JPS6155338U - - Google Patents

Info

Publication number
JPS6155338U
JPS6155338U JP14022384U JP14022384U JPS6155338U JP S6155338 U JPS6155338 U JP S6155338U JP 14022384 U JP14022384 U JP 14022384U JP 14022384 U JP14022384 U JP 14022384U JP S6155338 U JPS6155338 U JP S6155338U
Authority
JP
Japan
Prior art keywords
probe
cleaning device
polishing means
probe cleaning
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14022384U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14022384U priority Critical patent/JPS6155338U/ja
Publication of JPS6155338U publication Critical patent/JPS6155338U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP14022384U 1984-09-14 1984-09-14 Pending JPS6155338U (oth)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14022384U JPS6155338U (oth) 1984-09-14 1984-09-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14022384U JPS6155338U (oth) 1984-09-14 1984-09-14

Publications (1)

Publication Number Publication Date
JPS6155338U true JPS6155338U (oth) 1986-04-14

Family

ID=30698579

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14022384U Pending JPS6155338U (oth) 1984-09-14 1984-09-14

Country Status (1)

Country Link
JP (1) JPS6155338U (oth)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS64742A (en) * 1987-03-24 1989-01-05 Tokyo Electron Ltd Probing device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56133843A (en) * 1980-03-21 1981-10-20 Nec Corp Probe grinder for probe card
JPS5814608U (ja) * 1981-07-23 1983-01-29 三陽工業株式会社 マイクロホンコ−ド

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56133843A (en) * 1980-03-21 1981-10-20 Nec Corp Probe grinder for probe card
JPS5814608U (ja) * 1981-07-23 1983-01-29 三陽工業株式会社 マイクロホンコ−ド

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS64742A (en) * 1987-03-24 1989-01-05 Tokyo Electron Ltd Probing device

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