JPS61230053A - Non-contact peel inspecting device - Google Patents

Non-contact peel inspecting device

Info

Publication number
JPS61230053A
JPS61230053A JP7001485A JP7001485A JPS61230053A JP S61230053 A JPS61230053 A JP S61230053A JP 7001485 A JP7001485 A JP 7001485A JP 7001485 A JP7001485 A JP 7001485A JP S61230053 A JPS61230053 A JP S61230053A
Authority
JP
Japan
Prior art keywords
heated
conductive material
conductive
state
induction heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7001485A
Other languages
Japanese (ja)
Inventor
Koji Ishihara
石原 耕司
Koji Yamada
浩司 山田
Yuji Matoba
的場 有治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Engineering Corp
Original Assignee
NKK Corp
Nippon Kokan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NKK Corp, Nippon Kokan Ltd filed Critical NKK Corp
Priority to JP7001485A priority Critical patent/JPS61230053A/en
Publication of JPS61230053A publication Critical patent/JPS61230053A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00Investigating or analyzing materials by the use of thermal means
    • G01N25/72Investigating presence of flaws

Abstract

PURPOSE:To inspect properly the peel state by giving a magnetic field to a conductive subject to be heated under a non-conductive material through a guide heating means and detecting the heat diffusion state at this time by an infrared ray camera. CONSTITUTION:The overall tester is placed on a self-traveling carriage, and an induction coil 5 is shifted in the state where it is separated from the surface of the non-conductive material by the prescribed distance. A guide heating device 4 supplies an AC exciting signal to the induction coil 5 with the aid of a signal from a control part 7, and forms an AC magnetic field in the inductive material to be heated 1. An excessive current flows in the subject to be heated 1, and its surface is heated to warm the non-conductive material 2. When it develops a peel part 2a, the heat diffusion state in this part is different from that of the non-peel part. The infrared ray camera 6 measures the temperature of the subject to be heated 1 and transmits the temperature to a signal processing part 9. A two-dimensional distribution picture is formed in the processing part 9, displayed on a CRT display 10 and recorded in a video recorder 11.

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明は、銅などの導電性金属表面に重ね合わされた非
導電体の剥離状態を検査する非接触剥離検査装置に関す
る。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a non-contact peeling inspection device for inspecting the peeling state of a non-conductive material superimposed on the surface of a conductive metal such as copper.

〔発明の技術的背景およびその問題点〕従来、銅などの
導電性金属の表面にセラミックなどの非導電体を重ね合
わせた構造の複合材において、上記非導電体の剥離状態
を検査する手段としては、人間が複合材の表面をハンマ
などで打撃し、そのときの打撃音によって剥離状態を判
断する手段がある。しかるに、この検査手段は、検査員
の経験と肋が頼りとなり、主観に左右されて正確な判断
を得ることは難しい。また、環境や安全性の面から人間
が近付けないところでは検査できない不具合がある。
[Technical background of the invention and its problems] Conventionally, in a composite material having a structure in which a non-conductive material such as ceramic is superimposed on the surface of a conductive metal such as copper, it has been used as a means to inspect the peeling state of the non-conductive material. There is a method in which a person hits the surface of a composite material with a hammer or the like, and the state of peeling is determined based on the sound of the impact. However, this testing method relies on the experience and preferences of the inspector, and is subject to subjectivity, making it difficult to obtain accurate judgments. Additionally, due to environmental and safety concerns, there are some defects that cannot be inspected in areas that are inaccessible to humans.

一方、従来のこの種の検査手段として、探触子を用いて
超音波探傷により非導電体の剥離状態を検査する手段が
ある。しかるに、この検査手段は、金属表面と非導電体
との間に水等の音響媒体が存在していたり、探触子の押
圧により非導電体の剥離状態がなくなったりする場合に
は誤差が生じ易い欠点を有している。また、測定時に探
触子を非導電体に接触させなければならず、はがれの部
分が拡大したり、非導電体が損傷するなどの問題がある
On the other hand, as a conventional inspection means of this type, there is a means of inspecting the peeling state of a non-conductor by ultrasonic flaw detection using a probe. However, this testing method may cause errors if there is an acoustic medium such as water between the metal surface and the non-conductor, or if the non-conductor is not peeled off due to the pressure of the probe. It has some disadvantages. Furthermore, the probe must be brought into contact with a non-conductor during measurement, which causes problems such as the peeled portion becoming larger and the non-conductor being damaged.

