JPS6159340U - - Google Patents

Info

Publication number
JPS6159340U
JPS6159340U JP14350984U JP14350984U JPS6159340U JP S6159340 U JPS6159340 U JP S6159340U JP 14350984 U JP14350984 U JP 14350984U JP 14350984 U JP14350984 U JP 14350984U JP S6159340 U JPS6159340 U JP S6159340U
Authority
JP
Japan
Prior art keywords
wafer
processing
processing tank
main body
side wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14350984U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14350984U priority Critical patent/JPS6159340U/ja
Publication of JPS6159340U publication Critical patent/JPS6159340U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP14350984U 1984-09-25 1984-09-25 Pending JPS6159340U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14350984U JPS6159340U (enrdf_load_stackoverflow) 1984-09-25 1984-09-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14350984U JPS6159340U (enrdf_load_stackoverflow) 1984-09-25 1984-09-25

Publications (1)

Publication Number Publication Date
JPS6159340U true JPS6159340U (enrdf_load_stackoverflow) 1986-04-21

Family

ID=30701801

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14350984U Pending JPS6159340U (enrdf_load_stackoverflow) 1984-09-25 1984-09-25

Country Status (1)

Country Link
JP (1) JPS6159340U (enrdf_load_stackoverflow)

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