JPS6159509A - Positioning control system - Google Patents

Abstract

PURPOSE:To attain positioning without causing vibration to a mobile body including a complicated vibration system by feeding back respectively a position compensating component to an output of a position control section and a speed compensating component to an output of a speed control section. CONSTITUTION:In the positioning of a mobile body XY stage 3, a value detected by a stage detector 4 and a motor detector 5 is fed back to a position control circuit 6. A speed command is outputted from a position control section 8 based on the value and an output of a position command circuit 7, and a position compensating component is outputted from a position compensating section 9. Then a signal subtracting a motor speed from the sub between the speed command and the position compensating component is inputted to a speed control section 10 and a basic current component of the motor is outputted. Then a speed compensating section 11 outputs the speed compensation component and a signal adding the speed compensation component to the basic current component is outputted from the circuit 6 as a motor current ia. The mobile body including a complicated vibration system is positioned without vibration by controlling the speed deviation and position deviation in this way.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a positioning control method for positioning a moving body having a vibration system without vibration.

[Background of the invention]

In recent years, there has been an increasing demand for high-speed control of moving objects that include complex vibration systems, such as robots and the XY sgarge of projection exposure equipment, but in this case, the influence of the vibration system on the characteristics has become an issue. ing. As a method for suppressing this unnecessary vibration, in a general position fi control system that includes speed control, as disclosed in Japanese Patent Application Laid-Open No. 55-34716,
A method is known in which the speed deviation t between the motor speed and the speed of the moving body is also fed back.

However, although this method has the effect of suppressing vibration because the speed difference can be made considerably smaller, there is still the problem that vibration cannot be completely eliminated.

[Purpose of the invention]

The purpose of the present invention is to provide a positioning device that can position a moving body including a complicated vibrating string without vibrating it.
The objective is to provide a method for controlling lJ.

[Overview of the invention]

The present invention focuses on the importance of reducing the torsional component of the imaging system and its differential value in order to completely suppress vibration, and uses position control to control the position compensation component determined by the difference between the motor position and the moving object position. In addition, a speed compensation component determined by the difference between the motor speed and the moving body speed is fed back to the output of the speed control section a.

[Embodiments of the invention]

An embodiment of the present invention will be described below with reference to the drawings.

The figure shows an embodiment of the present invention in which an XY stage is used as the moving body. Here, motor 1 is driven and tail 0
By rotating the 1b axis 2, the XY stage 3t-
It is designed for positioning.

This stage position θS and stage speed ω8 are detected by stage detection 64. Further, the motor position θM and the motor a position ωM are detected by the motor detector 5. These detected fcj+α are fed back to the positioning control circuit 6. This positioning control circuit 6 uses the position command θ9 given from the position command circuit 7 and the feedback field detection Itu to perform positioning control ik and determine the motor current ia input to the motor. .

Here, the inside of the positioning control circuit 6, which is a feature of the present invention, will be explained. First, in the position: 1tlJ control section 8, the speed command value ω is determined by the difference between the position command θS and the stage position θS.
Determine M. Also, motor position θM and stage position θ
The difference in S is the position compensation component Δ in the position compensation unit 9.
used to determine ω. Next, the speed control section 10
Then, the sum of the speed command value ωM and the position compensation component Δω minus the motor speed ωM is input, and the basic current component i2 of the motor is determined. Further, the speed compensator 11 determines a speed compensation component Δi from the difference between the motor speed ωM and the stage speed ωS.

As a result, the motor current ia, which is the output of the positioning control circuit 6, has the basic TV of the motor, the flow component, the speed compensation component Δ
It becomes the addition of l.

This control method is configured to feed back a position compensation component and a speed compensation component for suppressing vibration to a position control system that includes general speed control. Next, this principle will be explained.

The vibration occurs between the motor 1X drive shaft 2 and the XY stage 30 because the positional deviation θM-O3 between the motor position θM and the stage position O3 changes, resulting in a photographing torque.

Therefore, by reducing the change in the positional deviation θ - θS, the perturbation can be suppressed. However, if there is a progress deviation ωM-ωS between the motor speed ωM and the stage speed ωS, there is a limit to how much the positional deviation θM-θS can be reduced.

Therefore, the speed deviation ωM inside the continuous K till @ system
−ωS is fed back.

Therefore, according to this embodiment, the speed deviation ω milk 1−ω
Since S and position deviation OM-oII are each controlled, positioning can be performed almost without vibration.

Although this embodiment describes the case where the present invention is applied to an XY stage, it can also be applied to a moving body including a vibration system such as a robot.

〔Effect of the invention〕

According to the present invention, a moving body including a vibration system can be positioned with almost no vibration.

[Brief explanation of the drawing]

The figure is a block diagram of an embodiment of the present invention when it is adopted in a kXY stage and fc is used. 1...Motor, 2...Drivel1ltJI+13.3・
...XY stage, 4...stage detector, 5...
Motor detector, 6... Positioning control circuit, 7... Position command circuit, 8... Position fttlJ t (1 part, 9...
... position II'J, compensation section, 10... speed control section, 11
...Speed compensation section.

Claims (1)

[Claims] 1. A moving body including a vibration system, a motor that drives the moving body, a position command circuit that provides a target position for positioning the moving body, a speed and position of the motor, and a speed and position of the moving body. a position control unit that determines a speed command value using the target position value and the detected value of the moving body position; and a position control unit that determines the speed command value and the detected motor speed value. In the apparatus, the apparatus includes a speed control unit that calculates the input current of the motor using A positioning control method characterized in that a speed compensation component determined by a difference between the motor speed and the motor speed is fed back to the input of the motor.