JPS616299B2 - - Google Patents
Info
- Publication number
- JPS616299B2 JPS616299B2 JP52093570A JP9357077A JPS616299B2 JP S616299 B2 JPS616299 B2 JP S616299B2 JP 52093570 A JP52093570 A JP 52093570A JP 9357077 A JP9357077 A JP 9357077A JP S616299 B2 JPS616299 B2 JP S616299B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9357077A JPS5427770A (en) | 1977-08-04 | 1977-08-04 | Constant temperature clean bench |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9357077A JPS5427770A (en) | 1977-08-04 | 1977-08-04 | Constant temperature clean bench |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5427770A JPS5427770A (en) | 1979-03-02 |
| JPS616299B2 true JPS616299B2 (et) | 1986-02-25 |
Family
ID=14085904
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9357077A Granted JPS5427770A (en) | 1977-08-04 | 1977-08-04 | Constant temperature clean bench |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5427770A (et) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0265897U (et) * | 1988-11-07 | 1990-05-17 |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5776851A (en) * | 1980-10-31 | 1982-05-14 | Watanabe Shoko:Kk | Inspecting device for photoelectric element |
| JPS6077948U (ja) * | 1983-11-02 | 1985-05-31 | 高砂熱学工業株式会社 | 移動式エンバイロメンタルチヤンバ− |
| JPS6127427A (ja) * | 1984-07-17 | 1986-02-06 | Hitachi Ltd | 温調チヤンバ− |
| JPS6179136U (et) * | 1984-10-30 | 1986-05-27 | ||
| JPS6191746U (et) * | 1984-11-19 | 1986-06-14 | ||
| JPS64738A (en) * | 1988-05-20 | 1989-01-05 | Hitachi Ltd | Heat treatment of semiconductor wafer |
| JP2515003B2 (ja) * | 1988-10-06 | 1996-07-10 | 高砂熱学工業株式会社 | クリ―ンチュ―ブ装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4423513Y1 (et) * | 1965-05-17 | 1969-10-03 | ||
| JPS5121299A (ja) * | 1974-08-16 | 1976-02-20 | Dan Kagaku Kk | Kukiseijosochi |
| JPS5382041A (en) * | 1976-12-27 | 1978-07-20 | Hitachi Ltd | Constant temperature control apparatus |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5243859Y2 (et) * | 1974-08-16 | 1977-10-05 |
-
1977
- 1977-08-04 JP JP9357077A patent/JPS5427770A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4423513Y1 (et) * | 1965-05-17 | 1969-10-03 | ||
| JPS5121299A (ja) * | 1974-08-16 | 1976-02-20 | Dan Kagaku Kk | Kukiseijosochi |
| JPS5382041A (en) * | 1976-12-27 | 1978-07-20 | Hitachi Ltd | Constant temperature control apparatus |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0265897U (et) * | 1988-11-07 | 1990-05-17 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5427770A (en) | 1979-03-02 |