JPS6163836U - - Google Patents
Info
- Publication number
- JPS6163836U JPS6163836U JP14852784U JP14852784U JPS6163836U JP S6163836 U JPS6163836 U JP S6163836U JP 14852784 U JP14852784 U JP 14852784U JP 14852784 U JP14852784 U JP 14852784U JP S6163836 U JPS6163836 U JP S6163836U
- Authority
- JP
- Japan
- Prior art keywords
- holding part
- accommodate
- liquid introduction
- registration request
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14852784U JPS6163836U (en, 2012) | 1984-10-02 | 1984-10-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14852784U JPS6163836U (en, 2012) | 1984-10-02 | 1984-10-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6163836U true JPS6163836U (en, 2012) | 1986-04-30 |
Family
ID=30706733
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14852784U Pending JPS6163836U (en, 2012) | 1984-10-02 | 1984-10-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6163836U (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61204941A (ja) * | 1985-03-08 | 1986-09-11 | Hitachi Ltd | 洗浄装置用搬送トレイ |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54149470A (en) * | 1978-05-16 | 1979-11-22 | Fujitsu Ltd | Washing jig of semiconductor chip |
-
1984
- 1984-10-02 JP JP14852784U patent/JPS6163836U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54149470A (en) * | 1978-05-16 | 1979-11-22 | Fujitsu Ltd | Washing jig of semiconductor chip |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61204941A (ja) * | 1985-03-08 | 1986-09-11 | Hitachi Ltd | 洗浄装置用搬送トレイ |