JPS6078309A - Fluorescent x-ray film thickness gage - Google Patents

Abstract

PURPOSE:To enable exact viewing of the condition on a sample surface on the image screen of a television set by providing an X-ray source part having an X- ray source provided to a main unit and a shutter which is provided freely movably back and forth in the lower position of said X-ray source part. CONSTITUTION:An X-ray source part 10 has an X-ray source 12 provided to a main unit 11 and the X-ray source 12 is dipped in oil 13 and is held hermetically by a cover body 14. A shutter body 19 is provided freely movably back and forth in the direction of an arrow A to a pair of sliding bodies 17, 18 held freely slidably to a pair of guide bearings 15, 16 in the lower position of the part 10. The condition on the sample surface is made visible exactly on the image screen of a television set by the above-mentioned constitution.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a fluorescent X-ray film thickness meter, and more particularly to an improvement that enables measurement by confirming the position of a sample surface while viewing it on a television screen.

As shown in FIGS. 1A and 1B, in the conventional fluorescent X-ray film thickness meter, an X-ray beam 2 emitted from an X-ray source 1 is irradiated onto a sample surface 3. Fluorescence generated x
84 is guided to the detector 5 and detected, and the state of the sample surface 3 is observed by the observation means 6 disposed on the sample surface.

However, in such a conventional configuration, the X-ray source l
Since the OX-ray axis and the optical axis of the observation means 6 do not coincide, the state of the sample surface 3 irradiated with the X-ray beam becomes a mouth-shaped state as shown in FIG. Accurate measurements were extremely difficult. Furthermore, since a microscope was used as the observation means, constantly looking at the lens with the eye was very tiring and extremely inconvenient in operation.

The object of the present invention is to provide an extremely effective means for quickly eliminating the above-mentioned drawbacks. The structure is such that images are taken with a camera and displayed on a cathode ray tube.

Hereinafter, the fluorescent X-ray film thickness meter according to the present invention will be explained in detail with reference to the drawings.

1o in the drawings is an X-ray source section provided in the main body 11 and having an X'Ifs source [2;
The radiation source 12 is immersed in oil 13 and is kept in a sealed state by a lid 14.

A pair of guide bearings 15 are provided at a lower position of the X-ray source section 10.
, a pair of sliding bodies 17°18 slidably held by 16.
A shutter unit 19 is provided so as to be able to move back and forth in the direction of arrow A.

This shutter unit 19 is connected to one end of an operating lever 21 of a rotary solenoid rib, which is a rotary moving means provided in the main body 11, and is activated by the operation of a rotary solenoid 20. can move back and forth in the direction of arrow A. A pair of stoppers 22 are provided at the bottom of the main body 11 to limit the movement range of the shutter unit 19 in the left and right direction.

Furthermore, a calibration sample plate is provided on one side of the shutter unit 19, and a mirror plate 25 is provided adjacent to this calibration sample plate, and a mirror plate 25 is provided opposite to this mirror plate. A lamp 2G is built into the shutter assembly 19 and can illuminate the sample surface 27.

A mirror box (9) having a half mirror slope and a reflecting mirror 29 is integrally provided at a lower position of the mirror plate 5 in the shutter unit 19, and a TV camera (not shown) as an observation means is installed in this mirror box 30. It is attached and adjusted so that the aI axis and the optical axis for observation coincide.

A plurality of collimator holes 31, 32, 33, 34 each having a different diameter are provided at the lower end of the pIJ shutter unit 19.
, 35, the collimator body 36 is rotatably attached to the shaft support 3.
The collimator hole 3 is rotated in the direction of arrow B via a knob 38 formed integrally with the collimator body 36 to align with the position of the shear mark.
3 is a collimator hole through which the X-ray beam passes through.

Therefore, the moving distance of this collimator body 19 is the distance provided between the center point of the half mirror plate 28 and the center point of the collimator hole 33 of the P mark, and
When the mirror plate is positioned relative to the radiation source 12, that is, when the calibration sample plate 24 is irradiated with the X-ray beam, the shutter unit 19 is in the closed state, and the X-ray source I2
When the X-ray beam from the collimator body 3G passes through the collimator hole 33 marked P in the collimator body 3G and is irradiating the sample plate n, the detector 39
The detector 39 is provided with a first entrance opening 40 for entering the fluorescent X-rays from the calibration sample plate and a second entrance opening for entering the fluorescent X-rays from the sample surface 27. Apertures 41 are formed on each side, and a filter 42 made of cobalt, for example, is provided on the front side of the second entrance aperture 41.
is provided movably in the direction of arrow C.

