JPS6161836U - - Google Patents
Info
- Publication number
- JPS6161836U JPS6161836U JP14647384U JP14647384U JPS6161836U JP S6161836 U JPS6161836 U JP S6161836U JP 14647384 U JP14647384 U JP 14647384U JP 14647384 U JP14647384 U JP 14647384U JP S6161836 U JPS6161836 U JP S6161836U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- fixing part
- wafer fixing
- lid
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14647384U JPS6161836U (de) | 1984-09-27 | 1984-09-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14647384U JPS6161836U (de) | 1984-09-27 | 1984-09-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6161836U true JPS6161836U (de) | 1986-04-25 |
Family
ID=30704707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14647384U Pending JPS6161836U (de) | 1984-09-27 | 1984-09-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6161836U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08255826A (ja) * | 1995-03-17 | 1996-10-01 | Shin Etsu Polymer Co Ltd | 半導体ウェーハ収納容器 |
-
1984
- 1984-09-27 JP JP14647384U patent/JPS6161836U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08255826A (ja) * | 1995-03-17 | 1996-10-01 | Shin Etsu Polymer Co Ltd | 半導体ウェーハ収納容器 |