さらに、非導電体の剥離によって変化する熱拡散状態を
赤外線カメラで検知し、これにより剥離状態を検査する
手段がある。しかるに、この手段においては、複合材が
長期にわたって一定温度状態に置かれている場合には温
度差を生じ得ないため、精度よく検査することができな
かった。
Furthermore, there is a means for detecting the thermal diffusion state that changes due to the peeling of the non-conductor using an infrared camera, and thereby inspecting the peeling state. However, with this method, if the composite material is kept at a constant temperature for a long period of time, no temperature difference can occur, and therefore it has not been possible to accurately inspect the composite material.

〔発明の目的〕[Purpose of the invention]

本発明はこのような事情に暴いてなされたものであり、
その目的とするところは、導電性被熱物表面上の非導電
体の剥離状態を非接触で効率よく正確に計測し得る非接
触剥離検査装置を提供することにある。
The present invention has been made in light of these circumstances,
The purpose is to provide a non-contact peeling inspection device that can efficiently and accurately measure the peeling state of a non-conductive material on the surface of a conductive heated object without contact.

〔発明の概要) 本発明は、誘導加熱手段により非導電体下の導電性被熱
物に磁界を与えて剥離状態によって興なる熱拡散状態を
作り出し、この熱拡散状態を赤外線カメラで検知して温
度分布両峰として表示することにより、剥離状態を検査
する非接触剥離検査装置である。
[Summary of the Invention] The present invention applies a magnetic field to a conductive heated object under a non-conductive material using induction heating means to create a thermal diffusion state caused by a peeling state, and detects this thermal diffusion state with an infrared camera. This is a non-contact peeling inspection device that inspects the peeling state by displaying both peaks of the temperature distribution.

〔発明の実施例〕[Embodiments of the invention]

第1図は本発明の一実施例の構成を示す系統図である。 FIG. 1 is a system diagram showing the configuration of an embodiment of the present invention.

同図において1は鋼管等の導電性被熱物であり、この導
電性被熱物1の表面にはセラミックなどの非導電体2が
所定の厚みで重ね合わされている。なお、上記導電性被
熱物1は誘導加熱によって熱損失を生じるものであれば
その材質は問わないものであり、また、管外表面および
管内表面のいずれか一方または両方に非導電体2が重ね
合わされている場合もある。2aは非導電体2の剥離部
分を示している。3は誘導加熱手段を示し、これは交流
励磁信号を出力する誘導加熱装置l!f4と、この加熱
装置4からの交流励磁信号を受けて導電性被熱物1内に
交流磁界を与える誘導コイル5とによって構成されてい
る。そして、この誘導加熱手段3の後部には、一定間隔
りを有して赤外線カメラ6が配置されている。実際上、
これらの構成要素4.5.6は、図示されていないが枠
体または筐体等によって所要の位置関係をもって支持さ
れており、かつ制御部7からの制御信号を受けて動作す
るものである。この制御部7は、自走式台車等に本装置
のほとんど全部を乗せて図中矢印六方向に不定速度で走
行するものであるとき、速度計8からの速度信号を受け
て前記誘導加熱手段3、赤外線カメラ6を制御する。具
体的には、速度計8にて検出された台車速度に比例して
誘導加熱手段3による加熱温度を高めるような制御信号
を諺導加熱装ff4に与え、また台車速度に比例して赤
外線カメラ6の走査速度を上げるような制御を行なう。
In the figure, reference numeral 1 denotes an electrically conductive heated object such as a steel pipe, and a non-conductive material 2 such as ceramic is superimposed on the surface of this electrically conductive heated object 1 to a predetermined thickness. Note that the conductive heated object 1 may be made of any material as long as it causes heat loss through induction heating, and the non-conductive material 2 may be formed on either or both of the outer surface and the inner surface of the tube. Sometimes they are superimposed. 2a indicates a peeled portion of the non-conductor 2. 3 indicates an induction heating means, which is an induction heating device l! that outputs an AC excitation signal. f4, and an induction coil 5 which receives an AC excitation signal from the heating device 4 and applies an AC magnetic field into the conductive heated object 1. Infrared cameras 6 are arranged at regular intervals at the rear of the induction heating means 3. In practice,
Although not shown, these components 4, 5, 6 are supported by a frame or a housing in a desired positional relationship, and operate in response to control signals from the control section 7. This control section 7 receives a speed signal from a speedometer 8 and controls the induction heating means when almost all of the present device is mounted on a self-propelled trolley or the like and runs at an indefinite speed in the six directions of arrows in the figure. 3. Control the infrared camera 6. Specifically, a control signal is given to the induction heating device ff4 to increase the heating temperature by the induction heating means 3 in proportion to the speed of the bogie detected by the speedometer 8, and a control signal is given to the infrared camera in proportion to the speed of the bogie. Control is performed to increase the scanning speed of step 6.

