JPS6156428A - Measuring device for temperature and diameter of single crystal - Google Patents

Abstract

PURPOSE:To enable the temperature of the solid-liquid interface and the like of a single crystal and the diameter of the single crystal to be measured at the same time with high accuracy and high resolving power, by using an image sensor. CONSTITUTION:A single crystal pull-up device 1 heats Si or the like into liquid 2 and pulls up a bar of single crystal 3. The output of the image sensor 6 scanning a field of vision Z in the diameter direction of the single crystal 3 including the solid-liquid interface 4 of the single crystal 3 and the liquid 2 at both ends is processed by an operational means 7, and temperature patterns corresponding to positions of the field of vision Z can be obtained. The temperature of the solid-liquid interface 4 can be measured on the basis of peak temperatures Tp1 and Tp2, the temperature of the single crystal 3 on the basis of the temperature T1 between the peaks, and the temperature of the liquid on the basis of temperatures T2 and T3 outside the peaks. The diameter P of the single crystal 3 can be measured on the basis of the element addresses of the image sensor 6 which correspond to the positions of the peaks P1 and P2 and the distance from the sensor 6 to the single crystal 6.

Description

DETAILED DESCRIPTION OF THE INVENTION (1) Field of the Invention This invention relates to a device for measuring the temperature and diameter of a single crystal.

(2) Prior Art 81 The single crystal of Kasa is manufactured by pulling a rod-shaped single crystal from a liquid in which Sl is heated and melted.

In this case, accurately knowing the solid-liquid interface temperature and the diameter of the single crystal, which changes from the liquid to the solid single crystal, are important factors in manufacturing.

However, in so-called contact-type thermal lightning pairs, the temperature is directly measured by rotation, and the temperature of the heating means on the outer periphery of the pulling device is measured, and the solid-liquid interface temperature is indirectly estimated. Also, it was difficult to measure the single crystal diameter during pulling.

(3) Purpose of the Invention The purpose of the present invention is to provide a device that non-contactly measures the temperature and diameter of a single crystal using an image sensor.

(4) Summary of the Invention This invention provides L1! The diametrical direction of the crystal is scanned by an image sensor, and the interfacial temperature and the diameter of the single crystal are measured from the output by the arithmetic processing means.

(5) Embodiment of the Invention FIG. 1 does not show an embodiment of the invention, but is a clear view of the configuration M2. In this figure, only the part visible from the viewing window of the single crystal pulling apparatus is shown.

In the figure, a single crystal pulling apparatus 1 heats Si or the like using an appropriate heating means to turn it into a liquid 2, and pulls up a rod-shaped single crystal 3. Solid-liquid interface 4 is the boundary between this single crystal 3 and liquid 2
is higher in temperature than liquid 2, single-crystalline/2J3. S is a measuring device, and 5 is a field of view Z in the diametrical direction of the single crystal 3, which includes the solid-liquid interface 4 at both ends, which is the boundary between the single crystal 3 and the liquid 2, and is repeatedly scanned by the image sensor 6. The optical system 7 is an arithmetic processing means that performs arithmetic processing on the output of the image sensor 6.

Next, the operation will be explained with reference to FIG.

The output of the image sensor 6 that manipulates the field of view Z is processed by the arithmetic processing means 7, and becomes a temperature signal corresponding to the measurement region (zone) and the position of the field of view Z, as shown in FIG. In other words, a temperature pattern corresponding to each element of the image sensor 6 is obtained. The temperature of the solid-liquid interface 〒 4 is higher than that of the pond, and two peaks P1 and P2 are formed, and from these peak temperatures Ti1l and TD2, the solid-liquid interface 4
) can measure 0 degrees. Further, the temperature of the single crystal 3 is calculated from the temperature T1 between the peaks, and the temperature of the liquid is calculated by 1q from the aqua degrees T2 and T3 outside the peaks. Furthermore, since the positions of peaks PI and P2 can be determined from the element address of the image sensor 6, the distance between both ends of the solid-liquid interface 40 is determined from the difference between the element addresses and the distance between the image sensor 6 and the m-crystal 3, that is, The dimensions and diameter of the single crystal 3 can be measured. The diameter can be determined by dividing the measurement zone into, for example, one zone and two zones, and determining the difference between the addresses of the peak values in each zone.

Note that this series of operations is performed by the arithmetic processing means 7.

(6) Effects of the Invention As described above, the present invention makes it possible to simultaneously measure the temperature of the solid-liquid interface of a single crystal and the diameter of the single crystal with high precision and high resolution by using an image sensor or the like. , the practical effect is extremely large.
!

[Brief explanation of the drawing]

FIG. 1 is a configuration explanatory diagram showing one embodiment of the present invention, and FIG.
The figure is a waveform diagram for explaining the operation. DESCRIPTION OF SYMBOLS 1...Single crystal pulling device, 2...Liquid, 3...Single crystal, 4...Solid-liquid interface, 5...Optical system, 6...Image sensor, 7...Calculation processing means

Claims (1)

[Claims] 1. A rod-shaped single crystal that is pulled up from a liquid, an image sensor that scans the diameter direction of the single crystal that includes a solid-liquid interface at both ends that is the boundary between the single crystal and the liquid, and an image sensor that scans the solid-liquid interface from the output of this image sensor. 1. An apparatus for measuring the temperature and diameter of a single crystal, comprising: arithmetic processing means for measuring the temperature and diameter of the single crystal.