじ８
と＃、＠シて℃・る。９ｆは摺動方向と直交する静圧パ
ッドで、裏面にも同様の静圧バットか設けられてし・る
。FIG. 3 is a perspective view of the first drive table. Reference numeral 9 designates a driving first table, which has horizontal surface projecting portions 9a, 9b and a lower surface projecting portion 9C guided by the static pressure guide portion 2 and the lower surface projecting portion 9C. 'C A plurality of static pressure/two throats 9d and 9e are arranged.A nut 10 is attached to the lower surface projecting portion 9C, and the nut 10 is attached to the feed screw 8.
and #, @shite℃・ru. 9f is a static pressure pad perpendicular to the sliding direction, and a similar static pressure butt is also provided on the back side.
以下、断面図によって、本発明の実施例をさらに詳述す
る。Hereinafter, embodiments of the present invention will be described in further detail with reference to sectional views.
第４図は駆動第１テーブルの断面図である。FIG. 4 is a sectional view of the first driving table.
９ｄ、９ｅは静圧パッドで、外部流体圧力源（図示せず
）から圧送された流体が流体管路９ｇより分岐され、そ
れぞれ絞り９ｈを柱て流出する静圧流体の開口９Ｉ、９
Ｊが形成されている。ベッド１と該ペッド１上に形成さ
れた静圧案内部２および６と第１テーブル９の水平面張
出部９ａ、９ｂおよび下面張出部９Ｃとの間には微少−
隙間が設けられており、前記開口９１．９」から流出す
る静圧流体圧の作用によって、上記第１テーブル９は上
下および水平方向に静圧支持される。9d and 9e are static pressure pads, and the fluid pumped from an external fluid pressure source (not shown) is branched from the fluid conduit 9g, and has openings 9I and 9 for static pressure fluid to flow out through the aperture 9h, respectively.
J is formed. There is a small amount of air between the bed 1, the static pressure guide portions 2 and 6 formed on the ped 1, and the horizontal surface projecting portions 9a, 9b and the lower surface projecting portion 9C of the first table 9.
A gap is provided, and the first table 9 is statically supported vertically and horizontally by the action of static fluid pressure flowing out from the opening 91.9.
第５図は軸方向の断面図である。被、駆動第２テーブル
４の下面は駆動第１テーブル９を僅少隙間を設けて静圧
的に挾持するための下面張出部４ｅ、４ｒが形成されて
し・る。４Ｊ、４には貫通穴で、送りねじ８を遊挿する
。該送りねじ８は静圧送りねじで、ナツト１０は該送り
ねじ８軸上に互いに対向させ、上記第１テーブルの端部
に固着し７、前記送りねじ８と螺合して℃・る。該ねじ
８の静圧流体は外部流体圧力源（図示せず）から圧送さ
れ、管路９１より分岐し、複数個の絞り１０ａを経て該
送りねじ面に供給している。なおねじは静圧ねじとした
が、他のねじを用いてもよ（・。FIG. 5 is an axial cross-sectional view. The lower surface of the second driving table 4 is formed with lower surface projecting portions 4e and 4r for statically holding the first driving table 9 with a slight gap. 4J and 4 are through holes into which the feed screw 8 is loosely inserted. The feed screw 8 is a static pressure feed screw, and the nut 10 is opposed to each other on the axis of the feed screw 8, is fixed to the end of the first table 7, and is screwed into the feed screw 8. The static pressure fluid of the screw 8 is fed under pressure from an external fluid pressure source (not shown), branches from a conduit 91, and is supplied to the feed screw surface through a plurality of throttles 10a. Although the screws are static pressure screws, other screws may also be used.
第６図は軸方向の他の断面図である。第２テーブル４と
第１テーブル９の各下面張出部４ｅ、４ｆとおよび９Ｃ
との対向面に設けてなる静圧支持部を示す。１２．１６
は該対向面の僅少隙間である。前記ｉｉ子テーブルの下
面張出部９Ｃは前記対向面に向って、前記送りねじ８を
中心とし、略放射する位置に静圧パッド９ｆが形成され
ており、該静圧パッド９ｆは流体管路９１より分岐され
、絞り９ｍを経て流出する静圧九体の開口線９ｎを有し
ている。FIG. 6 is another axial cross-sectional view. The lower surface protrusions 4e, 4f and 9C of the second table 4 and the first table 9
A static pressure support portion provided on a surface facing the is shown. 12.16
is the slight gap between the facing surfaces. A static pressure pad 9f is formed on the lower surface projecting portion 9C of the secondary table toward the opposing surface at a position substantially radiating from the feed screw 8, and the static pressure pad 9f is connected to the fluid pipe line. It has an aperture line 9n of nine static pressure bodies that branches off from 91 and flows out through an aperture 9m.
第７図は本発明の他の実施例の要部断面図を示す。１４
．１５は変位検出器、１６は差動増幅器、１７は補償回
路、１８はサーボ増幅器、１９はサーボバルブである。FIG. 7 shows a sectional view of a main part of another embodiment of the present invention. 14
．． 15 is a displacement detector, 16 is a differential amplifier, 17 is a compensation circuit, 18 is a servo amplifier, and 19 is a servo valve.