したがって、予め台車速度が定まっている場合、制御部
7は既に知られている台車速度に基いて制御すればよく
、この場合には速度計8は必ずしも必要でない。9は信
号処理部であって、赤外線カメラ6からの出力データお
よび制御部7から出力される走査タイミングとから1枚
の二次元温度分布画像を得、CRTディスプレイ10お
よびビデオレコーダ11に出力するものとなっている。
Therefore, when the truck speed is determined in advance, the control section 7 may perform control based on the already known truck speed, and in this case, the speedometer 8 is not necessarily required. 9 is a signal processing unit that obtains one two-dimensional temperature distribution image from the output data from the infrared camera 6 and the scanning timing output from the control unit 7, and outputs it to the CRT display 10 and video recorder 11. It becomes.

すなわち、赤外線カメラ6の出力データを2値化または
階r14差をもったディジタルデータに変換して図示し
ない画像メモリに記憶し、制御部7からの走査タイミン
グに応じて読出してアナログ化し、輝度変調信号やカラ
ー表示信号に変換した後、CRTディスプレイ10に出
力して表示すると共に、ビデオレコーダ11に出力して
記録する。
That is, the output data of the infrared camera 6 is converted into binarized data or digital data with a difference in level r14, stored in an image memory (not shown), read out in accordance with the scanning timing from the control unit 7, converted into analog data, and subjected to brightness modulation. After converting it into a signal or a color display signal, it is output to a CRT display 10 for display, and is also output to a video recorder 11 for recording.

次に、このように構成された本装置の作用効果について
説明する。CRTディスプレイ10およびビデオレコー
ダ11を含みあるいはこれらを除いて装置全体を自走式
台車に載置し、かつ非導電体2表面から誘導コイル5を
所定距離だけ隔てた状態で第1図中矢印へ方向に移動さ
せる。
Next, the effects of this device configured as described above will be explained. The entire device, including or excluding the CRT display 10 and video recorder 11, is placed on a self-propelled trolley, and with the induction coil 5 separated by a predetermined distance from the surface of the non-conductor 2, it is moved in the direction indicated by the arrow in FIG. move in the direction.