In a direction perpendicular to the longitudinal direction of the mirror box 30, a television camera lens body 43 is attached to a mounting body 44 provided on the main body 11 via a sliding part 45, and a screw part 46 is loosened. TV camera lens body 4
3 can rotate in the direction of arrow C.

Moreover, the television camera 4 is attached to this television camera lens body 43.
7 is attached in a direction perpendicular to the longitudinal direction of the television camera lens body 43.

In the above configuration, when operating the fluorescent X-ray film thickness meter according to the present invention, first, if the shutter unit 19 is kept in the closed state shown in FIG. 2 and the X-ray source 12 is turned on, The ray beam 12α is irradiated onto the calibration sample plate, and the fluorescent X-rays from the calibration sample plate are incident on the detector 39 through the entire first entrance aperture 40 and measured. Conditions are adjusted to a constant value.

Next, when the rotary solenoid 20, which is the means for moving the shutter unit 19 all the way, is operated, it moves to the right in FIG. 2 and is held in a state connected to the stopper sleeve.

In this state, the X-ray beam 12α does not irradiate the calibration sample plate, but passes through the shutter unit 19, passes through the collimator hole 33 at the P mark position of the collimator body 36, becomes a beam of a constant diameter, and irradiates the sample surface 27. The fluorescent X-rays from the sample surface 27 enter the detector 39 through the second entrance aperture 41.

In this case, the collimator body 36 is rotated by rotating the knob 38 in the direction of arrow B), the collimator hole 31
is 0.1 mm, collimator hole 32 is 0.2 mm, collimator hole 33 is 0.3 mm, collimator hole 34 is 0°5 mm, collimator hole 35 is 1. Since it has a diameter of Q mm,
By aligning an arbitrary collimator hole with the P mark, the collimator hole can be aligned with an arbitrary diameter, and can be arbitrarily selected depending on the size of the measurement part of the sample to be measured.

Further, the situation of the sample surface n is imaged by the television camera 47 through the mirror box 11 and the television camera lens body 43', and can be displayed on a cathode ray tube (not shown). It has a configuration that allows minute movement adjustment in the Z three-dimensional direction, and is adjusted in advance so that the X-ray axis and the optical axis of the observation system coincide.

Since the present invention has the above configuration and operation,
Since the situation on the sample surface can be accurately viewed on a television screen, there is no need to look into the specimen surface with the naked eye, making it possible to perform all operations with extremely little fatigue.

In addition, since the X-ray axis and the optical axis of the television camera are adjusted to match, the mirror box is marked with cross-shaped scales, making it possible to determine the exact irradiation position of the X-ray. Dechiru.

[Brief explanation of the drawing]

Figure 1A is a bottom view of a conventional film thickness meter, and Figure 1B is a bottom view of a conventional film thickness meter.
A plan view of the sample showing the X-ray irradiation state by the film thickness meter in Figure A,
Fig. 2 is a front sectional view showing the fluorescent X-ray film thickness meter according to the present invention, Fig. 3 is a sectional view taken along line A-A in Fig. 2, and Fig. 4 is a top view of the collimator body in Fig. 3. , FIG. 5 is an enlarged view of the main part. 10 is an X-source part, 11 is a main body, 12 is an X-ray source, 13 is oil, 14 is a lid body, 191"l: shutter integrated, addition is a rotary solenoid, 24 is a calibration sample plate, 25 is a mirror plate, 27 is a sample surface, path is a half mirror plate, 4 is a reflection mirror, 30 is a mirror box, 31 to 35 are collimator holes,
36 is a collimator body, 38 is a knob part, 39 is a detector,
40 is a first entrance opening, 41 is a second entrance opening, 42 is a filter, 43 is a TV camera 2 lens body, 44 is a mounting body, 45Fi is a sliding part, and 47 is a TV camera. Applicant: Seiko Electronic Industries Co., Ltd. Agent Patent Attorney Mogami

Claims (1)

[Claims] An X-ray source section provided in a main body and having an X-ray source; a shutter provided at a lower position of the X-ray source section so as to be movable back and forth in a direction across the X-ray beam from the X-ray source; a reciprocating means for reciprocating;
The shutter includes a collimator body provided at the lower end of the shutter, a mirror box provided at the lower end of the shutter, a television camera body provided in the main body and movable in at least XY directions, and a television screen means, projecting the sample surface of the television camera on a television screen means in a closed state that does not allow the X-ray beam to pass therethrough;
Geiko's X-ray thickness meter is configured so that the irradiation position of the X-ray beam on the sample surface can be adjusted.