JPS6152555U - - Google Patents
Info
- Publication number
- JPS6152555U JPS6152555U JP13852584U JP13852584U JPS6152555U JP S6152555 U JPS6152555 U JP S6152555U JP 13852584 U JP13852584 U JP 13852584U JP 13852584 U JP13852584 U JP 13852584U JP S6152555 U JPS6152555 U JP S6152555U
- Authority
- JP
- Japan
- Prior art keywords
- conveyor
- conveyance
- stator
- gas
- linear motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005339 levitation Methods 0.000 claims description 3
- 239000000696 magnetic material Substances 0.000 claims 1
- 230000001141 propulsive effect Effects 0.000 claims 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
Landscapes
- Non-Mechanical Conveyors (AREA)
- Linear Motors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13852584U JPS6152555U (ro) | 1984-09-12 | 1984-09-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13852584U JPS6152555U (ro) | 1984-09-12 | 1984-09-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6152555U true JPS6152555U (ro) | 1986-04-09 |
Family
ID=30696915
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13852584U Pending JPS6152555U (ro) | 1984-09-12 | 1984-09-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6152555U (ro) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005185077A (ja) * | 2003-12-24 | 2005-07-07 | Seiko Instruments Inc | アクチュエータ、ステージ装置及び軸受加工装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5748520A (en) * | 1980-09-03 | 1982-03-19 | Shinko Electric Co Ltd | Stop method for carrier in conveyor |
-
1984
- 1984-09-12 JP JP13852584U patent/JPS6152555U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5748520A (en) * | 1980-09-03 | 1982-03-19 | Shinko Electric Co Ltd | Stop method for carrier in conveyor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005185077A (ja) * | 2003-12-24 | 2005-07-07 | Seiko Instruments Inc | アクチュエータ、ステージ装置及び軸受加工装置 |