JPS6154262U - - Google Patents
Info
- Publication number
- JPS6154262U JPS6154262U JP13982684U JP13982684U JPS6154262U JP S6154262 U JPS6154262 U JP S6154262U JP 13982684 U JP13982684 U JP 13982684U JP 13982684 U JP13982684 U JP 13982684U JP S6154262 U JPS6154262 U JP S6154262U
- Authority
- JP
- Japan
- Prior art keywords
- sensing element
- gas sensing
- gas detector
- semiconductor gas
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13982684U JPS6154262U (cs) | 1984-09-14 | 1984-09-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13982684U JPS6154262U (cs) | 1984-09-14 | 1984-09-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6154262U true JPS6154262U (cs) | 1986-04-11 |
Family
ID=30698199
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13982684U Pending JPS6154262U (cs) | 1984-09-14 | 1984-09-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6154262U (cs) |
-
1984
- 1984-09-14 JP JP13982684U patent/JPS6154262U/ja active Pending
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