JPS6161029U - - Google Patents

Info

Publication number
JPS6161029U
JPS6161029U JP14508184U JP14508184U JPS6161029U JP S6161029 U JPS6161029 U JP S6161029U JP 14508184 U JP14508184 U JP 14508184U JP 14508184 U JP14508184 U JP 14508184U JP S6161029 U JPS6161029 U JP S6161029U
Authority
JP
Japan
Prior art keywords
waveguide
discharge device
plasma discharge
microwave plasma
wide surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14508184U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14508184U priority Critical patent/JPS6161029U/ja
Publication of JPS6161029U publication Critical patent/JPS6161029U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP14508184U 1984-09-26 1984-09-26 Pending JPS6161029U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14508184U JPS6161029U (ko) 1984-09-26 1984-09-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14508184U JPS6161029U (ko) 1984-09-26 1984-09-26

Publications (1)

Publication Number Publication Date
JPS6161029U true JPS6161029U (ko) 1986-04-24

Family

ID=30703338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14508184U Pending JPS6161029U (ko) 1984-09-26 1984-09-26

Country Status (1)

Country Link
JP (1) JPS6161029U (ko)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0195459A (ja) * 1987-10-08 1989-04-13 Hitachi Ltd マイクロ波誘導プラズマ質量分析計
JPH07153420A (ja) * 1994-10-07 1995-06-16 Hitachi Ltd プラズマ質量分析計
JP2001510939A (ja) * 1997-07-16 2001-08-07 レール・リキード・ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード 表面波プラズマでガスを励起する装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0195459A (ja) * 1987-10-08 1989-04-13 Hitachi Ltd マイクロ波誘導プラズマ質量分析計
JPH07153420A (ja) * 1994-10-07 1995-06-16 Hitachi Ltd プラズマ質量分析計
JP2001510939A (ja) * 1997-07-16 2001-08-07 レール・リキード・ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード 表面波プラズマでガスを励起する装置

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