この移動中において、制御部7は赤外線カメラ6により
測定された非導電体2を含んだ導電性被熱物1の温度信
号を取込む。このとき、制御部7は速度計8からの速度
信号または予め知りうる速度信号に基いて誘導加熱手段
3および赤外線カメラ6を制御する。すなわち、誘導加
熱装R4は制御部7から制御信号を受けて誘導コイル5
に交流励磁信号を供給し、誘導性被熱物1内に交流磁界
を形成せしめる。この結果、誘導性被熱物1内は交流磁
界によって過電流が流れ、過電流損およびヒステリシス
損が発生し、被熱物1の表面は発熱される。この被熱物
1の表面が発熱されると、その熱は拡散して非導電体2
を暖める。ここで、第1図に示すように非導電体2に剥
離部分2aが生じていると、この!!11部分2aにお
ける熱拡散状態は、非剥離部分の熱拡散状態と異なって
くる。
During this movement, the control unit 7 receives a temperature signal of the conductive object 1 including the non-conductor 2 measured by the infrared camera 6. At this time, the control unit 7 controls the induction heating means 3 and the infrared camera 6 based on the speed signal from the speedometer 8 or a speed signal that can be known in advance. That is, the induction heating device R4 receives a control signal from the control unit 7 and operates the induction coil 5.
An alternating current excitation signal is supplied to the inductive heated object 1 to form an alternating magnetic field. As a result, an overcurrent flows in the inductive heated object 1 due to the alternating current magnetic field, an overcurrent loss and a hysteresis loss occur, and the surface of the heated object 1 generates heat. When the surface of the heated object 1 generates heat, the heat is diffused into the non-conductor 2.
warm up. Here, if the non-conductor 2 has a peeled part 2a as shown in FIG. 1, this! ! The thermal diffusion state in the No. 11 portion 2a is different from the thermal diffusion state in the non-peeled portion.

たとえば外気温度が20℃のとき、加熱温度を50℃と
し、外気とは30℃の温度差をもたせるように設定する
と、剥離部分2aと非剥離部分とでは約6℃の温度差が
現われる。なお、装置の移動速度が速い場合には、前記
加熱温度を確保するため、制御部7は速度に比例して誘
導加熱装置4による加熱温度を制御する。
For example, when the outside air temperature is 20° C., if the heating temperature is set to 50° C. and a temperature difference of 30° C. from the outside air is set, a temperature difference of about 6° C. will appear between the peeled portion 2a and the non-peeled portion. Note that when the moving speed of the device is fast, the control section 7 controls the heating temperature by the induction heating device 4 in proportion to the speed in order to ensure the heating temperature.

このようにして誘導加熱手段3により熱拡散を生じさじ
だ後、赤外線カメラ6により温度を測定し、この温度信
号を信号処理部9に送る。そうすると、信号処理部9に
おいて、制御部7から送られてくる走査タイミングに応
じて1枚の二次元温度分布画像が構成され、CRTディ
スプレイ10に表示されると共に、ビデオレコーダ11
に記録される。
After heat is diffused by the induction heating means 3 in this way, the temperature is measured by the infrared camera 6 and this temperature signal is sent to the signal processing section 9. Then, in the signal processing section 9, one two-dimensional temperature distribution image is constructed according to the scanning timing sent from the control section 7, and is displayed on the CRT display 10, and also displayed on the video recorder 11.
recorded in

第2図はCRTディスプレイ1oの表示画面、すなわち
温度分布画像を示す図である。図中Mは正常状態にある
高温部分を示し、図中Nは非導電体2の剥離部分2aで
ある低温部分を示している。
FIG. 2 is a diagram showing a display screen of the CRT display 1o, that is, a temperature distribution image. In the figure, M indicates a high temperature part in a normal state, and N in the figure indicates a low temperature part, which is the peeled part 2a of the non-conductor 2.

このように本装置によれば、CRTディスプレイ10に
表示される、あるいはディスプレイ11に記録される温
度分布画像を見ることによって、非導電体2の剥離状態
を高精度に検査することができる。
As described above, according to the present apparatus, by viewing the temperature distribution image displayed on the CRT display 10 or recorded on the display 11, the peeling state of the non-conductor 2 can be inspected with high precision.

なお、本発明は前記実施例に限定されるものではない。Note that the present invention is not limited to the above embodiments.

たとえば、前記実施例では誘導コイル5などを移動させ
る場合を示したが、導電性被熱物1側を移動させるよう
にしてもよい。また、本装置は台車を自走式としている
が、人間が台車に乗つて走行するものにも適用できるの
は言うまでもない。このほか本発明の要旨を越えない範
囲で種々変形実施可能であるのは勿論であφ。
For example, in the embodiment described above, the induction coil 5 and the like are moved, but the conductive heated object 1 may be moved. Further, although the present device uses a self-propelled trolley, it goes without saying that it can also be applied to a vehicle in which a person rides on the trolley. Of course, various other modifications can be made without departing from the gist of the present invention.