該変位検出器１４．１５の電気信号は差動増幅器１６の
入力信号とし、該差動増１＠器１６の出力信号は前記補
償回路１７を通り、サーボ増幅器１８を介して前記サー
ボバルブ１９への制御信号として導かれる。サーボバル
ブ１９は制御信号に従って差圧的に相対する複数個の静
圧パッド９「に流体圧を与え、前述の隙間１２．１６を
一定に保つように制御するか、積極的に該隙間を補正し
、前記第２テーブルの送り方向の運動の位置補正を行な
い、負荷に応じて結合力を高めるように制御する。なお
変位器は一気的非接触検出器としたが、前記隙間を圧力
で検出する圧力検出器を用いてもよし・。The electric signals of the displacement detectors 14 and 15 are input signals to the differential amplifier 16, and the output signals of the differential amplifier 16 are passed through the compensation circuit 17 and sent to the servo valve 19 via the servo amplifier 18. is derived as a control signal. The servo valve 19 applies fluid pressure to a plurality of static pressure pads 9'' facing each other in terms of differential pressure in accordance with a control signal, and either controls the gap 12 and 16 described above to be kept constant or actively corrects the gap. Then, the position of the movement of the second table in the feeding direction is corrected, and control is performed to increase the bonding force according to the load.Although the displacement device is an instantaneous non-contact detector, the gap can be detected by pressure. You can also use a pressure detector.
以上の説明で明らかなように、本発明によれば制御装置
（図示せず）により、第２テーブル４に所要の送り指令
されると、モーフ５、送りねじ８の回動が行なわれ、第
１テーブル９を軸方向に移動させ、該第１テーブルと算
２テーブルの下面張出部の静圧支持部の流体圧によって
、該−４２テーブル４は軸方向の推力のみを受け、高楕
度、高剛性、高安定な微細送り可能なものとなる。即ち
、チルプル案内面と送りねじの加工、組立等の誤差、送
りねじの回動による振れ廻りによる外乱がナットを介し
て第２テーブルに伝達されることなく、直進性の高いテ
ーブル機構を得ることができる。As is clear from the above description, according to the present invention, when the control device (not shown) issues a required feed command to the second table 4, the morph 5 and the feed screw 8 are rotated, and the second table 4 is rotated. By moving the first table 9 in the axial direction, the -42 table 4 receives only the thrust in the axial direction due to the fluid pressure of the static pressure support part of the lower surface protruding part of the first table and the second table. , it becomes highly rigid, highly stable, and capable of fine feeding. That is, to obtain a table mechanism with high straightness without transmitting errors in machining and assembly of the tilt-pull guide surface and the feed screw, and disturbances due to run-out due to rotation of the feed screw to the second table via the nut. Can be done.
又送りねじと螺合するナツトと係合する第１テーブルと
、該８■１テーブルによって駆動する第２テーブルは、
ペッドと誹ベッド上に形成された同一の案内面に係合案
内されるため、構造が簡単となる。したがって超精密工
作機械や測定器、その他生量システム等、多くの分野で
極めて高−・有効性を発揮するなどの効果がある。Also, the first table that engages with the nut that is screwed into the feed screw, and the second table that is driven by the 8*1 table,
The structure is simple because the ped and the pedestal are engaged with and guided by the same guide surface formed on the bed. Therefore, it is extremely effective in many fields such as ultra-precision machine tools, measuring instruments, and other biomass systems.
第１図は本発明のテーブル機構の斜視図、第２図は第１
図の案内部を除いたテーブル機構の斜視図、第３図は１
叡・ｆｉｊ 算１テーブルの斜視図、第４図は駆動第１
テーブルの断面図、第５図は軸方向の断面図、第６図は
軸方向の他の断面図、第７図は本発明の池の夫施しｌの
要部１所面図を示す。
１・・・・・ベッド、２．６−・・・・静圧′、′、、
内部、４・・・第２テーブル、８・・・・・・送りねし
。
９・・・・・・第１テーブル。Fig. 1 is a perspective view of the table mechanism of the present invention, and Fig. 2 is a perspective view of the table mechanism of the present invention.
A perspective view of the table mechanism excluding the guide part shown in the figure, Figure 3 is 1
叡・FIJ A perspective view of the calculation 1 table, Figure 4 is the drive 1
5 is a cross-sectional view of the table, FIG. 5 is a cross-sectional view in the axial direction, FIG. 6 is another cross-sectional view in the axial direction, and FIG. 7 is a plan view of one main part of the pond support l of the present invention. 1...Bed, 2.6-...Static pressure',',,
Inside, 4...Second table, 8...No feed. 9...First table.
