JPS6162348U - - Google Patents
Info
- Publication number
- JPS6162348U JPS6162348U JP14568084U JP14568084U JPS6162348U JP S6162348 U JPS6162348 U JP S6162348U JP 14568084 U JP14568084 U JP 14568084U JP 14568084 U JP14568084 U JP 14568084U JP S6162348 U JPS6162348 U JP S6162348U
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- anode
- face
- magnetic tube
- flanged
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は本考案イオン銃の構成を示す縦断側面
図、第２図は同じくその構成を分解して示す縦断
側面図、、第３図は第１図Ａ−Ａ線による縦断背
面図である。
１：陰極、２：凹部、３：イオンビーム放出口
、４：フランジ付磁性管、５：磁性管、６：陽極
、７：凹部。
Figure 1 is a vertical side view showing the configuration of the ion gun of the present invention, Figure 2 is a vertical side view showing the same exploded configuration, and Figure 3 is a vertical rear view taken along line A-A in Figure 1. . 1: cathode, 2: recess, 3: ion beam emission port, 4: magnetic tube with flange, 5: magnetic tube, 6: anode, 7: recess.
補正 昭５９．１０．２６
実用新案登録請求の範囲を次のように補正する
。Amendment October 26, 1980 The scope of claims for utility model registration is amended as follows.
【実用新案登録請求の範囲】
陰極１と陽極６とを対向させ、かつ該陰極１と
陽極６との間に、フランジ付磁性管４，４を対向
させ、さらにその外側に磁性管５を設けて陰極１
と陽極６とを連結するとともに、前記フランジ付
磁性管４の内径を、陰極１に設けたイオンビーム
放出口３の直径より大きく形成し、陰極１の内面
を環状に露出させたことを特徴とするセルフクリ
ーニング型イオン銃。[Claims for Utility Model Registration] A cathode 1 and an anode 6 are made to face each other, and between the cathode 1 and anode 6, flanged magnetic tubes 4, 4 are made to face each other, and a magnetic tube 5 is provided on the outside thereof. Cathode 1
and an anode 6, and the inner diameter of the flanged magnetic tube 4 is formed larger than the diameter of the ion beam discharge port 3 provided in the cathode 1, so that the inner surface of the cathode 1 is exposed in an annular shape. A self-cleaning ion gun.
Claims (1)
陽極６との間に、フランジ付磁性管４，４を対向
させ、さらにその外側に磁性管５を設けて陰極１
と陽極６とを連結するとともに、前記フランジ付
磁性管４の内径を、陰極１に設けたイオンビーム
放出口３の直径より大きく形成し、陰極１の内面
を環状に露出させたことを特徴とするセルフクリ
ーニング型イオン銃。 The cathode 1 and the anode 7 are made to face each other, and between the cathode 1 and the anode 6, flanged magnetic tubes 4, 4 are made to face each other, and a magnetic tube 5 is provided outside the cathode 1.
and an anode 6, and the inner diameter of the flanged magnetic tube 4 is formed larger than the diameter of the ion beam discharge port 3 provided in the cathode 1, so that the inner surface of the cathode 1 is exposed in an annular shape. A self-cleaning ion gun.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14568084U JPS6162348U (en) | 1984-09-28 | 1984-09-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14568084U JPS6162348U (en) | 1984-09-28 | 1984-09-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6162348U true JPS6162348U (en) | 1986-04-26 |
Family
ID=30703933
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14568084U Pending JPS6162348U (en) | 1984-09-28 | 1984-09-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6162348U (en) |
-
1984
- 1984-09-28 JP JP14568084U patent/JPS6162348U/ja active Pending