JPS6151885A - Piezoelectric actuator - Google Patents
Piezoelectric actuatorInfo
- Publication number
- JPS6151885A JPS6151885A JP59173664A JP17366484A JPS6151885A JP S6151885 A JPS6151885 A JP S6151885A JP 59173664 A JP59173664 A JP 59173664A JP 17366484 A JP17366484 A JP 17366484A JP S6151885 A JPS6151885 A JP S6151885A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- electrode
- bimorph
- voltage
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は主にVTR、オーディオデツキ、磁気ディヌク
使用機器等のヘッド位置調整に用いられる圧電アクチュ
エータに関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a piezoelectric actuator mainly used for head position adjustment of VTRs, audio decks, devices using magnetic discs, and the like.
従来例の構成とその問題点
近年、磁気テープ、磁気ディスクを使用する機器が急速
に広まり、それに伴ない、記録トラック上を忠実に走査
するようヘッド位置を制御する技術が望まれるようにな
り、それとともに登場したのが圧電素子により微少変位
を得る圧電アクチュエータである。Conventional configurations and their problems In recent years, devices using magnetic tapes and magnetic disks have rapidly spread, and with this, technology to control the head position so as to faithfully scan the recording track has become desirable. At the same time, piezoelectric actuators, which use piezoelectric elements to generate minute displacements, were introduced.
しかるに従来の圧電アクチュエータは圧電素子を2枚貼
り合わせたバイモルフの先端部にヘッドを取付け、単に
ヘッドを上下に動かすだけのものであり、記録トラック
とヘッドの角度を調整するのが困難であった。また圧電
素子2枚の貼り合わせであったので折れ易いという欠点
があった。However, conventional piezoelectric actuators simply attach a head to the tip of a bimorph made of two piezoelectric elements and move the head up and down, making it difficult to adjust the angle between the recording track and the head. . Furthermore, since it was made by bonding two piezoelectric elements together, it had the disadvantage of being easily broken.
発明の目的
本発明は上記の点に鑑み、ヘッドの角度調整を容易にし
、かつ強度的に強い圧電アクチュエータを提供すること
を目的とする。OBJECTS OF THE INVENTION In view of the above points, an object of the present invention is to provide a piezoelectric actuator that facilitates head angle adjustment and is strong in strength.
発明の構成
この目的を達成するために本発明の圧電アクチュエータ
は圧電素子と金属板を貼り合せたバイモルフを有し、こ
のバイモルフの一端を支持部にて支持し、上記圧電素子
上に、第1の電極以外に第2、第3の電極を設け、第2
.第3の電極の極性を逆または印加電圧の極性を逆にし
、さらに第2゜第3の電極部の延長部を上記支持部側に
延長した構成とし、この構成とすることにより、第2.
第3の電極部のたわみ方向を逆にし、先端部のひねりを
生じさせ、ヘッドの角度を変えるよう構成している。ま
た上記第2.第3の電極を延長し配線処理を容易にして
いる。Structure of the Invention In order to achieve this object, the piezoelectric actuator of the present invention has a bimorph in which a piezoelectric element and a metal plate are bonded together, one end of this bimorph is supported by a support part, and a first In addition to the electrode, second and third electrodes are provided, and the second
.. By reversing the polarity of the third electrode or reversing the polarity of the applied voltage, and further extending the extended portion of the second and third electrode portions toward the support portion, the second.
The bending direction of the third electrode part is reversed, the tip part is twisted, and the angle of the head is changed. Also, the above 2. The third electrode is extended to facilitate wiring.
実施例の説明
以下、本発明の一実施例について第1図および第2図と
共に説明する。DESCRIPTION OF THE EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. 1 and 2.
図において1は圧電素子1aおよび金属板1bを貼り合
わせたバイモルフ、2はこの圧電素子1λの外側面の支
持部側に設けた第1の電極、3は同じく圧電素子1aの
先端部に設けた第2の電極、4は同じく先端部に設けた
第3の電極であり、3a、4aはそれぞれ第2.第3電
極の支持部側への延長部である。また電極2〜4、延長
部3a。In the figure, 1 is a bimorph made by pasting together a piezoelectric element 1a and a metal plate 1b, 2 is a first electrode provided on the support side of the outer surface of this piezoelectric element 1λ, and 3 is also provided at the tip of the piezoelectric element 1a. The second electrode 4 is also a third electrode provided at the tip, and 3a and 4a are the second electrodes, respectively. This is an extension of the third electrode toward the support section. Also, the electrodes 2 to 4 and the extension portion 3a.
4aは圧電素子1aの外側面に形成されている。4a is formed on the outer surface of the piezoelectric element 1a.
5は圧電素子1aの貼り合わせ面全面に形成された中間
電極である。6は支持台でる抄、バイモルフ1の曲端、
第1の電極2のグ1.:部を固定している。Reference numeral 5 denotes an intermediate electrode formed on the entire bonded surface of the piezoelectric element 1a. 6 is the support stand, the curved end of bimorph 1,
Group 1 of the first electrode 2. : The part is fixed.
