JPS6156632U - - Google Patents
Info
- Publication number
- JPS6156632U JPS6156632U JP14132184U JP14132184U JPS6156632U JP S6156632 U JPS6156632 U JP S6156632U JP 14132184 U JP14132184 U JP 14132184U JP 14132184 U JP14132184 U JP 14132184U JP S6156632 U JPS6156632 U JP S6156632U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- conveyor belt
- solvent
- heating
- cleaning tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 23
- 238000010438 heat treatment Methods 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 4
- 239000002904 solvent Substances 0.000 claims 7
- 238000005507 spraying Methods 0.000 claims 2
- 238000001816 cooling Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Landscapes
- Manufacturing Of Printed Wiring (AREA)
- Liquid Crystal (AREA)
- Cleaning By Liquid Or Steam (AREA)
Description
第１図は、この考案に係る加熱処理装置の１実
施例の概略構成を示す断面図、第２図は、この考
案の加熱処理装置に使用される洗浄手段の別の実
施例を示す、断面図である。
１…被処理基板、１１…搬送ベルト、１２…赤
外線照射ランプ、１３…反射板、１４…加熱炉、
１５…ホツトプレート、１６…洗浄手段、２０…
フリーロール、２１…洗浄溶液、２２…洗浄槽、
２３…超音波発生器、２４…加温器、２５…冷却
器、２６…洗浄ブラシ、２７…噴射手段、２８…
噴射ノズル。
FIG. 1 is a sectional view showing a schematic configuration of one embodiment of a heat treatment apparatus according to this invention, and FIG. 2 is a sectional view showing another embodiment of a cleaning means used in the heat treatment apparatus of this invention. It is a diagram. DESCRIPTION OF SYMBOLS 1... Substrate to be processed, 11... Conveyor belt, 12... Infrared irradiation lamp, 13... Reflector plate, 14... Heating furnace,
15...Hot plate, 16...Cleaning means, 20...
Free roll, 21...Cleaning solution, 22...Cleaning tank,
23... Ultrasonic generator, 24... Warmer, 25... Cooler, 26... Cleaning brush, 27... Injection means, 28...
injection nozzle.
Claims (1)
と、被処理基板を加熱処理すべく搬送ベルトの搬
送経路に沿つて配設された加熱手段と、加熱手段
を内蔵し、その内部に搬送ベルトの搬送経路が形
成された加熱炉と、走行する搬送ベルトを加熱炉
外で連続的に洗浄する洗浄手段とから成る加熱処
理装置。 (2) 洗浄手段を、搬送ベルトが部分的に浸漬さ
れる洗浄溶剤を貯溜した洗浄槽と、該洗浄槽底面
に配設された超音波発生手段と、当該洗浄槽の洗
浄溶剤中に付設された溶剤加熱手段とで構成した
実用新案登録請求の範囲第１項記載の、加熱処理
装置。 (3) 洗浄手段は、搬送ベルトが部分的に浸漬さ
れる洗浄溶剤を貯溜した洗浄槽と、洗浄溶剤中で
搬送ベルト表面に回転摺接すべく洗浄槽に取付け
られた洗浄ブラシと、洗浄槽の洗浄溶剤を搬送ベ
ルト表示に吹付けるための溶剤噴射手段とで構成
した、実用新案登録請求の範囲第１項記載の、加
熱処理装置。 (4) 洗浄手段を構成する洗浄槽の上部内面に、
蒸気冷却手段を付設した、実用新案登録請求の範
囲第２項記載の、加熱処理装置。[Scope of Claim for Utility Model Registration] (1) A conveyor belt on which a substrate to be processed is placed and conveyed, a heating means disposed along the conveyance path of the conveyor belt to heat-process the substrate to be processed, and a heating device for heating the substrate. A heating processing device comprising a heating furnace having a built-in means and a conveyance path for a conveyor belt formed therein, and a cleaning means for continuously cleaning the traveling conveyor belt outside the heating furnace. (2) The cleaning means is comprised of a cleaning tank storing a cleaning solvent in which the conveyor belt is partially immersed, an ultrasonic generating means disposed at the bottom of the cleaning tank, and an ultrasonic generator installed in the cleaning solvent of the cleaning tank. 2. A heat treatment apparatus according to claim 1, which comprises a solvent heating means. (3) The cleaning means includes a cleaning tank storing a cleaning solvent in which the conveyor belt is partially immersed, a cleaning brush attached to the cleaning tank to rotate and slide on the surface of the conveyor belt in the cleaning solvent, and a cleaning tank. and a solvent spraying means for spraying a cleaning solvent onto the conveyor belt display, as claimed in claim 1. (4) On the inner surface of the upper part of the cleaning tank that constitutes the cleaning means,
A heat treatment apparatus according to claim 2 of the utility model registration claim, which is provided with steam cooling means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14132184U JPS6156632U (en) | 1984-09-17 | 1984-09-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14132184U JPS6156632U (en) | 1984-09-17 | 1984-09-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6156632U true JPS6156632U (en) | 1986-04-16 |
Family
ID=30699665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14132184U Pending JPS6156632U (en) | 1984-09-17 | 1984-09-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6156632U (en) |
-
1984
- 1984-09-17 JP JP14132184U patent/JPS6156632U/ja active Pending
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