(発明の効果〕 以上詳述したように本発明によれば、誘導加熱手段によ
り非導電体下の導電性被熱物に磁界を与えて剥離状態に
よって異なる熱拡散状態を作り出し、この熱拡散状態を
赤外線カメラで検知して温度分布画像として表示するこ
とにより、剥離状態を検査するようにしたので、導電性
被熱物表面上の非導電体の剥離状態を非接触で効率よく
正確に計測し得る非接触剥離検査装置を提供できる。
(Effects of the Invention) As described in detail above, according to the present invention, a magnetic field is applied to the conductive heated object under the non-conductive material by induction heating means to create different thermal diffusion states depending on the peeling state, and this thermal diffusion state Since the peeling state is inspected by detecting it with an infrared camera and displaying it as a temperature distribution image, it is possible to efficiently and accurately measure the peeling state of a non-conductive material on the surface of a conductive heated object without contact. It is possible to provide a non-contact peel inspection device that can obtain the desired results.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例の構成を示す系統図、第2図
は同実論例によって得られた温度分布画像を示す図であ
る。 1・・・導電性被熱物、2・・・非導電体(セラミック
)、2a・・・剥離部分、3・・・誘導加熱手段、4・
・・誘導加熱装置、5・・・誘導コイル、6・・・赤外
線カメラ、7・・・制御部、8・・・速度計、9・・・
信号処理部、10・・・C−綺Tディスプレイ、11・
・・ビデオレコーダ。
FIG. 1 is a system diagram showing the configuration of an embodiment of the present invention, and FIG. 2 is a diagram showing a temperature distribution image obtained by the practical example. DESCRIPTION OF SYMBOLS 1... Conductive heated object, 2... Non-conductor (ceramic), 2a... Peeling part, 3... Induction heating means, 4...
...Induction heating device, 5...Induction coil, 6...Infrared camera, 7...Control unit, 8...Speedometer, 9...
Signal processing section, 10...C-KiT display, 11.
...Video recorder.

Claims (1)

【特許請求の範囲】[Claims] 導電性被熱物に重ね合わされた非導電体の剥離状態を検
査する剥離検査装置において、前記非導電体表面より所
定距離隔てて設けられ、前記導電性被熱物に磁界を与え
て剥離状態によって異なる熱拡散状態を形成せしめる誘
導加熱手段と、この誘導加熱手段によって形成された熱
拡散状態を検出する赤外線カメラと、前記導電性被熱物
と誘導加熱手段、赤外線カメラとを相対的に移動させ、
このときの移動速度または予め定められた移動速度に応
じて前記誘導加熱手段および赤外線カメラを制御する制
御部と、この制御部から出力された信号と前記赤外線カ
メラからの出力とを用いて温度分布画像を表示する表示
手段とを備えたことを特徴とする非接触剥離検査装置。
In a peel inspection device that inspects the peeling state of a non-conductive material superimposed on a conductive heated object, the device is installed at a predetermined distance from the surface of the non-conductive material, and applies a magnetic field to the conductive heated object to determine the peeled state. induction heating means for forming different thermal diffusion states; an infrared camera for detecting the thermal diffusion states formed by the induction heating means; and relatively moving the conductive heated object, the induction heating means, and the infrared camera. ,
A control section that controls the induction heating means and the infrared camera according to the moving speed at this time or a predetermined moving speed, and a temperature distribution using the signal output from the control section and the output from the infrared camera. 1. A non-contact peel inspection device comprising: display means for displaying an image.
JP7001485A 1985-04-04 1985-04-04 Non-contact peel inspecting device Pending JPS61230053A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7001485A JPS61230053A (en) 1985-04-04 1985-04-04 Non-contact peel inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7001485A JPS61230053A (en) 1985-04-04 1985-04-04 Non-contact peel inspecting device

