JPH0555264B2 - - Google Patents
Info
- Publication number
- JPH0555264B2 JPH0555264B2 JP60051517A JP5151785A JPH0555264B2 JP H0555264 B2 JPH0555264 B2 JP H0555264B2 JP 60051517 A JP60051517 A JP 60051517A JP 5151785 A JP5151785 A JP 5151785A JP H0555264 B2 JPH0555264 B2 JP H0555264B2
- Authority
- JP
- Japan
- Prior art keywords
- static pressure
- longitudinal direction
- reference guide
- supported
- joint
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003068 static effect Effects 0.000 claims description 74
- 230000002706 hydrostatic effect Effects 0.000 claims description 12
- 239000010687 lubricating oil Substances 0.000 description 5
- 239000003921 oil Substances 0.000 description 5
- 238000009434 installation Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/601—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism a single sliding pair followed parallelly by a single sliding pair
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
- B23Q5/38—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously
- B23Q5/40—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously by feed shaft, e.g. lead screw
- B23Q5/408—Nut bearings therefor
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Machine Tool Units (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は超精密送りに適した静圧スライドテー
ブル、特にその送り装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a static pressure slide table suitable for ultra-precision feeding, and particularly to a feeding device thereof.
この種の静圧スライドテーブルには、ベツドに
一体的に基準ガイドを設け、この基準ガイドによ
り第１静圧スライド装置を介して長手方向に往復
摺動可能にテーブルを案内支持し、前記ベツドに
より長手方向に往復摺動可能に案内支持され前記
テーブルに浮動的に結合された静圧継手を介して
同テーブルを送りねじにより往復駆動するものが
ある。このような技術によれば、静圧スライド装
置によりテーブルの案内支持部の摺動抵抗が少な
くて剛性が向上し、また浮動的に結合された静圧
継手を介してテーブルを往復駆動しているので送
りねじの曲りや偏心や基準ガイドに対する取付誤
差等による送り分力以外の力がテーブルに加わら
ず、従つて送り精度を向上させることができる。
しかして、従来のこの種の静圧スライド装置にお
いては、例えば特開昭58−177244号公報に示す如
く、テーブルを案内支持する基準ガイドとは別に
静圧継手を案内支持する案内レールをベツドに設
け、また、静圧継手をテーブルの長手方向の一側
端の近くに設けていた。
In this type of static pressure slide table, a reference guide is provided integrally with the bed, and the reference guide guides and supports the table so as to be able to reciprocate in the longitudinal direction via the first static pressure slide device. There is a device in which the table is guided and supported so as to be slidable back and forth in the longitudinal direction, and the table is driven back and forth by a feed screw via a static pressure joint that is floatingly connected to the table. According to this technology, the sliding resistance of the guide support part of the table is reduced by the static pressure slide device and the rigidity is improved, and the table is reciprocated through the floatingly connected static pressure joint. Therefore, no force other than the feed force due to bending or eccentricity of the feed screw, installation error with respect to the reference guide, etc. is applied to the table, and therefore feed accuracy can be improved.
In the conventional hydrostatic slide device of this type, for example, as shown in Japanese Unexamined Patent Publication No. 177244/1987, a guide rail for guiding and supporting the static pressure joint is attached to the bed in addition to a reference guide for guiding and supporting the table. A static pressure joint was also provided near one longitudinal end of the table.
かかる従来技術は、静圧継手のための案内レー
ルを基準ガイドとは別に設けているので構造が複
雑となつて製造コストが増大すると共に案内レー
ルと基準ガイドの間の相対的誤差により送り精度
を低下させるおそれがあり、また静圧継手をテー
ブルの一側端近くに設けているので送り方向によ
つて送り精度が相違するという問題があつた。本
発明は、テーブルを案内支持する基準ガイドによ
り静圧継手を案内支持すると共に静圧継手をテー
ブルの中心に対して対称的に配置してこれらの問
題点を解決するものである。
In such conventional technology, the guide rail for the static pressure joint is provided separately from the reference guide, which complicates the structure and increases manufacturing costs.In addition, the relative error between the guide rail and the reference guide deteriorates the feed accuracy. Furthermore, since the static pressure joint is provided near one end of the table, there is a problem that the feeding accuracy varies depending on the feeding direction. The present invention solves these problems by guiding and supporting the static pressure joint using a reference guide that guides and supporting the table, and by arranging the static pressure joint symmetrically with respect to the center of the table.
