JPS616472A - Leak apparatus - Google Patents
Leak apparatusInfo
- Publication number
- JPS616472A JPS616472A JP12519184A JP12519184A JPS616472A JP S616472 A JPS616472 A JP S616472A JP 12519184 A JP12519184 A JP 12519184A JP 12519184 A JP12519184 A JP 12519184A JP S616472 A JPS616472 A JP S616472A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum container
- valve
- leak
- gas introduction
- little
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Self-Closing Valves And Venting Or Aerating Valves (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は、リーク装置に係り、特に真空容器のリークに
好適なリーク装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a leak device, and particularly to a leak device suitable for leaking a vacuum container.
真空容器にリークガスを導入してリークする技術として
は、例えば、実開昭58−150836号公報壷こ示す
ように、真空容器に連結されたり−クガス導入ラインに
設けられたバルブの開度な真空容器内の圧力により調節
して真空容器へリークガスを導入する技術が知られてい
る。As a technique for leaking gas by introducing it into a vacuum container, for example, as shown in Japanese Utility Model Application Publication No. 58-150836, there is a technique for leaking by introducing a leak gas into a vacuum container, as shown in FIG. A technique is known in which leak gas is introduced into a vacuum container by adjusting the pressure within the container.
この技術では、真空容器のリーク初期時に多量のリーク
ガスが急激に真空容器内に導入されるため、真空容器内
で発塵するという問題があった。With this technique, a large amount of leak gas is rapidly introduced into the vacuum container at the initial stage of leakage of the vacuum container, so there is a problem in that dust is generated within the vacuum container.
本発明の目的は、真空容器のリーク初期時にリークガス
を少量ずつ真空容器内に導入することで、−′
真空容器内での発塵な防止できるリーク装置を
提供することにある。The purpose of the present invention is to introduce leak gas into the vacuum container little by little at the initial stage of leakage in the vacuum container, so that -'
It is an object of the present invention to provide a leak device capable of preventing dust generation within a vacuum container.
本発明は、リーク装置を、真空容器のリーク孔と連通ず
る弁孔が穿設された弁体と、該弁体に気密に設けられた
弁箱と、弁孔に開口面積可変に挿入されオリフィス支持
体とベローズフランジとを介して弁箱に内設されたオリ
フィスと、ベローズフランジ内と連通し弁箱に連結され
たリークガス導入ラインと、該ラインから分岐してベロ
ーズフランジ外の弁箱内と連通可能に訳弁箱に連結され
たり−クガス導入分岐ラインと、開口面積を拡大可能に
弁体とオリフィス支持体との間に設けられた弾性体と、
リークガス導入分岐ラインよりベローズフランジ外の弁
箱内に導入されたリークカスを弁箱内から真空容器内に
少量ずつ導入するガス導入スリット若しくはガス導入孔
とで構成したことを特徴とするもので、真空容器のリー
ク初期時にリークガスを少量ずつ導入するようにしたも
のである。The present invention provides a leak device including a valve body having a valve hole communicating with a leak hole of a vacuum container, a valve box airtightly provided in the valve body, and an orifice inserted into the valve hole with a variable opening area. An orifice installed inside the valve box via the support and the bellows flange, a leak gas introduction line that communicates with the inside of the bellows flange and is connected to the valve box, and a leak gas introduction line that branches from the line and connects to the inside of the valve box outside the bellows flange. an elastic member provided between the valve body and the orifice support so as to be able to expand the opening area;
It is characterized by a gas introduction slit or a gas introduction hole that introduces leak gas introduced into the valve box outside the bellows flange from the leak gas introduction branch line into the vacuum vessel from inside the valve box little by little. The leak gas is introduced little by little at the beginning of leakage from the container.
本発明の一実施例を図面により説明する。 An embodiment of the present invention will be described with reference to the drawings.
