JPS60102777A - Piezoelectric displacement element - Google Patents
Piezoelectric displacement elementInfo
- Publication number
- JPS60102777A JPS60102777A JP58208963A JP20896383A JPS60102777A JP S60102777 A JPS60102777 A JP S60102777A JP 58208963 A JP58208963 A JP 58208963A JP 20896383 A JP20896383 A JP 20896383A JP S60102777 A JPS60102777 A JP S60102777A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- piezoelectric
- displacement
- piezoelectric element
- cantilevers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
Landscapes
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明の圧電変位素子は、ビデオテープレコーダのビデ
オヘッドの位置制御を行うものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The piezoelectric displacement element of the present invention controls the position of a video head of a video tape recorder.
すなわち、圧電変位素子の先端にビデオヘッドを取付け
、記録テープのスピードが変化した場合でも、記録テー
プの記録部を忠実にビデオヘッドがトレースするように
、圧電変位素子に印加する電圧を変えることによりヘッ
ドの位置を制御することができるものである。In other words, by attaching a video head to the tip of the piezoelectric displacement element, and changing the voltage applied to the piezoelectric displacement element, the video head faithfully traces the recorded portion of the recording tape even when the speed of the recording tape changes. The position of the head can be controlled.
（従来例の構成とその問題点）
実用化されている圧電変位素子の中で、２枚の各々全面
電極を有するリング状の圧電素子をその分極方向が同一
になるように接着し、中央部を支持し片持梁とし、電圧
印加によυたわみ変位を生じさせる圧電変位素子がある
。但し、中間の電極とリード線を接続するため、下段の
リング状の圧電素子の内径を上段のリング状の圧電素子
の内径よシも小さくしている。又、片持梁とした二つの
先端に取付けるヘッドを独立して制御するため、中間の
電極は中央の支持部で分割されている。上記従来の圧電
変位素子に電圧を印加すると、リング状のため、先端に
応力集中が起こり、クラ、りや破断が生じたりあるいは
変位特性を妨げるという問題があった。(Conventional structure and its problems) Among the piezoelectric displacement elements that have been put to practical use, two ring-shaped piezoelectric elements each having a full-surface electrode are glued together so that their polarization directions are the same, and the central part is There is a piezoelectric displacement element that supports a cantilever beam and generates υ deflection displacement by applying a voltage. However, in order to connect the middle electrode and the lead wire, the inner diameter of the lower ring-shaped piezoelectric element is made smaller than the inner diameter of the upper ring-shaped piezoelectric element. Furthermore, in order to independently control the heads attached to the two ends of the cantilever beam, the middle electrode is divided at the central support part. When a voltage is applied to the conventional piezoelectric displacement element, since it is ring-shaped, stress concentration occurs at the tip, which causes cracking, cracking, or rupture, or impairs displacement characteristics.
（発明の目的）
本発明は斯かる事情に鑑みてなされたもので、片持梁の
場合の先端に発生する応力集中に起因するクラックや破
断あるいは変位特性を妨げるという欠点を解消すること
を目的とする・
（発明の構成）
本発明は、２枚のリング状の圧電素子をその分極方向が
同一に々るように接着し、中央部を支持し片持梁とし、
印加電圧によりたわみ変位を生じる圧電変位素子におい
て、変位が最大となる先端付近の電極を欠除させ全面電
極としないように構成したもので、駆動部のリング状の
圧電素子の内径をｄとした時、電極長さｅをｌ−デ〜ｄ
とするものである。このようにすると先端は電極がなく
電圧を印加しても歪がなく、応力集中が起こらず、その
ため従来のように、先端にクラックや破断がなく、又変
位特性が妨げられることもない。(Objective of the Invention) The present invention has been made in view of the above circumstances, and its purpose is to eliminate the drawbacks of cantilever beams, such as cracks, ruptures, and displacement characteristics caused by stress concentration occurring at the tip. (Structure of the Invention) The present invention consists of bonding two ring-shaped piezoelectric elements so that their polarization directions are the same, and supporting the central part to form a cantilever beam.
In a piezoelectric displacement element that causes deflection displacement due to applied voltage, it is configured so that the electrode near the tip where the displacement is maximum is removed so that it does not become a full-surface electrode, and the inner diameter of the ring-shaped piezoelectric element of the drive part is set as d. When the electrode length e is l-d~d
That is. In this way, there is no electrode at the tip, so there is no distortion even when a voltage is applied, and stress concentration does not occur.Therefore, there is no crack or breakage at the tip, and the displacement characteristics are not disturbed, unlike in the conventional case.
（実施例の説明）
第１図で圧電変位素子の原理を説明する。圧電素子１と
２を分極方向（矢印ａｌ、ａ２）が同一になるように接
着し並列型バイモルフ３を作る。(Description of Examples) The principle of a piezoelectric displacement element will be explained with reference to FIG. Piezoelectric elements 1 and 2 are glued together so that their polarization directions (arrows al, a2) are the same to form a parallel bimorph 3.