このために本発明による静圧スライドテーブル
は、第１図〜第４図に示す如く、ベツド１０に一
体的に基準ガイド１１を設け、この基準ガイド１
１により第１静圧スライド装置２５を介して長手
方向に往復摺動可能にテーブル２０を案内支持
し、ベツド１０により長手方向に往復摺動可能に
案内支持されテーブル２０に浮動的に結合された
静圧継手３０を介して同テーブル２０を送りねじ
４１により往復駆動してなる静圧スライドテーブ
ルにおいて、テーブル２０に長手方向と直交し同
テーブル２０の中心に対し対称的に配置された一
対の静圧面２４，２４を備えた切り欠き２３を設
けて同テーブル２０内部において基準ガイド１１
を露出せしめると共に第１静圧スライド装置２５
を同テーブル２０の少くとも長手方向両端部に設
け、切り欠き２３内に静圧継手３０を位置せしめ
て第２静圧スライド装置３２を介して基準ガイド
１１により案内支持すると共に同静圧継手３０の
長手方向両端面３６，３６と静圧面２４，２４の
間に長手方向の推力のみを伝達する静圧スラスト
装置３５，３５を形成したことを特徴とするもの
である。
For this purpose, the static pressure slide table according to the present invention has a reference guide 11 integrally provided with the bed 10, as shown in FIGS.
1 guides and supports the table 20 so as to be slidable back and forth in the longitudinal direction via a first static pressure slide device 25, and is guided and supported by the bed 10 so as to be able to slide back and forth in the longitudinal direction and is floatingly coupled to the table 20. In a static pressure slide table in which the table 20 is reciprocally driven by a feed screw 41 via a static pressure joint 30, a pair of static pressure slide tables are arranged perpendicular to the longitudinal direction of the table 20 and symmetrically with respect to the center of the table 20. A notch 23 with pressure surfaces 24, 24 is provided to allow the reference guide 11 to be placed inside the table 20.
and the first static pressure slide device 25
are provided at least at both ends of the table 20 in the longitudinal direction, and a static pressure joint 30 is positioned in the notch 23 and guided and supported by the reference guide 11 via the second static pressure slide device 32. It is characterized in that hydrostatic thrust devices 35, 35 are formed between the longitudinal end surfaces 36, 36 and the hydrostatic pressure surfaces 24, 24 to transmit only the thrust in the longitudinal direction.
テーブル２０及び静圧継手３０は、それぞれ第
１及び第２静圧スライド装置２５，３２を介して
共通の基準ガイド１１により案内支持される。そ
して、切り欠き２３内に位置して長手方向両端面
３６，３６に設けた静圧スラスト装置３５，３５
を介してテーブル２０に浮動的に結合された静圧
継手３０は、送りねじ４１により往復動してテー
ブル２０を往復駆動する。
The table 20 and the static pressure joint 30 are guided and supported by a common reference guide 11 via first and second static pressure slide devices 25 and 32, respectively. Hydrostatic thrust devices 35, 35 are located within the notch 23 and provided on both longitudinal end surfaces 36, 36.
The static pressure joint 30, which is floatingly connected to the table 20 via the feed screw 41, is reciprocated by the feed screw 41 to drive the table 20 back and forth.
かかる本発明による静圧スライドテーブルは、
テーブル及び静圧継手の両者が共通の基準ガイド
により案内支持されているのでこの両者の案内支
持構造が簡単となり製造コストを低下させること
ができると共に、摺動の際にこの両者の間に相対
的誤差が生じないのでこれが原因となる送り精度
の低下がない。また、テーブルと静圧継手の間の
長手方向推力を伝達する静圧スラスト装置をテー
ブルの中心に対して対称に設けてあるので送り方
向により送り精度が相違することなく、安定した
送り精度が得られる。
The static pressure slide table according to the present invention has the following features:
Since both the table and the static pressure joint are guided and supported by a common reference guide, the guiding and supporting structure for both is simple and manufacturing costs can be reduced. Since no error occurs, there is no decrease in feed accuracy caused by this error. In addition, the static pressure thrust device that transmits the longitudinal thrust between the table and the static pressure joint is installed symmetrically with respect to the center of the table, so the feed accuracy does not vary depending on the feed direction, and stable feed accuracy can be achieved. It will be done.
