JPS6156942A - 半導体製造用水素化物ガスの検知装置 - Google Patents

半導体製造用水素化物ガスの検知装置

Info

Publication number
JPS6156942A
JPS6156942A JP17895184A JP17895184A JPS6156942A JP S6156942 A JPS6156942 A JP S6156942A JP 17895184 A JP17895184 A JP 17895184A JP 17895184 A JP17895184 A JP 17895184A JP S6156942 A JPS6156942 A JP S6156942A
Authority
JP
Japan
Prior art keywords
gas
chemical species
column
semiconductors
ultraviolet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17895184A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0154659B2 (enExample
Inventor
Hiroaki Tao
博明 田尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP17895184A priority Critical patent/JPS6156942A/ja
Publication of JPS6156942A publication Critical patent/JPS6156942A/ja
Publication of JPH0154659B2 publication Critical patent/JPH0154659B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/62—Detectors specially adapted therefor
    • G01N30/74—Optical detectors

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP17895184A 1984-08-28 1984-08-28 半導体製造用水素化物ガスの検知装置 Granted JPS6156942A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17895184A JPS6156942A (ja) 1984-08-28 1984-08-28 半導体製造用水素化物ガスの検知装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17895184A JPS6156942A (ja) 1984-08-28 1984-08-28 半導体製造用水素化物ガスの検知装置

Publications (2)

Publication Number Publication Date
JPS6156942A true JPS6156942A (ja) 1986-03-22
JPH0154659B2 JPH0154659B2 (enExample) 1989-11-20

Family

ID=16057505

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17895184A Granted JPS6156942A (ja) 1984-08-28 1984-08-28 半導体製造用水素化物ガスの検知装置

Country Status (1)

Country Link
JP (1) JPS6156942A (enExample)

Also Published As

Publication number Publication date
JPH0154659B2 (enExample) 1989-11-20

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term