図面で、真空容器10の側壁には、この場合、リーク孔
であり、また、弁孔でもある形状がロート状の孔加が穿
設されている。したがって、この場合は、真空容器10
の側壁が弁体21となり、弁体21には、弁箱nが気密
に設けられている。形状が孔加と対応する形状、つまり
、円錐台形のオリフィスnは、孔加に開口面積可変に挿
入されオリフィス支持体Uとベローズフランジbとを介
して弁箱ρに内設されている。弁箱ηには、ベローズフ
ランジδ内、つまり、弁箱nの側壁とオリフィス支持体
列とベローズフランジδとで形成された空間Aと連通し
てリークガス導入ラインにが連結され、リークガス導入
ラインがより分岐したリークガス導入分岐ラインnが、
ベローズフランジδ外の弁箱n内、つまり空間Aと遮断
された空間Bに連通可能に連結されている。この場合、
リークガス導入分岐ラインnには、バルブ公が設けられ
ると共にバルブ塾の後流側にはフィルター四が設けられ
ている。弁体21とオリフィス支持体列との間には、開
口面積を拡大可能に弾性体、例えばコイルバネ(9)が
設けられている。リークガス導入分岐ラインnより空間
Bに導入されたリークガスを空間Bから真空容器10内
に少量ずつ導入する、この場合、ガス導入スリット31
が、孔加と接触するオリフィスるの面に形成されている
。In the drawing, a funnel-shaped hole is bored in the side wall of the vacuum vessel 10, which in this case is a leak hole and also a valve hole. Therefore, in this case, the vacuum container 10
The side wall of the valve body 21 serves as a valve body 21, and a valve box n is airtightly provided on the valve body 21. An orifice n having a shape corresponding to that of the hole, that is, a truncated cone, is inserted into the hole so that its opening area can be changed, and is installed in the valve body ρ via the orifice support U and the bellows flange b. The valve box η is connected to the leak gas introduction line in communication with the inside of the bellows flange δ, that is, the space A formed by the side wall of the valve case n, the orifice support row, and the bellows flange δ. The more branched leak gas introduction branch line n is
It is connected to the inside of the valve box n outside the bellows flange δ, that is, to the space B that is blocked off from the space A so as to be able to communicate with it. in this case,
The leak gas introduction branch line n is provided with a valve, and a filter 4 is provided on the downstream side of the valve. An elastic body, such as a coil spring (9), is provided between the valve body 21 and the orifice support row so as to be able to expand the opening area. The leak gas introduced into the space B from the leak gas introduction branch line n is introduced little by little into the vacuum container 10 from the space B. In this case, the gas introduction slit 31
is formed on the surface of the orifice that contacts the hole.
図面は、オリフィスZが閉止され真空容器lO内が所定
真空圧力にある状態を示すもので、真空容器lOは、こ
の状態から次のようにしてリークされる。The drawing shows a state in which the orifice Z is closed and the inside of the vacuum vessel IO is at a predetermined vacuum pressure, and the vacuum vessel IO is leaked from this state as follows.
図面で、バルブZが開弁されると、リークガス導入ライ
ンがからリークガス導入分岐ラインかに分流されたリー
クガスは、フィルター四で清浄にされた後に空間Bに導
入される。空間Bに導入されたリークガスは、ガス導入
スリット31を介して空間Bから真空容器10内に少量
ずつ導入される。In the drawing, when the valve Z is opened, the leak gas that is diverted from the leak gas introduction line to the leak gas introduction branch line is introduced into the space B after being purified by the filter 4. The leak gas introduced into the space B is introduced little by little into the vacuum container 10 from the space B via the gas introduction slit 31.
これにより真空容器10内の圧力は徐々に上昇するよう
になる。その後、空間Aと空間Bとの圧力差によるオリ
フィスnを孔加に押し付ける力がコイルバネ(資)のバ
ネ力よりも小さ曵なった時点で、この押し付は力とバ不
力との差力によりオリフィスnは徐々に開けられ開口面
積が拡大する。この開口面積の拡大により空間Bより真
空容器lO内に導入されるリークガスの量が増加し、こ
れにより、真空容器10内は速やかにリークされる。As a result, the pressure inside the vacuum container 10 gradually increases. After that, when the force that presses the orifice n against the hole hole due to the pressure difference between space A and space B becomes smaller than the spring force of the coil spring, this pressing is done due to the difference between the force and the spring force. The orifice n is gradually opened and the opening area is expanded. Due to this enlargement of the opening area, the amount of leak gas introduced into the vacuum container 10 from the space B increases, so that the inside of the vacuum container 10 is quickly leaked.
本実施例のようなリーク装置では、次のような効果が得
られる。A leak device like this embodiment provides the following effects.
(1)真空容器のリーク初期時にガス導入スリットを介
してリークガスを少量ずつ真空容器内に導入するので、
真空容器内の発塵を防止できる。(1) At the initial stage of leakage in the vacuum container, leak gas is introduced into the vacuum container little by little through the gas introduction slit.
Dust generation inside the vacuum container can be prevented.
(2)リーク初期経過後、真空容器内に導入されるリー
クガスの量が増加するので、真空容器のリークに要する
時間を短縮できる。(2) Since the amount of leak gas introduced into the vacuum container increases after the initial stage of leakage, the time required for leakage of the vacuum container can be shortened.
なお、本実施例では、ガス導入スリットをオリフィスに
形成しているが、この他をこ、孔に形成するようにして
も良い。また、ガス導入孔を真空容器内と空間Bとを連
通させて他の部材に形成しても良い。In this embodiment, the gas introduction slit is formed in the orifice, but the gas introduction slit may be formed in the hole. Further, the gas introduction hole may be formed in another member to communicate the inside of the vacuum container and the space B.