以下に、添付図面により実施例の説明をする。
図面に示す如く、細長いベツド１０の上部には、
互いに対向して長手方向に沿つて平行に延びる一
対の基準ガイド１１，１１を一体に設け、各基準
ガイド１１は主として第４図に示す如く、上案内
面１２、下案内面１３及び側案内面１４を有して
いる。基準ガイド１１，１１により長手方向に往
復摺動可能に案内支持されるテーブル２０は本体
２１とその下側にボルト止め等により一体結合さ
れた保持部材２２よりなり、その両側には前記
上、下、側の各案内面１２，１３，１４とそれぞ
れわずかの隙間を隔てて摺動可能に係合する摺動
面２６，２６，２６が形成されている。第１図及
び第２図に示す如く、テーブル２０の中央部には
切り欠き２３が設けられ、切り欠き２３は長手方
向と直交し同テーブル２０の中心に対し長手方向
で対称的に配置された一対の互いに対向する静圧
面２４，２４を有している。この切り欠き２３の
内部においては摺動面２６，２６，２６は中断さ
れて基準ガイド１１，１１は露出されている。切
り欠き２３の上端内には取り外し可能な蓋板２９
を設けてテーブル２０の上面を平坦とする。
Examples will be described below with reference to the accompanying drawings.
As shown in the drawing, at the top of the elongated bed 10,
A pair of reference guides 11, 11 facing each other and extending in parallel along the longitudinal direction are integrally provided, and each reference guide 11 mainly has an upper guide surface 12, a lower guide surface 13, and a side guide surface, as shown in FIG. It has 14. The table 20, which is guided and supported by reference guides 11, 11 so as to be able to reciprocate in the longitudinal direction, consists of a main body 21 and a holding member 22 that is integrally connected to the lower side of the main body 21 by bolting or the like. , sliding surfaces 26, 26, 26 are formed to slidably engage with the respective guide surfaces 12, 13, 14 on the sides with a slight gap therebetween. As shown in FIGS. 1 and 2, a notch 23 is provided in the center of the table 20, and the notch 23 is perpendicular to the longitudinal direction and arranged symmetrically in the longitudinal direction with respect to the center of the table 20. It has a pair of static pressure surfaces 24, 24 facing each other. Inside this notch 23, the sliding surfaces 26, 26, 26 are interrupted and the reference guides 11, 11 are exposed. Inside the upper end of the notch 23 is a removable cover plate 29.
is provided to make the upper surface of the table 20 flat.
第２図に示す如く、テーブル２０の長手方向両
端部の各２箇所には第１静圧スライド装置２５を
設ける。各第１静圧スライド装置２５は、主とし
て第４図に示す如く、各摺動面２６，２６，２６
とそれぞれに設けられた静圧ポケツト２７，２
７，２７よりなる。潤滑油供給装置５０よりの加
圧された潤滑油はフレキシブルホース５１及び接
続具５１ａを介してテーブル２０内に設けられた
油路５２に供給され、更にそれぞれ絞り５５，５
５，５５を介して各静圧ポケツト２７，２７，２
７に供給されてテーブル２０を基準ガイド１１，
１１に対し摺動可能に静圧支持している。 As shown in FIG. 2, first static pressure slide devices 25 are provided at two locations on each end of the table 20 in the longitudinal direction. Each of the first static pressure slide devices 25 mainly has sliding surfaces 26, 26, 26 as shown in FIG.
and static pressure pockets 27, 2 provided respectively.
