JPS6139590A - Piezoelectric actuator - Google Patents

Piezoelectric actuator

Info

Publication number
JPS6139590A
JPS6139590A JP15917384A JP15917384A JPS6139590A JP S6139590 A JPS6139590 A JP S6139590A JP 15917384 A JP15917384 A JP 15917384A JP 15917384 A JP15917384 A JP 15917384A JP S6139590 A JPS6139590 A JP S6139590A
Authority
JP
Japan
Prior art keywords
electrodes
electrode
piezoelectric elements
voltage
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15917384A
Other languages
Japanese (ja)
Inventor
Masao Onishi
大西　雅雄
Toshihiro Yamazoe
山添　敏博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP15917384A priority Critical patent/JPS6139590A/en
Publication of JPS6139590A publication Critical patent/JPS6139590A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B5/584—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following for track following on tapes
    • G11B5/588—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following for track following on tapes by controlling the position of the rotating heads
    • G11B5/592—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following for track following on tapes by controlling the position of the rotating heads using bimorph elements supporting the heads
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end

Abstract

PURPOSE:To warp second and third electrodes in the opposite directions for causing the front end to twist and to facilitate the angular control of a head, by providing piezoelectric elements with second and their electrodes having opposite polarities. CONSTITUTION:Piezoelectric elements 1a and 1b are bonded each other to form a bimorph 1. First to third electrodes 2-4 are formed on both exterior surfaces of the piezoelectric elements 1a and 1b. The reference numeral 5 indicates an intermediate electrode formed over the joint area between the piezoelectric elements 1a and 1b. The electrodes 2-4 are connected between the two exterior surfaces. The reference numeral 1c indicates a notch provided between the electrodes 3 and 4. The arrows indicate the polarizing directions of the piezoelectric elements. In operation, the piezoelectric element expands when a voltage is applied in the same direction as the polarizing direction and contracts when a voltage is applied in the reverse direction. When a voltage V1 as shown in the drawing is applied, the first electrode is warped from a support base 6 toward the front end. When a voltage V2 is applied, the second electrode is warped in the same direction as the first electrode while the third electrode is warped reversely, whereby the support base moves in a twisted manner. Accordingly, the directions of deflection and of warpage can be freely selected through the polarities of the voltages V1 and V2 and the magnitude thereof.

Description

【発明の詳細な説明】 （産業上の利用分野） 本発明は主にＶＴＲ、オーディオデツキ、磁気ディスク
使用機器等のヘッド位置調整に用いられる圧電アクチュ
エータに関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a piezoelectric actuator mainly used for head position adjustment in VTRs, audio decks, devices using magnetic disks, and the like.

（従来例の構成とその問題点） 近年、磁気テープ、磁気ディスクを使用する機器が急速
に広まシ、それに伴ない、記録トラック上を忠実に走査
するようヘッド位置を制御する技術が望まれるようにな
り、それとともに登場したのが圧電素子により微少変位
を得る圧電アクチーエータである。(Conventional structure and its problems) In recent years, devices using magnetic tapes and magnetic disks have rapidly spread, and as a result, a technology for controlling the head position so as to faithfully scan the recording track is desired. Along with this came the piezoelectric actuator, which uses piezoelectric elements to obtain minute displacements.

しかるに従来の圧電アクチュエータは圧電素子を２枚貼
シ合わせたバイモルフの先端部にヘッドをとり付け、単
にヘット９を上下に動かすだけのものであり、記録トラ
ックとヘッドの角度を調整するのが困難であった。However, with conventional piezoelectric actuators, the head is attached to the tip of a bimorph made by pasting two piezoelectric elements together, and the head 9 is simply moved up and down, making it difficult to adjust the angle between the recording track and the head. Met.

（発明の目的） 本発明は上記の点に鑑み、ヘッドの角度調整を容易にす
る圧電アクチュエータを提供することを目的とする。(Object of the Invention) In view of the above points, an object of the present invention is to provide a piezoelectric actuator that facilitates the angle adjustment of a head.

