JPS6247904U - - Google Patents

Info

Publication number
JPS6247904U
JPS6247904U JP13866185U JP13866185U JPS6247904U JP S6247904 U JPS6247904 U JP S6247904U JP 13866185 U JP13866185 U JP 13866185U JP 13866185 U JP13866185 U JP 13866185U JP S6247904 U JPS6247904 U JP S6247904U
Authority
JP
Japan
Prior art keywords
light
position sensor
sensor device
emitting element
receiving element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13866185U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13866185U priority Critical patent/JPS6247904U/ja
Publication of JPS6247904U publication Critical patent/JPS6247904U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図および第2図は何れもこの考案の一実施
例を示すもので、第1図は位置センサ装置の一部
を断面にして示す斜視図、第2図は位置センサ装
置の動作説明図である。第3図〜第5図は何れも
従来の位置センサ装置を示すもので、第3図は位
置センサ装置の一部を断面にして示す斜視図、第
4図は変位センサユニツトの拡大断面図、第5図
は位置センサ装置の動作説明図である。 図において、1はロボツトフランジ、2はツー
ルフランジ、4はPSDボツクス、5はLEDボ
ツクス、6は受光素子、6aは受光面、7は発光
素子、8はピンホール、9は光拡大装置、Aは位
置センサ装置、Bは変位センサユニツトである。
なお、図中同一符号は同一または相当部分を示す
Figures 1 and 2 both show one embodiment of this invention, with Figure 1 being a perspective view showing a part of the position sensor device in cross section, and Figure 2 being an explanatory diagram of the operation of the position sensor device. It is. 3 to 5 all show conventional position sensor devices; FIG. 3 is a perspective view showing a part of the position sensor device in cross section; FIG. 4 is an enlarged sectional view of the displacement sensor unit; FIG. 5 is an explanatory diagram of the operation of the position sensor device. In the figure, 1 is a robot flange, 2 is a tool flange, 4 is a PSD box, 5 is an LED box, 6 is a light receiving element, 6a is a light receiving surface, 7 is a light emitting element, 8 is a pinhole, 9 is a light magnifying device, A is a position sensor device, and B is a displacement sensor unit.
Note that the same reference numerals in the figures indicate the same or corresponding parts.

Claims (1)

【実用新案登録請求の範囲】 (1) 受光素子を収容したPSDボツクスと、発
光素子を収容したLEDボツクスとの間に、発光
素子から出てピンホールによつて絞られた光スポ
ツトの変位量を光学的に拡大して受光素子の受光
面に照射する光拡大装置を設けたことを特徴とす
る位置センサ装置。 (2) 光拡大装置として断面凹径のシリンドリカ
ルレンズを用いたことを特徴とする実用新案登録
請求の範囲第1項記載の位置センサ装置。 (3) 受光素子を収容したPSDボツクスをロボ
ツトフランジに固定し、発光素子を収容したLE
Dボツクスをツールフランジにそれぞれ固定した
ことを特徴とする実用新案登録請求の範囲第1項
記載の位置センサ装置。 (4) 受光素子、発光素子および光拡大装置とに
よつて変位センサユニツトを構成したことを特徴
とする実用新案登録請求の範囲第1項記載の位置
センサ装置。
[Claims for Utility Model Registration] (1) Displacement of a light spot emitted from a light emitting element and narrowed by a pinhole between a PSD box containing a light receiving element and an LED box containing a light emitting element. 1. A position sensor device comprising a light magnifying device that optically magnifies and irradiates a light-receiving surface of a light-receiving element. (2) The position sensor device according to claim 1, wherein a cylindrical lens with a concave cross section is used as the light magnifying device. (3) The PSD box containing the light receiving element is fixed to the robot flange, and the LE containing the light emitting element is installed.
The position sensor device according to claim 1, wherein the D-boxes are each fixed to a tool flange. (4) The position sensor device according to claim 1, wherein a displacement sensor unit is constituted by a light-receiving element, a light-emitting element, and a light magnifying device.
JP13866185U 1985-09-12 1985-09-12 Pending JPS6247904U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13866185U JPS6247904U (en) 1985-09-12 1985-09-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13866185U JPS6247904U (en) 1985-09-12 1985-09-12

Publications (1)

Publication Number Publication Date
JPS6247904U true JPS6247904U (en) 1987-03-24

Family

ID=31043843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13866185U Pending JPS6247904U (en) 1985-09-12 1985-09-12

Country Status (1)

Country Link
JP (1) JPS6247904U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4636691B2 (en) * 1998-12-31 2011-02-23 キブロン・インコーポレイテッド・オイ Measuring device for measuring small forces and displacements

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4636691B2 (en) * 1998-12-31 2011-02-23 キブロン・インコーポレイテッド・オイ Measuring device for measuring small forces and displacements

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