Consists of 7,27. The pressurized lubricating oil from the lubricating oil supply device 50 is supplied to an oil passage 52 provided in the table 20 via a flexible hose 51 and a connector 51a, and is further supplied to an oil passage 52 provided in the table 20, and further to throttles 55 and 5, respectively.
5, 55 to each static pressure pocket 27, 27, 2
7 is supplied with the table 20 as a reference guide 11,
11, and is slidably supported by static pressure.
静圧継手３０は、第１図〜第３図に示す如く、
切り欠き２３内に位置し、第２静圧スライド装置
３２を介して基準ガイド１１，１１の前記露出部
分に長手方向に摺動可能に案内支持されている。
主として第３図に示す如く、静圧継手３０の両側
には各基準ガイド１１の上、下、側案内面１２，
１３，１４とそれぞれわずかの隙間を隔てて摺動
係合する各摺動面３３，３３，３３が形成され、
この摺動面３３，３３，３３とそれぞれに設けら
れた静圧ポケツト３４，３４，３４により第２静
圧スライド装置３２は形成されている。潤滑油供
給装置５０からの加圧された潤滑油は油路５２か
らフレキシブルホース５３及び接続具５３ａ，５
３ｂを経て静圧継手３０内の油路５４に供給さ
れ、更にそれぞれ絞り５６，５６，５６を介して
各静圧ポケツト３４，３４，３４に供給されて静
圧継手７０を基準ガイド１１，１１に対して摺動
可能に静圧支持している。 The static pressure joint 30, as shown in FIGS. 1 to 3,
It is located within the notch 23 and is guided and supported via a second static pressure slide device 32 to be slidable in the longitudinal direction on the exposed portions of the reference guides 11, 11.
As mainly shown in FIG. 3, upper, lower and side guide surfaces 12 of each reference guide 11 are provided on both sides of the static pressure joint 30.
Each sliding surface 33, 33, 33 is formed to be slidably engaged with 13, 14 with a slight gap, respectively,
A second static pressure slide device 32 is formed by these sliding surfaces 33, 33, 33 and static pressure pockets 34, 34, 34 provided respectively. The pressurized lubricating oil from the lubricating oil supply device 50 is transferred from the oil path 52 to the flexible hose 53 and the connectors 53a, 5.
3b to the oil passage 54 in the static pressure joint 30, and is further supplied to each static pressure pocket 34, 34, 34 through the throttles 56, 56, 56, respectively, and connects the static pressure joint 70 to the reference guides 11, 11. It is supported by static pressure so that it can slide against.
第１図及び第２図に示す如く、静圧継手３０の
長手方向両端面３６，３６は、それぞれわずかの
隙間を隔てて、切り欠き２３に設けられた一対の
静圧面２４，２４と対向せしめると共にその面方
向の相対移動は自由とし、両端面３６，３６と静
圧面２４，２４の間にはそれぞれ長手方向の推力
のみを伝達する静圧スラスト装置３５，３５を設
ける。各静圧スラスト装置３５は静圧継手３０の
端面３６とこれに設けられた静圧ポケツト３７よ
りなり、この静圧ポケツト３７には油路５４内の
加圧された潤滑油が絞り５７を介して供給されて
いる。これにより、静圧スラスト装置３５，３５
はテーブル２０の中心に対し長手方向で対称的に
設けられ、静圧継手３０はテーブル２０に浮動的
に結合される。 As shown in FIGS. 1 and 2, both longitudinal end surfaces 36, 36 of the static pressure joint 30 face a pair of static pressure surfaces 24, 24 provided in the notch 23, with a slight gap between them. At the same time, relative movement in the surface direction thereof is allowed, and hydrostatic thrust devices 35, 35 are provided between both end surfaces 36, 36 and the static pressure surfaces 24, 24, respectively, for transmitting thrust only in the longitudinal direction. Each hydrostatic thrust device 35 consists of an end face 36 of a hydrostatic joint 30 and a static pressure pocket 37 provided therein, into which pressurized lubricating oil in an oil passage 54 flows through a throttle 57. are supplied. As a result, the static pressure thrust devices 35, 35
are arranged symmetrically in the longitudinal direction with respect to the center of the table 20, and the hydrostatic joint 30 is floatingly coupled to the table 20.