本発明は、以上説明したように、リーク装置を、真空容
器のリーク孔と連通する弁孔が穿設された弁体と、該弁
体に気密に設けられた弁箱と、弁孔に開口面積可変に挿
入されオリフィス支持体とべローズフランジとを介して
弁箱に内設されたオリフィスと、ベローズフランジ内と
連通し弁箱に連り
結されたり−若ガス導入ラインと、該ラインから、分岐
してベローズフランジ外の弁箱内と連通可能に該弁箱に
連結されたリークガス導入分岐ラインと、開口面積を拡
大可能に弁体とオリフィス支持体との間に設けられた弾
性体と、゛リークガス導入分岐ラインよりベローズフラ
ンジ外の弁箱内に導入されたリークガスを弁箱内から真
空容器内に少量ずつ導入するガス導入スリット若しくは
ガス導入孔とで構成したことで、真空容器のリーク初期
時にリークガスを少量ずつ真空容器内に導入できるので
、真空容器内での発塵な防止できるという効果がある。As explained above, the present invention provides a leak device including a valve body having a valve hole communicating with a leak hole of a vacuum container, a valve box airtightly provided in the valve body, and an opening in the valve hole. An orifice inserted in a variable area and installed inside the valve box via an orifice support and a bellows flange, a gas introduction line that communicates with the inside of the bellows flange and is connected to the valve box, and from the line, a leak gas introduction branch line that is branched and connected to the valve box so that it can communicate with the inside of the valve box outside the bellows flange; an elastic body that is provided between the valve body and the orifice support so that the opening area can be expanded; By constructing a gas introduction slit or gas introduction hole that introduces leak gas introduced into the valve box outside the bellows flange from the leak gas introduction branch line into the vacuum container from inside the valve box little by little, it is possible to prevent the initial leakage of the vacuum container. Since the leak gas can be introduced into the vacuum container little by little, dust generation within the vacuum container can be prevented.
図面は、本発明によるリーク装置の一実施例を示す断面
図である。The drawing is a sectional view showing an embodiment of a leak device according to the present invention.
Claims (1)
体と、該弁体に気密に設けられた弁箱と、前記弁孔に開
口面積可変に挿入されオリフィス支持体とベローズフラ
ンジとを介して前記弁箱に内設されたオリフィスと、前
記ベローズフランジ内と連通し前記弁箱に連結されたリ
ークガス導入ラインと、該ラインから分岐して前記ベロ
ーズフランジ外の前記弁箱内と連通可能に該弁箱に連結
されたリークガス導入分岐ラインと、前記開口面積を拡
大可能に前記弁体と前記オリフィス支持体との間に設け
られた弾性体と、前記リークガス導入分岐ラインより前
記ベローズフランジ外の前記弁箱内へ導入されたリース
ガスを該弁箱内から前記真空容器内に少量ずつ導入する
ガス導入スリット若しくはガス導入孔とで構成したこと
を特徴とするリーク装置。1. A valve body having a valve hole communicating with the leak hole of the vacuum container, a valve box airtightly provided to the valve body, an orifice support body and a bellows flange inserted into the valve hole so as to have a variable opening area. an orifice installed in the valve box via a leak gas introduction line that communicates with the inside of the bellows flange and is connected to the valve box, and a leak gas introduction line that branches from the line and connects to the inside of the valve box outside the bellows flange. a leak gas introduction branch line connected to the valve box in a communicable manner; an elastic body provided between the valve body and the orifice support so that the opening area can be expanded; and a leak gas introduction branch line connected to the valve box; A leak device comprising a gas introduction slit or a gas introduction hole for introducing lease gas introduced into the valve box outside the flange into the vacuum container from inside the valve box little by little.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12519184A JPS616472A (en) | 1984-06-20 | 1984-06-20 | Leak apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12519184A JPS616472A (en) | 1984-06-20 | 1984-06-20 | Leak apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS616472A true JPS616472A (en) | 1986-01-13 |
Family
ID=14904166
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12519184A Pending JPS616472A (en) | 1984-06-20 | 1984-06-20 | Leak apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS616472A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6370620A (en) * | 1986-09-12 | 1988-03-30 | Nec Corp | Flip-flop |
JPH026834A (en) * | 1988-06-24 | 1990-01-11 | Fujitsu Ltd | Self-control valve and method for leaking reduced-pressure chamber |
-
1984
- 1984-06-20 JP JP12519184A patent/JPS616472A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6370620A (en) * | 1986-09-12 | 1988-03-30 | Nec Corp | Flip-flop |
JPH026834A (en) * | 1988-06-24 | 1990-01-11 | Fujitsu Ltd | Self-control valve and method for leaking reduced-pressure chamber |
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