JPS6161836U - - Google Patents
Info
- Publication number
- JPS6161836U JPS6161836U JP14647384U JP14647384U JPS6161836U JP S6161836 U JPS6161836 U JP S6161836U JP 14647384 U JP14647384 U JP 14647384U JP 14647384 U JP14647384 U JP 14647384U JP S6161836 U JPS6161836 U JP S6161836U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- fixing part
- wafer fixing
- lid
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Packaging Frangible Articles (AREA)
Description
第１図は本考案に係るウエーハ容器の実施例を
示す、第２図は本考案に係るウエーハ容器の他の
実施例を示す。ａは正面縦断面図、ｂは側面部分
縦断面図。
図中、１……ウエハ、２……容器本体、３……
ウエーハ保持用縦溝、４……ウエーハ保持用底溝
、５……容器蓋、６−１……溝付円筒状ウエーハ
固定部、６−２……平板状ウエーハ固定部、７…
…蛇腹状クツシヨン部。
FIG. 1 shows an embodiment of the wafer container according to the present invention, and FIG. 2 shows another embodiment of the wafer container according to the present invention. A is a front longitudinal sectional view, and b is a side partial longitudinal sectional view. In the figure, 1... wafer, 2... container body, 3...
Wafer holding vertical groove, 4... Wafer holding bottom groove, 5... Container lid, 6-1... Grooved cylindrical wafer fixing part, 6-2... Flat wafer fixing part, 7...
...Accordion-shaped cushion part.
Claims (1)
るウエーハ容器において、ウエーハ固定用部分の
周囲に蛇腹状のクツシヨン構造部を設けたウエー
ハ容器。 A wafer container in which a wafer fixing part is integrally molded with a lid, and a bellows-shaped cushion structure is provided around the wafer fixing part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14647384U JPS6161836U (en) | 1984-09-27 | 1984-09-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14647384U JPS6161836U (en) | 1984-09-27 | 1984-09-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6161836U true JPS6161836U (en) | 1986-04-25 |
Family
ID=30704707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14647384U Pending JPS6161836U (en) | 1984-09-27 | 1984-09-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6161836U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08255826A (en) * | 1995-03-17 | 1996-10-01 | Shin Etsu Polymer Co Ltd | Semiconductor wafer housing cassette |
-
1984
- 1984-09-27 JP JP14647384U patent/JPS6161836U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08255826A (en) * | 1995-03-17 | 1996-10-01 | Shin Etsu Polymer Co Ltd | Semiconductor wafer housing cassette |