第１図に示す如く、ベツド１０には基準ガイド
１１と平行に延びる送りねじ４１が軸受４３によ
り軸支され、この送りねじ４１は静圧継手３０に
固定されたナツト４２と螺合している。ベツド１
０と共通のベース４０に支持されたブラケツト４
４には、フレキシブルカツプリング４６を介して
送りねじ４１を回転駆動するサーボモータ４５が
設けられている。 As shown in FIG. 1, a feed screw 41 extending parallel to the reference guide 11 is rotatably supported on the bed 10 by a bearing 43, and this feed screw 41 is screwed into a nut 42 fixed to the static pressure joint 30. . bed 1
Bracket 4 supported on a common base 40 with 0
4 is provided with a servo motor 45 that rotationally drives the feed screw 41 via a flexible coupling 46.
サーボモータ４５が作動すれば、送りねじ４１
が回転駆動され、基準ガイド４１に静圧支持され
た静圧継手３０はナツト４２を介して往復駆動さ
れ、同じく基準ガイド４１に静圧支持されたテー
ブル２０は静圧スラスト装置３５，３５を介して
静圧継手３０により往復駆動される。しかして、
静圧スラスト装置３５，３５は静圧継手３０の長
手方向の推力のみを伝達するようにテーブル２０
に浮動的に結合され、これと直角方向の力は伝達
しないので、送りねじ４１の曲りや偏心や基準ガ
イド１１に対する取付誤差あるいはナツト４２の
取付誤差等により静圧継手３０に加わる送り方向
以外の不規則な力はテーブル２０には作用せず、
またテーブル２０と静圧継手３０の両者は共通の
基準ガイド１１により案内支持されているので摺
動の際に此等両者２０，３０の間に相対的に位置
の誤差が生じることなく、従つて送り精度は大幅
に向上する。また、テーブル２０と静圧継手３０
の間の静圧スラスト装置３５，３５はテーブル２
０の中心に対して対称に設けてあるので往復両送
り方向において同一の送り精度が得られる。な
お、静圧継手３０は第２静圧スラスト装置３２に
より送り方向以外の動きを精度よく拘束している
ので、送りねじ４１を軸支する軸受４３はサーボ
モータ４５側のみで足り、反対側にも軸受（図示
せず）を設ける必要は必ずしもない。 When the servo motor 45 operates, the feed screw 41
is rotationally driven, the static pressure joint 30 supported by static pressure on the reference guide 41 is reciprocated via the nut 42, and the table 20, also supported by static pressure on the reference guide 41, is moved via the static pressure thrust devices 35, 35. It is reciprocated by the static pressure joint 30. However,
The static pressure thrust devices 35, 35 are connected to the table 20 so as to transmit only the thrust in the longitudinal direction of the static pressure joint 30.
Since the force in the direction perpendicular to this is not transmitted, the force applied to the static pressure joint 30 in a direction other than the feed direction due to bending or eccentricity of the feed screw 41, installation error with respect to the reference guide 11, installation error of the nut 42, etc. The irregular force does not act on the table 20,
Furthermore, since both the table 20 and the static pressure joint 30 are guided and supported by the common reference guide 11, there is no relative positional error between them when sliding. Feed accuracy is greatly improved. In addition, the table 20 and the static pressure joint 30
The static pressure thrust devices 35, 35 between the table 2
Since it is provided symmetrically with respect to the center of zero, the same feeding accuracy can be obtained in both reciprocating feeding directions. In addition, since the static pressure joint 30 is precisely restrained from movement in directions other than the feed direction by the second static pressure thrust device 32, the bearing 43 that pivotally supports the feed screw 41 only needs to be provided on the servo motor 45 side; However, it is not necessarily necessary to provide a bearing (not shown).
