JPS6162348U - - Google Patents
Info
- Publication number
- JPS6162348U JPS6162348U JP14568084U JP14568084U JPS6162348U JP S6162348 U JPS6162348 U JP S6162348U JP 14568084 U JP14568084 U JP 14568084U JP 14568084 U JP14568084 U JP 14568084U JP S6162348 U JPS6162348 U JP S6162348U
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- anode
- face
- magnetic tube
- flanged
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14568084U JPS6162348U (de) | 1984-09-28 | 1984-09-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14568084U JPS6162348U (de) | 1984-09-28 | 1984-09-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6162348U true JPS6162348U (de) | 1986-04-26 |
Family
ID=30703933
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14568084U Pending JPS6162348U (de) | 1984-09-28 | 1984-09-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6162348U (de) |
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1984
- 1984-09-28 JP JP14568084U patent/JPS6162348U/ja active Pending