JPS6157520U - - Google Patents
Info
- Publication number
- JPS6157520U JPS6157520U JP14270184U JP14270184U JPS6157520U JP S6157520 U JPS6157520 U JP S6157520U JP 14270184 U JP14270184 U JP 14270184U JP 14270184 U JP14270184 U JP 14270184U JP S6157520 U JPS6157520 U JP S6157520U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafers
- electric furnace
- outer tube
- gas
- furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 13
- 235000012431 wafers Nutrition 0.000 claims description 13
- 239000007789 gas Substances 0.000 claims 10
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14270184U JPS6157520U (cs) | 1984-09-20 | 1984-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14270184U JPS6157520U (cs) | 1984-09-20 | 1984-09-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6157520U true JPS6157520U (cs) | 1986-04-17 |
Family
ID=30701014
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14270184U Pending JPS6157520U (cs) | 1984-09-20 | 1984-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6157520U (cs) |
-
1984
- 1984-09-20 JP JP14270184U patent/JPS6157520U/ja active Pending
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