JPS6165456U - - Google Patents
Info
- Publication number
- JPS6165456U JPS6165456U JP1984149862U JP14986284U JPS6165456U JP S6165456 U JPS6165456 U JP S6165456U JP 1984149862 U JP1984149862 U JP 1984149862U JP 14986284 U JP14986284 U JP 14986284U JP S6165456 U JPS6165456 U JP S6165456U
- Authority
- JP
- Japan
- Prior art keywords
- vertex
- photomask substrate
- utility
- scope
- rectangular shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
Description
第１図はこの考案のフオトマスク基板の平面図
、第２図は従来のフオトマスク基板の平面図であ
る。 １０……フオトマスク基板、１１，１２，１３
，１４……頂点、１５……指掛り孔、Ａ，Ｂ，Ｃ
，Ｄ……辺。
、第２図は従来のフオトマスク基板の平面図であ
る。 １０……フオトマスク基板、１１，１２，１３
，１４……頂点、１５……指掛り孔、Ａ，Ｂ，Ｃ
，Ｄ……辺。
Claims (1)
- 長方形などのフオトマスク基板において、少な
くとも１つの頂点近くに指掛り孔を穿設して構成
したことを特徴とするフオトマスク基板。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984149862U JPS6165456U (ja) | 1984-10-02 | 1984-10-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984149862U JPS6165456U (ja) | 1984-10-02 | 1984-10-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6165456U true JPS6165456U (ja) | 1986-05-06 |
Family
ID=30708029
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984149862U Pending JPS6165456U (ja) | 1984-10-02 | 1984-10-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6165456U (ja) |
-
1984
- 1984-10-02 JP JP1984149862U patent/JPS6165456U/ja active Pending