（発明の構成） この目的を達成するために本発明の圧電アクチーエータ
は圧電素子上に、第１の電極以外に第２゜第３の電極を
設け、第２．第３の電極の極性を逆にすることによシ、
第２．第３の電極部のたわみ方向を逆にすることにより
、先端にひねりを生じさせ、ヘッドの角度を変えるよう
構成している。(Structure of the Invention) In order to achieve this object, the piezoelectric actuator of the present invention has second and third electrodes provided on the piezoelectric element in addition to the first electrode. By reversing the polarity of the third electrode,
Second. By reversing the bending direction of the third electrode portion, the tip is twisted and the angle of the head is changed.

（実施例の説明） 以下本発明の一実施例について第１図および第２図と共
に説明する。(Description of Embodiment) An embodiment of the present invention will be described below with reference to FIGS. 1 and 2.

図において１は圧電素子１ａおよび１ｂを貼り合わせた
バイモルフ、２は第１の電極、３は第２の電極、４は第
３の電極で・あり、これらの電極２〜４は圧電素子１ａ
および１ｂの外側両面に形成されている。５は圧電素子
１ａおよび１ｂの貼り合わせ面金面に形成された中間電
極である。電極２〜イは外側両面どうしは接続されてい
る。１ｃは電極３〜４間に設けられた切欠き部である。In the figure, 1 is a bimorph made by bonding piezoelectric elements 1a and 1b, 2 is a first electrode, 3 is a second electrode, and 4 is a third electrode.These electrodes 2 to 4 are attached to the piezoelectric element 1a.
and is formed on both outer surfaces of 1b. Reference numeral 5 denotes an intermediate electrode formed on the bonded metal surfaces of the piezoelectric elements 1a and 1b. The outer surfaces of electrodes 2 to 1 are connected to each other. 1c is a notch provided between the electrodes 3 and 4.

６は支持台であシ、バイモルフの他端、第１電極の端部
に固定している。矢印は圧電素子の分極方向を示す。７
はバイモルフ先端で、第２．第３電極部間に固定された
台部であり、８はその上に固定されたヘッドである。Reference numeral 6 denotes a support base, which is fixed to the other end of the bimorph and the end of the first electrode. The arrow indicates the polarization direction of the piezoelectric element. 7
is the tip of the bimorph, and the second. A pedestal is fixed between the third electrode parts, and 8 is a head fixed thereon.

動作は、分極方向と同方向に電圧が印加されると圧電素
子が伸び、その逆では縮む。その結果、第１図に示す電
圧ｖ１により支持台６から先端部に向ってそる方向に動
作し、電圧ｖ２により第２の電極部は第１の電極部と同
方向、第３の電極部はそめ逆方向にそり、その結果台部
はひねり方向に動作する。よって電圧ｖｌ、ｖ２の極性
、電圧値により、たわみ方向、そり方向が自由に選べる
。In operation, when a voltage is applied in the same direction as the polarization direction, the piezoelectric element expands, and in the opposite direction, it contracts. As a result, the voltage v1 shown in FIG. 1 moves the support base 6 toward the tip, and the voltage v2 causes the second electrode part to move in the same direction as the first electrode part, and the third electrode part to move in the same direction as the first electrode part. It warps in the opposite direction, and as a result, the platform moves in the twisting direction. Therefore, the direction of deflection and warpage can be freely selected depending on the polarity and voltage value of voltages vl and v2.

（発明の効果） 以上のように本発明のアクチュエータは電圧Ｖ。(Effect of the invention) As described above, the actuator of the present invention operates at a voltage of V.

ｖ２の極性、電圧値により、たわみ量また、先端部のひ
ねシ角度を自由に選ぶことができ、ヘッド位置を記録ト
ラックに最適に合わすことができるものである。Depending on the polarity and voltage value of v2, the amount of deflection and the twist angle of the tip can be freely selected, and the head position can be optimally aligned with the recording track.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明の主要部を示す斜視図、第２図は、ヘッ
ト°及び台部をとシ付けた場合の斜視図を示す。 １・・・バイモルフ、１ａ、１ｂ・・・圧電素子、ＩＣ
・−切欠部、２・・・第１の電極、３・−・第２の電極
、４・・・第３の電極、５・・・中間電極、６・・・支
持台、７・・・台部、８・・・ヘッド。 第１図FIG. 1 is a perspective view showing the main parts of the present invention, and FIG. 2 is a perspective view of the head and the base when they are attached. 1... Bimorph, 1a, 1b... Piezoelectric element, IC
- Notch, 2... First electrode, 3... Second electrode, 4... Third electrode, 5... Intermediate electrode, 6... Support base, 7... Base, 8...head. Figure 1