図面は本発明による静圧スライドテーブルの一
実施例を示し、第１図は長手方向に沿つた縦断面
図、第２図は蓋板を除いた平面図、第３図は第１
図の−断面図、第４図は第１図の−断面
図である。
符号の説明、１０……ベツド、１１……基準ガ
イド、２０……テーブル、２３……切り欠き、２
４……静圧面、２５……第１静圧スライド装置、
３０……静圧継手、３２……第２静圧スライド装
置、３５……静圧スラスト装置、３６……端面、
４１……送りねじ。
The drawings show an embodiment of the static pressure slide table according to the present invention, in which Fig. 1 is a longitudinal cross-sectional view along the longitudinal direction, Fig. 2 is a plan view with the cover plate removed, and Fig. 3 is the first
FIG. 4 is a cross-sectional view of FIG. 1. Explanation of symbols, 10...Bed, 11...Reference guide, 20...Table, 23...Notch, 2
4... Static pressure surface, 25... First static pressure slide device,
30... Static pressure joint, 32... Second static pressure slide device, 35... Static pressure thrust device, 36... End face,
41...Feed screw.
Claims (1)
準ガイドにより第１静圧スライド装置を介して長
手方向に往復摺動可能にテーブルを案内支持し、
前記ベツドにより長手方向に往復摺動可能に案内
支持され前記テーブルに浮動的に結合された静圧
継手を介して同テーブルを送りねじにより往復駆
動してなる静圧スライドテーブルにおいて、前記
テーブルに長手方向と直交し同テーブルの中心に
対し対称的に配置された一対の静圧面を備えた切
り欠きを設けて同テーブル内部において前記基準
ガイドを露出せしめると共に前記第１静圧スライ
ド装置を同テーブルの少くとも長手方向両端部に
設け、前記切り欠き内に前記静圧継手を位置せし
めて第２静圧スライド装置を介して前記基準ガイ
ドにより案内支持すると共に同静圧継手の長手方
向両端面と前記静圧面の間に前記長手方向の推力
のみを伝達する静圧スラスト装置を形成したこと
を特徴とする静圧スライドテーブル。1. A reference guide is integrally provided in the bed, and the table is guided and supported by the reference guide so as to be slidable back and forth in the longitudinal direction via a first static pressure slide device.
In the hydrostatic slide table, the table is guided and supported by the bed so as to be slidable back and forth in the longitudinal direction, and the table is reciprocated by a feed screw via a static pressure joint floatingly connected to the table. A notch with a pair of static pressure surfaces perpendicular to the direction and symmetrically arranged with respect to the center of the table is provided to expose the reference guide inside the table, and the first static pressure slide device is attached to the table. The static pressure joint is provided at least at both ends in the longitudinal direction, and the static pressure joint is positioned in the notch and guided and supported by the reference guide via a second static pressure slide device. A hydrostatic slide table characterized in that a hydrostatic thrust device for transmitting only the thrust in the longitudinal direction is formed between hydrostatic surfaces.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5151785A JPS61209834A (en) | 1985-03-14 | 1985-03-14 | Static pressure slide table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5151785A JPS61209834A (en) | 1985-03-14 | 1985-03-14 | Static pressure slide table |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61209834A JPS61209834A (en) | 1986-09-18 |
| JPH0555264B2 true JPH0555264B2 (en) | 1993-08-16 |
Family
ID=12889199
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5151785A Granted JPS61209834A (en) | 1985-03-14 | 1985-03-14 | Static pressure slide table |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61209834A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0547133Y2 (en) * | 1987-01-05 | 1993-12-10 | ||
| DE3850825T2 (en) * | 1987-08-20 | 1995-03-09 | Toyoda Machine Works Ltd | Hydrostatic bearing for slide rails. |
| JPH01135960A (en) * | 1987-11-20 | 1989-05-29 | Toyoda Mach Works Ltd | Table driving gear |
| CN106181529B (en) * | 2016-08-31 | 2018-06-26 | 北京海普瑞森科技发展有限公司 | Transmission device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6165736A (en) * | 1984-09-05 | 1986-04-04 | Citizen Watch Co Ltd | Table mechanism |
-
1985
- 1985-03-14 JP JP5151785A patent/JPS61209834A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6165736A (en) * | 1984-09-05 | 1986-04-04 | Citizen Watch Co Ltd | Table mechanism |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61209834A (en) | 1986-09-18 |
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