JPS6160114U - - Google Patents
Info
- Publication number
- JPS6160114U JPS6160114U JP14425284U JP14425284U JPS6160114U JP S6160114 U JPS6160114 U JP S6160114U JP 14425284 U JP14425284 U JP 14425284U JP 14425284 U JP14425284 U JP 14425284U JP S6160114 U JPS6160114 U JP S6160114U
- Authority
- JP
- Japan
- Prior art keywords
- displacement meter
- dimensional displacement
- image sensor
- attached
- semiconductor laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 239000000523 sample Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Description
第１図は本考案の一実施例に係る三次元変位計
の縦断面図、第２図は第１図の−線に沿う横
断面図、である。
１……本体ケース、２……検出端、３……プロ
ーブ、４……ガイド、５……スプリング、６……
磁石、７……ケース、８……半導体レーザ素子、
９……レーザビーム、１０……ミラー、１２……
リニアイメージセンサ、１３……エリアイメージ
センサ。
FIG. 1 is a longitudinal cross-sectional view of a three-dimensional displacement meter according to an embodiment of the present invention, and FIG. 2 is a cross-sectional view taken along the line - in FIG. 1. 1...Body case, 2...Detection end, 3...Probe, 4...Guide, 5...Spring, 6...
Magnet, 7... Case, 8... Semiconductor laser element,
9... Laser beam, 10... Mirror, 12...
Linear image sensor, 13...area image sensor.
Claims (1)
源として半導体レーザ素子を取付け、三次元変位
計本体ケースに、前記半導体レーザ素子からのレ
ーザビームを受光するエリアイメージセンサおよ
びリニアイメージセンサを取付けたことを特徴と
する三次元変位計。 (2) 前記プローブを磁石の磁力を利用して移動
可能に支持した実用新案登録請求の範囲第１項記
載の三次元変位計。[Claims for Utility Model Registration] (1) A semiconductor laser element is attached as a light emitting source to a three-dimensionally movable probe, and an area for receiving the laser beam from the semiconductor laser element is attached to the three-dimensional displacement meter body case. A three-dimensional displacement meter equipped with an image sensor and a linear image sensor. (2) The three-dimensional displacement meter according to claim 1, wherein the probe is movably supported using the magnetic force of a magnet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14425284U JPS6160114U (en) | 1984-09-26 | 1984-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14425284U JPS6160114U (en) | 1984-09-26 | 1984-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6160114U true JPS6160114U (en) | 1986-04-23 |
Family
ID=30702536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14425284U Pending JPS6160114U (en) | 1984-09-26 | 1984-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6160114U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02161301A (en) * | 1988-12-15 | 1990-06-21 | Toyama Pref Gov | Three-dimensional displacement amount measuring instrument |
-
1984
- 1984-09-26 JP JP14425284U patent/JPS6160114U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02161301A (en) * | 1988-12-15 | 1990-06-21 | Toyama Pref Gov | Three-dimensional displacement amount measuring instrument |