JPS6157804A - Aligning mechanism for optical axis and x-ray axis of fluorescent x-ray fine part thickness gauge - Google Patents

Abstract

PURPOSE:To align the X-ray axis to the optical axis accuratly by photographing a XY sample table by a TV camera and setting the cursor of a display body at the boundary line of an optical-axis aligning body, and then opening a shutter and computing and displaying secondary data from the optical-axis aligning body. CONSTITUTION:Primary X rays radiated by an X-ray source 1 reach the XY sampel table 11 through a collimator 4 whtn the shutter 2 is opened, and are photographed by th TV camera 5 through a mirror 3 in the closed state and projected on the display body 8. The sample talbe 11 is moved to align the boundary line of the otpical axis aligning body 10 to the cursor 9 of the display body 8. Then, the shutter 2 is released, and then the primary X rays reach the optical axis aligning body 10, so that generated secondary X rays are detected by a secondary X-ray detector 6. The detected primary data are converted by a CPU7 into secondary data, which are display on the display body 8, so that the difference between the X-ray axis of the collimator and the optical axis of the TV camera is read on the display body 8. Thus, the X-ray axis is aligned to the optical axis.

Description

[Detailed Description of the Invention] a. Field of Industrial Application The present invention relates to a fluorescent X-ray microscopic film thickness meter.
This is related to the matching mechanism of the optical axis and the X-ray axis, which examines the difference between the line axis and the optical axis of the television camera.2. ).

b. Conventional technology Using a jig made entirely of aluminum and brass, the jig is placed perpendicular to the moving direction of the sample stage, and the X-ray intensity is measured each time while moving the sample stage slightly, and the relationship between the measurement position and the X-ray intensity is calculated. The optical axis misalignment was investigated by drawing the diagrams on tilt paper.

CThe problem to be solved A. Axis alignment cannot be performed without a specific jig.

b) The sample stage is moved manually, which makes the operation complicated and the accuracy is not very good.

C. It requires time and effort to draw on graph paper, and visual confirmation is not possible.

d Problem? How to solve the problem What is the X-ray source that generates X-rays and the X-ray beam from this X-ray source? A collimator is provided on a movable shutter to guide the X-ray beam, a mirror is fixed to the shutter and is positioned on the optical axis of the collimator when the shutter moves, and X for placing all the samples that will be irradiated with the XM beam of Genki et al.
A Y sample stand, an optical axis aligning body provided on the surface of the XY sample stand and consisting of a material that generates secondary X-rays and a material that does not generate secondary X-rays, and a sample force of the XY sample stand. Secondary X-rays generated from scratch? a secondary X-ray detector disposed near the XY sample stage for detection; a television camera disposed near the shutter for observing the surface of the sample stage with the mirror fully closed; , a display body connected to the television camera, a cursor formed on the display body, and a secondary X from the optical axis aligning body while keeping the shutter open.
Primary data detected by the secondary X-ray detector? This configuration consists of a cp'o device for performing calculations to convert into secondary data.

e the shutter mentioned above? Hold it closed and take an X shot with a TV camera.
Y sample stand? After taking a picture and aligning the boundary line of the optical axis alignment object with the cursor on the display object, release the shutter. Open state, align the optical axis, and check the secondary data on the physical fitness record. What is the difference between the collimator's X-ray axis and the television camera's optical axis? Read on display.

f. The mechanism for aligning the X-ray axis and the optical axis of the fluorescent X-ray microscopic film thickness meter according to the present invention will be explained with reference to detailed drawings.

In FIG. 1, primary X-rays emitted from an X-ray source 1 pass through a collimator 4 and reach an XY sample stage 11 when the shutter 2 is open, but are blocked when the shutter 2 is closed. At this time, a mirror 3 is placed on the optical axis in place of the collimator 4, and the surface of the XY sample stage 11 is photographed by a television camera 5 through the mirror 3 and projected onto a display 8.

Here, move the XY sample stage 11 to align the boundary line of the optical axis alignment body 10 with the cursor 9 of the display body 80, and then press the shutter 2? Open. In this state, the primary X-rays from the X-ray sources pass through the collimator 4 and reach the beam combination body 10, and the generated secondary X-rays are detected by the secondary X-ray detector B. Here, the entire XY sample stage is moved under the control of the OPD device 7, and changes in the generated secondary X-rays are measured.

At this time, the relationship between the measurement position and the secondary X-ray intensity is as shown in FIG. By processing this secondary data 1ycput7, secondary data shown in FIG. 3 is obtained. In the third region, the apex of the peak≠3 corresponds to the boundary line of the optical axis alignment body. Once secondary data is obtained, OPT + device 7
Under this control, the XY sample stage 11 is returned to the position before it was fully moved, the shutter 2 is closed, and the image of the XY sample stage 11 is projected onto the display 8. At this time, the optical axis alignment body 10
The boundary line is aligned with cursor 9. On this screen,
In order to display the secondary data (Fig. 3) in an overlapping manner, [
What is the difference between the X-ray axis and the optical axis? Can be visually confirmed.

- An example is shown in FIG. In this example, since the light point of the secondary data is shifted to the left, it is clear (1) that the X axis of the collimator 4 is shifted to the right.

g Effect Does the present invention have the above-described structure and operation? Ready for Maru Shi, O
Since the XY sample stage is controlled and data processed by the PD device, a special jig is required. Quickly and accurately connect the X-ray axis and optical axis without the need for It is something that can be matched.

[Brief explanation of drawings]

FIG. 1 is a diagram showing the configuration of the apparatus. Figure 2 shows the relationship between the measurement position and the intensity of the secondary X-rays, and Figure 3 shows the primary data of the fcPT3 device shown in Figure 2. This is processed hole secondary data. Fourth
Is the figure secondary data and optical axis alignment body surface? This is an example of overlapping display on a display body. 1 is an X-ray source, 2 is a shirt, 6 is a mirror, 4 is a collimator, 5 is a television camera, 6 is a secondary X-ray detector, 7 is 0P
tll device, 8 a display, 9 a cursor, 10 an optical axis aligner, and 11 an XY sample stage. Applicant: Seiko Electronics Industry Law Company *n; Wx, x==7

Claims (1)

[Claims] An X-ray source for generating X-rays, a collimator provided on a movable shutter for guiding the X-ray beam from the X-ray source, and a collimator fixed to the shutter and moved by the shutter. a mirror provided to be positioned on the optical axis instead of the X-ray source, an XY sample stage for placing a sample to be irradiated with the X-ray beam from the X-ray source, and a mirror provided on the surface of the XY sample stage. an optical axis aligning body made of a material that generates secondary X-rays and a material that does not generate secondary X-rays; a secondary X-ray detector disposed at a position, a television camera provided near the shutter for observing the surface of the sample stage through the mirror, and a display connected to the television camera; , the cursor formed on the display body and the shutter are held open, and the secondary X-rays from the optical axis alignment body are detected by the secondary X-ray detector, and the primary data is converted into secondary data. and a CPU device for performing calculations, the shutter is held in a closed state, the XY sample stage is photographed by a television camera, and the boundary line of the optical axis alignment body and the cursor on the display body are aligned, and then the shutter is opened. the secondary data from the optical axis alignment body is displayed on a display body so that the difference between the X-ray axis of the collimator and the optical axis of the television camera can be read on the display body. A mechanism for aligning the optical axis and the X-ray axis.