JPS6157520U - - Google Patents

Info

Publication number
JPS6157520U
JPS6157520U JP14270184U JP14270184U JPS6157520U JP S6157520 U JPS6157520 U JP S6157520U JP 14270184 U JP14270184 U JP 14270184U JP 14270184 U JP14270184 U JP 14270184U JP S6157520 U JPS6157520 U JP S6157520U
Authority
JP
Japan
Prior art keywords
semiconductor wafers
electric furnace
outer tube
gas
furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14270184U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14270184U priority Critical patent/JPS6157520U/ja
Publication of JPS6157520U publication Critical patent/JPS6157520U/ja
Pending legal-status Critical Current

Links

JP14270184U 1984-09-20 1984-09-20 Pending JPS6157520U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14270184U JPS6157520U (enrdf_load_stackoverflow) 1984-09-20 1984-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14270184U JPS6157520U (enrdf_load_stackoverflow) 1984-09-20 1984-09-20

Publications (1)

Publication Number Publication Date
JPS6157520U true JPS6157520U (enrdf_load_stackoverflow) 1986-04-17

Family

ID=30701014

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14270184U Pending JPS6157520U (enrdf_load_stackoverflow) 1984-09-20 1984-09-20

Country Status (1)

Country Link
JP (1) JPS6157520U (enrdf_load_stackoverflow)

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