JPS6158029U - - Google Patents
Info
- Publication number
- JPS6158029U JPS6158029U JP1984141855U JP14185584U JPS6158029U JP S6158029 U JPS6158029 U JP S6158029U JP 1984141855 U JP1984141855 U JP 1984141855U JP 14185584 U JP14185584 U JP 14185584U JP S6158029 U JPS6158029 U JP S6158029U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- movable guide
- attraction mechanism
- intersection
- horizontally movable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Machine Tool Units (AREA)
- Control Of Position Or Direction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984141855U JPS6158029U (https=) | 1984-09-18 | 1984-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984141855U JPS6158029U (https=) | 1984-09-18 | 1984-09-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6158029U true JPS6158029U (https=) | 1986-04-18 |
Family
ID=30700193
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984141855U Pending JPS6158029U (https=) | 1984-09-18 | 1984-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6158029U (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63306637A (ja) * | 1987-06-08 | 1988-12-14 | Nec Corp | 半導体素子平面出し機構 |
-
1984
- 1984-09-18 JP JP1984141855U patent/JPS6158029U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63306637A (ja) * | 1987-06-08 | 1988-12-14 | Nec Corp | 半導体素子平面出し機構 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR880014709A (ko) | 압전.전왜소자를 사용한 충격력에 의한 미소 이동장치 | |
| WO2008049663A1 (de) | Drehratensensor mit quadraturkompensationsstruktur | |
| JPS6158029U (https=) | ||
| JPS6170954U (https=) | ||
| JPS5925405U (ja) | パイプサポ−トの伸縮動作表示装置 | |
| JPS62168535U (https=) | ||
| JPS5840237A (ja) | 位置決めテ−ブル | |
| JPH0435928Y2 (https=) | ||
| JPH0546204Y2 (https=) | ||
| JPH06106029B2 (ja) | 超音波モータ | |
| JPH0715145Y2 (ja) | 変位拡大機構 | |
| JPS581947Y2 (ja) | 容量形無接点スイツチ | |
| JPS61148539U (https=) | ||
| JPS61214931A (ja) | 精密操作可能な長ストロ−クの移動テ−ブル | |
| JPH0746908B2 (ja) | 位置決め装置 | |
| JPS62117815U (https=) | ||
| JPS62130201U (https=) | ||
| DE2615382C3 (de) | Piezoelektrische Taste | |
| JPH0415829U (https=) | ||
| JPH02133938U (https=) | ||
| JPS6321863U (https=) | ||
| JPS58190079A (ja) | 微動機構 | |
| JPH0184438U (https=) | ||
| JPH0332378A (ja) | 微小移動装置 | |
| JPS5943197U (ja) | 図形・文字等入力装置用ｘｙレコ−ダ |