矢印は圧?[i素子1aの分極方向を示す。7はバイモ
ルフ1の先端の第2.第3電極部3,4間に固定された
台部であり、8はその台部7上に固定されたヘッドであ
る。動作としては分極方向と同電位が印加されると圧電
素子1′ILは伸び、その逆では縮む。その結果、第1
図に示す電圧v1により支持台6から先端部に向ってそ
る方向に動作し、電圧v2により、ひねり方向に動作す
る。よって電圧V、、V2 の極性、電圧値により、た
わみ方向、そし方向が自由に選ぶことができる。Is the arrow pressure? [The polarization direction of i-element 1a is shown. 7 is the second tip of bimorph 1. A pedestal is fixed between the third electrode parts 3 and 4, and 8 is a head fixed on the pedestal 7. In operation, when the same potential as the polarization direction is applied, the piezoelectric element 1'IL expands, and vice versa, it contracts. As a result, the first
The voltage v1 shown in the figure causes the tip to warp from the support base 6 toward the tip, and the voltage v2 causes the tip to twist. Therefore, the direction of deflection can be freely selected depending on the polarity and voltage value of the voltages V, , V2.
発明の効果
以上のように本発明のアクチュエータは電圧”1+v2
の極性、電圧値により、たわみ量、また先端部のひねり
角度を自由に選ぶことができ、ヘッド位置を記録トラッ
クに最適に合わすことができる。As described above, the actuator of the present invention has a voltage of "1+v2".
Depending on the polarity and voltage value, the amount of deflection and twist angle of the tip can be freely selected, allowing the head position to be optimally aligned with the recording track.
また電接の延長部が支持部側に集っているため、配線処
理が容易である。さらに圧電素子と金属板を貼り合わせ
ているので強度的に強いという特長を有する。Further, since the extension portion of the electric connection is concentrated on the support portion side, wiring processing is easy. Furthermore, since the piezoelectric element and the metal plate are bonded together, it has the advantage of being strong.
第1図は本発明の圧電アクチュエータの一実施例におけ
る主要部を示す斜視図、第2図は、ヘッド及び台部をと
り付けた場合の斜視図を示す。
1・・・・バイモルフ、1a・・・・・・圧電素子、1
b・・・・・・金属板、2・・・・・第1の電極、3・
・・・・第2の電極、4・ ・・第3の電極、3a 、
4a・・・・・・延長部、6・・・・・中間電極、6・
・・・・・支持台、7・・・・・・台部、8・・・・・
ヘッド。
代理人の氏名 弁理士 中 尾 敏 男 ほか1名第2
図FIG. 1 is a perspective view showing the main parts of an embodiment of the piezoelectric actuator of the present invention, and FIG. 2 is a perspective view showing the piezoelectric actuator with a head and a base attached. 1... Bimorph, 1a... Piezoelectric element, 1
b... Metal plate, 2... First electrode, 3...
...Second electrode, 4...Third electrode, 3a,
4a...Extension part, 6...Intermediate electrode, 6.
...Support stand, 7...Base part, 8...
head. Name of agent: Patent attorney Toshio Nakao and 1 other person 2nd
figure
Claims (1)
のバイモルフの一端を支持部にて支持し、上記支持部側
に第1の電極、先端部に第2、第3の電極部、上記圧電
素子と金属板の貼り合わせ面には単一の中間電極を設け
、さらに上記第2、第3の電極部の極性を逆または印加
電圧の極性を逆にし、さらに、第2、第3の電極部の延
長部を上記支持部側に延長してなる圧電アクチュエータ
。It has a bimorph in which a piezoelectric element and a metal plate are bonded together, one end of this bimorph is supported by a support part, a first electrode is provided on the support part side, second and third electrode parts are provided at the tip part, and the piezoelectric A single intermediate electrode is provided on the bonding surface of the element and the metal plate, and the polarity of the second and third electrode portions is reversed or the polarity of the applied voltage is reversed, and the second and third electrodes are A piezoelectric actuator in which an extension part of the part is extended toward the support part side.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59173664A JPS6151885A (en) | 1984-08-21 | 1984-08-21 | Piezoelectric actuator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59173664A JPS6151885A (en) | 1984-08-21 | 1984-08-21 | Piezoelectric actuator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6151885A true JPS6151885A (en) | 1986-03-14 |
Family
ID=15964807
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59173664A Pending JPS6151885A (en) | 1984-08-21 | 1984-08-21 | Piezoelectric actuator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6151885A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6362542B1 (en) * | 1997-08-15 | 2002-03-26 | Seagate Technology Llc | Piezoelectric microactuator for precise head positioning |
-
1984
- 1984-08-21 JP JP59173664A patent/JPS6151885A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6362542B1 (en) * | 1997-08-15 | 2002-03-26 | Seagate Technology Llc | Piezoelectric microactuator for precise head positioning |
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