Claims (4)

【特許請求の範囲】[Claims] （１）圧電素子を２枚貼り合わせたバイモルフ構造を有
し、該圧電素子上に第１の電極及び第２、第３の電極部
また前記貼り合わせ面には単一の中間電極を設け、第１
の電極側に支持台を固定し、第２、第３の電極間に切欠
き部を設けてなる圧電アクチュエータ。(1) It has a bimorph structure in which two piezoelectric elements are bonded together, and a first electrode and second and third electrode parts are provided on the piezoelectric element, and a single intermediate electrode is provided on the bonded surface, 1st
A piezoelectric actuator in which a support base is fixed to the electrode side of the piezoelectric actuator, and a notch is provided between the second and third electrodes. （２）前記第１と第２の電極が同極性、第２と第３の電
極が逆極性を有する特許請求の範囲第（１）項記載の圧
電アクチュエータ。(2) The piezoelectric actuator according to claim (1), wherein the first and second electrodes have the same polarity, and the second and third electrodes have opposite polarity. （３）前記第１〜第３電極の各表裏両面を接続してなる
特許請求の範囲第（１）項記載の圧電アクチュエータ。(3) The piezoelectric actuator according to claim (1), wherein the front and back surfaces of each of the first to third electrodes are connected. （４）前記第２、第３電極の先端部に両電極にまたがる
ように台部を設けてなる特許請求の範囲第（１）項記載
の圧電アクチュエータ。(4) The piezoelectric actuator according to claim (1), wherein a pedestal is provided at the tips of the second and third electrodes so as to straddle both electrodes.
JP15917384A 1984-07-31 1984-07-31 Piezoelectric actuator Pending JPS6139590A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15917384A JPS6139590A (en) 1984-07-31 1984-07-31 Piezoelectric actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15917384A JPS6139590A (en) 1984-07-31 1984-07-31 Piezoelectric actuator

Publications (1)

Publication Number Publication Date
JPS6139590A true JPS6139590A (en) 1986-02-25

Family

ID=15687882

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15917384A Pending JPS6139590A (en) 1984-07-31 1984-07-31 Piezoelectric actuator

Country Status (1)

Country Link
JP (1) JPS6139590A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62237779A (en) * 1986-04-08 1987-10-17 Tohoku Metal Ind Ltd Torsional displacement type piezoelectric element
US5017266A (en) * 1988-01-27 1991-05-21 Stanford University Method of making an integrated scanning tunneling microscope
JPH05112249A (en) * 1991-10-23 1993-05-07 Mitsubishi Motors Corp Power steering device for vehicle
US5325679A (en) * 1990-10-26 1994-07-05 Hoshizaki Denki Kabushiki Kaisha Electric control apparatus for auger type ice making machine

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62237779A (en) * 1986-04-08 1987-10-17 Tohoku Metal Ind Ltd Torsional displacement type piezoelectric element
US5017266A (en) * 1988-01-27 1991-05-21 Stanford University Method of making an integrated scanning tunneling microscope
JPH03503586A (en) * 1988-01-27 1991-08-08 ザ ボード オブ トラスティーズ オブ ザ リーランド スタンフォード ジュニア ユニバーシティ Integrated scanning tunneling microscope
US5248912A (en) * 1988-01-27 1993-09-28 Stanford University Integrated scanning tunneling microscope
US5325679A (en) * 1990-10-26 1994-07-05 Hoshizaki Denki Kabushiki Kaisha Electric control apparatus for auger type ice making machine
JPH05112249A (en) * 1991-10-23 1993-05-07 Mitsubishi Motors Corp Power steering device for vehicle

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