Claims (2)
内されて摺動可能に載置された摺動テーブルを有し、送
りねじとナットによって駆動されるテーブル機構におい
て、送りねじと螺合するナットを固着し、ベッド上の案
内面に摺動可能に載置された第１テーブルと、該第１テ
ーブルの案内面と同一の案内面に係合案内されて摺動可
能に載置された第２テーブルとからなり、摺動方向に直
交し前記第１テーブルと第２テーブルの各下面張出部の
対向面に複数個の静圧パッドからなる静圧支持部を形成
し、前記第１テーブルは駆動モータに連動する前記送り
ねじに係合するナットを介して直進し、前記第２テーブ
ルは前記第１テーブルとの対向面に設けた前記静圧支持
部の静圧結合によって摺動方向に駆動することを特徴と
するテーブル機構。(1) In a table mechanism that includes a bed and a sliding table formed on the bed and slidably mounted while being engaged and guided by a guide surface, the table mechanism is driven by a feed screw and a nut. A nut to be screwed is fixed, and a first table is slidably mounted on a guide surface on the bed, and the first table is slidably mounted while being engaged and guided by the same guide surface as the guide surface of the first table. a second table placed on the table, and a static pressure support part made of a plurality of static pressure pads is formed on the opposing surface of each lower surface projecting part of the first table and the second table, perpendicular to the sliding direction; The first table moves straight through a nut that engages with the feed screw that is interlocked with a drive motor, and the second table is moved by static pressure coupling of the static pressure support section provided on the surface facing the first table. A table mechanism characterized by being driven in the sliding direction.
内されて摺動可能に載置された摺動テーブルを有し、送
りねじとナットによって駆動されるテーブル機構におい
て、送りねじと螺合するナットを固着し、ベッド上の案
内面に摺動可能に載置された第１テーブルと、該第１テ
ーブルの案内面と同一の案内面に係合案内されて摺動可
能に載置された第２テーブルと、摺動方向に直交し前記
第１テーブルと第２テーブルの各下面張出部の対向面に
複数個の静圧パッドからなる静圧支持部と、上記対向面
の隙間を検出する検出手段とを設け、前記第１テーブル
は駆動モータに連動する前記送りねじに係合するナット
を介して直進し、前記第２テーブルは前記第１テーブル
との対向面に設けた静圧支持部の静圧結合によって摺動
方向に駆動され、かつ第２テーブルは第１テーブルとの
隙間を検出する検出手段からの検出信号によって、前記
静圧支持部の静圧パッドに差圧を供給して、隙間を補正
することを特徴とするテーブル機構。(2) In a table mechanism that includes a bed and a sliding table formed on the bed and slidably mounted while being engaged and guided by a guide surface, the table mechanism is driven by a feed screw and a nut. A nut to be screwed is fixed, and a first table is slidably mounted on a guide surface on the bed, and the first table is slidably mounted while being engaged and guided by the same guide surface as the guide surface of the first table. a second table placed thereon, a static pressure support section made of a plurality of static pressure pads on opposing surfaces of the lower surface projecting portions of the first table and the second table, perpendicular to the sliding direction; detection means for detecting a gap, the first table moves straight through a nut that engages the feed screw that is interlocked with a drive motor, and the second table is provided on a surface facing the first table. The second table is driven in the sliding direction by the static pressure coupling of the static pressure support part, and the second table applies a differential pressure to the static pressure pad of the static pressure support part in response to a detection signal from a detection means that detects a gap with the first table. A table mechanism that corrects gaps by supplying
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59185625A JPS6165736A (en) | 1984-09-05 | 1984-09-05 | Table mechanism |
| US06/761,005 US4653408A (en) | 1984-09-05 | 1985-07-30 | Table mechanism for controlling table attitude |
| GB08521940A GB2164275B (en) | 1984-09-05 | 1985-09-04 | Direct-acting table mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59185625A JPS6165736A (en) | 1984-09-05 | 1984-09-05 | Table mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6165736A true JPS6165736A (en) | 1986-04-04 |
Family
ID=16174059
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59185625A Pending JPS6165736A (en) | 1984-09-05 | 1984-09-05 | Table mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6165736A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61209834A (en) * | 1985-03-14 | 1986-09-18 | Toyoda Mach Works Ltd | Static pressure slide table |
| JPS61214932A (en) * | 1985-03-15 | 1986-09-24 | Toyoda Mach Works Ltd | Static pressure slide table |
| JP2007123400A (en) * | 2005-10-26 | 2007-05-17 | Yaskawa Electric Corp | Electric component, capacitor unit and power converter |
-
1984
- 1984-09-05 JP JP59185625A patent/JPS6165736A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61209834A (en) * | 1985-03-14 | 1986-09-18 | Toyoda Mach Works Ltd | Static pressure slide table |
| JPH0555264B2 (en) * | 1985-03-14 | 1993-08-16 | Toyoda Machine Works Ltd | |
| JPS61214932A (en) * | 1985-03-15 | 1986-09-24 | Toyoda Mach Works Ltd | Static pressure slide table |
| JPH0555265B2 (en) * | 1985-03-15 | 1993-08-16 | Toyoda Machine Works Ltd | |
| JP2007123400A (en) * | 2005-10-26 | 2007-05-17 | Yaskawa Electric Corp | Electric component, capacitor unit and power converter |
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