JPS6161831U - - Google Patents
Info
- Publication number
- JPS6161831U JPS6161831U JP14647584U JP14647584U JPS6161831U JP S6161831 U JPS6161831 U JP S6161831U JP 14647584 U JP14647584 U JP 14647584U JP 14647584 U JP14647584 U JP 14647584U JP S6161831 U JPS6161831 U JP S6161831U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- support device
- view
- ceramic
- alumina
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14647584U JPS6161831U (US20090163788A1-20090625-C00002.png) | 1984-09-26 | 1984-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14647584U JPS6161831U (US20090163788A1-20090625-C00002.png) | 1984-09-26 | 1984-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6161831U true JPS6161831U (US20090163788A1-20090625-C00002.png) | 1986-04-25 |
Family
ID=30704709
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14647584U Pending JPS6161831U (US20090163788A1-20090625-C00002.png) | 1984-09-26 | 1984-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6161831U (US20090163788A1-20090625-C00002.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021157722A1 (ja) * | 2020-02-07 | 2021-08-12 | 京セラ株式会社 | ウェハーボート |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50140056A (US20090163788A1-20090625-C00002.png) * | 1974-04-25 | 1975-11-10 | ||
| JPS5162973A (ja) * | 1974-11-29 | 1976-05-31 | Fujitsu Ltd | Handotaiseizosochokizai |
| JPS53148283A (en) * | 1977-05-30 | 1978-12-23 | Toshiba Ceramics Co | Silicon wafer jig |
| JPS5543886A (en) * | 1978-09-22 | 1980-03-27 | Toshiba Ceramics Co Ltd | Furnace pipe for processing semiconductor |
| JPS5599718A (en) * | 1979-01-26 | 1980-07-30 | Hitachi Ltd | Heat treatment jig of wafer |
| JPS5674928A (en) * | 1979-11-22 | 1981-06-20 | Toshiba Corp | Preparation method of semiconductor device |
| JPS5936247B2 (ja) * | 1977-04-20 | 1984-09-03 | ティーディーケイ株式会社 | 電気的表示装置 |
| JPS5940365B2 (ja) * | 1980-09-30 | 1984-09-29 | 三菱瓦斯化学株式会社 | オレフインの製造方法 |
-
1984
- 1984-09-26 JP JP14647584U patent/JPS6161831U/ja active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50140056A (US20090163788A1-20090625-C00002.png) * | 1974-04-25 | 1975-11-10 | ||
| JPS5162973A (ja) * | 1974-11-29 | 1976-05-31 | Fujitsu Ltd | Handotaiseizosochokizai |
| JPS5936247B2 (ja) * | 1977-04-20 | 1984-09-03 | ティーディーケイ株式会社 | 電気的表示装置 |
| JPS53148283A (en) * | 1977-05-30 | 1978-12-23 | Toshiba Ceramics Co | Silicon wafer jig |
| JPS5543886A (en) * | 1978-09-22 | 1980-03-27 | Toshiba Ceramics Co Ltd | Furnace pipe for processing semiconductor |
| JPS5599718A (en) * | 1979-01-26 | 1980-07-30 | Hitachi Ltd | Heat treatment jig of wafer |
| JPS5674928A (en) * | 1979-11-22 | 1981-06-20 | Toshiba Corp | Preparation method of semiconductor device |
| JPS5940365B2 (ja) * | 1980-09-30 | 1984-09-29 | 三菱瓦斯化学株式会社 | オレフインの製造方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021157722A1 (ja) * | 2020-02-07 | 2021-08-12 | 京セラ株式会社 | ウェハーボート |