Publications (1)

Publication Number Publication Date
JPS61230053A true JPS61230053A (en) 1986-10-14

Family

ID=13419326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7001485A Pending JPS61230053A (en) 1985-04-04 1985-04-04 Non-contact peel inspecting device

Country Status (1)

Country Link
JP (1) JPS61230053A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01239443A (en) * 1988-03-18 1989-09-25 Nkk Corp Method and device for detecting defect in external surface of tube
JPH0961388A (en) * 1995-08-30 1997-03-07 Nkk Corp Self-propelled coating defect inspecting device
EP1216946A2 (en) * 2000-12-22 2002-06-26 General Electric Company System and method for detecting debonding rubber coated rolls
JP2017036977A (en) * 2015-08-07 2017-02-16 株式会社日立ハイテクノロジーズ Object interior inspection device
JP2017507487A (en) * 2014-02-06 2017-03-16 シーメンス アクチエンゲゼルシヤフトSiemens Aktiengesellschaft Inductor

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Publication number Priority date Publication date Assignee Title
JPS50120679A (en) * 1974-03-07 1975-09-22
JPS5182692A (en) * 1974-10-29 1976-07-20 Sumitomo Metal Ind Kohanno netsukankizutanchisochi
JPS51114981A (en) * 1975-04-01 1976-10-09 Nippon Steel Corp Steel surface scar detecting method and equipment
JPS5227551A (en) * 1975-08-27 1977-03-01 Kogyosha Tsushin Kiki Seisak Polarized solenoid
JPS52154686A (en) * 1976-03-31 1977-12-22 Koshuha Netsuren Kk Method of and apparatus for detecting surface flaw of metallic object by using induction heating
JPS5746506A (en) * 1980-09-05 1982-03-17 Nippon Telegr & Teleph Corp <Ntt> Short back fire antenna
JPS5747423A (en) * 1980-09-03 1982-03-18 Kyowa Hakko Kogyo Kk Cultivation of jew's-ear
JPS58124938A (en) * 1982-01-22 1983-07-25 Ebara Corp Flaw detector by infrared ray detection

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50120679A (en) * 1974-03-07 1975-09-22
JPS5182692A (en) * 1974-10-29 1976-07-20 Sumitomo Metal Ind Kohanno netsukankizutanchisochi
JPS51114981A (en) * 1975-04-01 1976-10-09 Nippon Steel Corp Steel surface scar detecting method and equipment
JPS5227551A (en) * 1975-08-27 1977-03-01 Kogyosha Tsushin Kiki Seisak Polarized solenoid
JPS52154686A (en) * 1976-03-31 1977-12-22 Koshuha Netsuren Kk Method of and apparatus for detecting surface flaw of metallic object by using induction heating
JPS5747423A (en) * 1980-09-03 1982-03-18 Kyowa Hakko Kogyo Kk Cultivation of jew's-ear
JPS5746506A (en) * 1980-09-05 1982-03-17 Nippon Telegr & Teleph Corp <Ntt> Short back fire antenna
JPS58124938A (en) * 1982-01-22 1983-07-25 Ebara Corp Flaw detector by infrared ray detection

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01239443A (en) * 1988-03-18 1989-09-25 Nkk Corp Method and device for detecting defect in external surface of tube
JPH0961388A (en) * 1995-08-30 1997-03-07 Nkk Corp Self-propelled coating defect inspecting device
EP1216946A2 (en) * 2000-12-22 2002-06-26 General Electric Company System and method for detecting debonding rubber coated rolls
EP1216946A3 (en) * 2000-12-22 2003-10-15 General Electric Company System and method for detecting debonding rubber coated rolls
JP2017507487A (en) * 2014-02-06 2017-03-16 シーメンス アクチエンゲゼルシヤフトSiemens Aktiengesellschaft Inductor
US10217560B2 (en) 2014-02-06 2019-02-26 Siemens Aktiengesellschaft Inductor
JP2017036977A (en) * 2015-08-07 2017-02-16 株式会社日立ハイテクノロジーズ Object interior inspection device

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