JPS6163836U - - Google Patents

Info

Publication number
JPS6163836U
JPS6163836U JP14852784U JP14852784U JPS6163836U JP S6163836 U JPS6163836 U JP S6163836U JP 14852784 U JP14852784 U JP 14852784U JP 14852784 U JP14852784 U JP 14852784U JP S6163836 U JPS6163836 U JP S6163836U
Authority
JP
Japan
Prior art keywords
holding part
accommodate
liquid introduction
registration request
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14852784U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14852784U priority Critical patent/JPS6163836U/ja
Publication of JPS6163836U publication Critical patent/JPS6163836U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP14852784U 1984-10-02 1984-10-02 Pending JPS6163836U (sl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14852784U JPS6163836U (sl) 1984-10-02 1984-10-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14852784U JPS6163836U (sl) 1984-10-02 1984-10-02

Publications (1)

Publication Number Publication Date
JPS6163836U true JPS6163836U (sl) 1986-04-30

Family

ID=30706733

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14852784U Pending JPS6163836U (sl) 1984-10-02 1984-10-02

Country Status (1)

Country Link
JP (1) JPS6163836U (sl)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61204941A (ja) * 1985-03-08 1986-09-11 Hitachi Ltd 洗浄装置用搬送トレイ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54149470A (en) * 1978-05-16 1979-11-22 Fujitsu Ltd Washing jig of semiconductor chip

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54149470A (en) * 1978-05-16 1979-11-22 Fujitsu Ltd Washing jig of semiconductor chip

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61204941A (ja) * 1985-03-08 1986-09-11 Hitachi Ltd 洗浄装置用搬送トレイ

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