JPS6165454U - - Google Patents
Info
- Publication number
- JPS6165454U JPS6165454U JP1984149857U JP14985784U JPS6165454U JP S6165454 U JPS6165454 U JP S6165454U JP 1984149857 U JP1984149857 U JP 1984149857U JP 14985784 U JP14985784 U JP 14985784U JP S6165454 U JPS6165454 U JP S6165454U
- Authority
- JP
- Japan
- Prior art keywords
- photomask substrate
- vertex
- finger
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
Description
第１図はこの考案のフオトマスク基板の平面図
、第２図は従来のフオトマスク基板の平面図であ
る。 １０……フオトマスク基板、１１，１２，１３
，１４……頂点、１５，１６……切欠、Ａ，Ｂ，
Ｃ，Ｄ……辺、……パターンの領域。
、第２図は従来のフオトマスク基板の平面図であ
る。 １０……フオトマスク基板、１１，１２，１３
，１４……頂点、１５，１６……切欠、Ａ，Ｂ，
Ｃ，Ｄ……辺、……パターンの領域。
Claims (1)
- 長方形のフオトマクス基板において、少なくと
も１つの頂点に隣合つた２つの辺に指掛り切欠を
形成して構成したことを特徴とするフオトマスク
基板。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984149857U JPS6165454U (ja) | 1984-10-02 | 1984-10-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984149857U JPS6165454U (ja) | 1984-10-02 | 1984-10-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6165454U true JPS6165454U (ja) | 1986-05-06 |
Family
ID=30708024
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984149857U Pending JPS6165454U (ja) | 1984-10-02 | 1984-10-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6165454U (ja) |
-
1984
- 1984-10-02 JP JP1984149857U patent/JPS6165454U/ja active Pending