JPS6163390U - - Google Patents

Info

Publication number
JPS6163390U
JPS6163390U JP1985113765U JP11376585U JPS6163390U JP S6163390 U JPS6163390 U JP S6163390U JP 1985113765 U JP1985113765 U JP 1985113765U JP 11376585 U JP11376585 U JP 11376585U JP S6163390 U JPS6163390 U JP S6163390U
Authority
JP
Japan
Prior art keywords
aperture slit
laser
processing apparatus
laser beam
laser processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1985113765U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0231277Y2 (fi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985113765U priority Critical patent/JPH0231277Y2/ja
Publication of JPS6163390U publication Critical patent/JPS6163390U/ja
Application granted granted Critical
Publication of JPH0231277Y2 publication Critical patent/JPH0231277Y2/ja
Expired legal-status Critical Current

Links

JP1985113765U 1985-07-26 1985-07-26 Expired JPH0231277Y2 (fi)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985113765U JPH0231277Y2 (fi) 1985-07-26 1985-07-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985113765U JPH0231277Y2 (fi) 1985-07-26 1985-07-26

Publications (2)

Publication Number Publication Date
JPS6163390U true JPS6163390U (fi) 1986-04-30
JPH0231277Y2 JPH0231277Y2 (fi) 1990-08-23

Family

ID=30672789

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985113765U Expired JPH0231277Y2 (fi) 1985-07-26 1985-07-26

Country Status (1)

Country Link
JP (1) JPH0231277Y2 (fi)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49140794U (fi) * 1973-03-26 1974-12-04
JPS53133744U (fi) * 1977-03-30 1978-10-23

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49140794U (fi) * 1973-03-26 1974-12-04
JPS53133744U (fi) * 1977-03-30 1978-10-23

Also Published As

Publication number Publication date
JPH0231277Y2 (fi) 1990-08-23

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