第１図では圧電素子１の上面が電極、下向が一極圧電素
子２の上面が電極、下面が一極の構成である。この並列
型バイモルフ３を支持体４，５で支持し片持梁とする。In FIG. 1, the upper surface of the piezoelectric element 1 is an electrode, the upper surface of the downwardly facing unipolar piezoelectric element 2 is an electrode, and the lower surface is a unipolar structure. This parallel bimorph 3 is supported by supports 4 and 5 to form a cantilever beam.
同図（イ）で示すように、中間電極に＋、支持体４，５
に−の電圧を印加すると、圧電効果により圧電素子１は
矢印で示すように伸びる方向に変形し、圧電素子２は縮
む方向に変形する。この結果、並列型バイモルフ３の片
持梁の先端は下方（矢印ｂ）に変位する。同図（ロ）で
示すように、印加電極の極性を逆にすると、並列型バイ
モルフ３０片持梁の先端は上方（矢印Ｃ）に変位する。As shown in the same figure (a), the intermediate electrode is
When a negative voltage is applied to , the piezoelectric element 1 is deformed in the extending direction as shown by the arrow, and the piezoelectric element 2 is deformed in the contracting direction due to the piezoelectric effect. As a result, the tip of the cantilever beam of the parallel bimorph 3 is displaced downward (arrow b). As shown in FIG. 3B, when the polarity of the application electrode is reversed, the tip of the cantilever beam of the parallel bimorph 30 is displaced upward (arrow C).
変位の大きさは印加電圧に応じて増減する。The magnitude of the displacement increases or decreases depending on the applied voltage.
次に本発明による一実施例を第２図に示す。同図（イ）
は平面図、（ロ）は正面図、０うは底面図、に）は側面
図である。リング状の２枚の圧電素子６．７を分極方向
が同一になるように貼り合せ並列型バイモルフ８を構成
する。圧電素子６，７に、圧電素子６の内径ｄ（駆動部
の内径と考えてよい）としたとき、電極長さ、ｇ＝−！
−ｄ−ａの電極９がそれぞれ形成されている。中間の電
極よりリード線１０゜１１を接続するため、圧電素子７
の内径は圧電素子６の内径よシ若干小さくしである。又
、二つのヘッド（図示せず）は圧電素子６の先端部１２
゜１３付近に取付けられ、それぞれ独立して駆動するた
め中間の電極は、圧電素子６．７の中間１４で示すよう
に分割されている。このような構成の並列型バイモルフ
８を中間電極を分割した１４の位置で支持体１５で支持
し、二つの片持梁を形成する。（第２図（イ）、（ハ）
では支持体を記載していない。）上下の支持体１５を電
気的に接続し支持体１５とリード線１０の間、支持体１
５とリード線１１の間に電圧を印加すると、それぞれ片
持梁の先端は電圧の大きさに応じて変位することになる
。Next, an embodiment according to the present invention is shown in FIG. Same figure (a)
is a plan view, (b) is a front view, (b) is a bottom view, and (b) is a side view. A parallel bimorph 8 is constructed by bonding two ring-shaped piezoelectric elements 6.7 so that their polarization directions are the same. In the piezoelectric elements 6 and 7, when the inner diameter d of the piezoelectric element 6 (which can be considered as the inner diameter of the driving part), the electrode length, g=-!
-da electrodes 9 are formed, respectively. In order to connect the lead wire 10°11 from the middle electrode, the piezoelectric element 7
The inner diameter of the piezoelectric element 6 is slightly smaller than the inner diameter of the piezoelectric element 6. Further, two heads (not shown) are connected to the tip 12 of the piezoelectric element 6.
13, and in order to drive each independently, the middle electrode is divided as shown by the middle 14 of the piezoelectric element 6.7. The parallel bimorph 8 having such a configuration is supported by supports 15 at 14 positions where the intermediate electrode is divided to form two cantilevers. (Figure 2 (a), (c)
The support is not described. ) The upper and lower supports 15 are electrically connected, and between the supports 15 and the lead wires 10, the supports 1
When a voltage is applied between the cantilever 5 and the lead wire 11, the tips of the respective cantilevers will be displaced depending on the magnitude of the voltage.
（５）
片持梁の先端付近は電極が力＜、電圧を印加しても圧電
効果は働かず、全面電極と比べて殆んど応力集中は起こ
らない。(5) Near the tip of the cantilever, the piezoelectric effect does not work even if the electrode is applied with a force or voltage, and almost no stress concentration occurs compared to a full-surface electrode.
第３図は本発明による圧電素子の完成斜視図である（支
持体は図示せず）。FIG. 3 is a completed perspective view of a piezoelectric element according to the present invention (the support is not shown).
（発明の効果）
以上のように本発明による圧電変位素子は、電極の先端
部が接続されていないので、応力集中、クラック、破断
等が発生せず、変位特性が妨げられるということもない
ため、非常に実用価値の高いものである。(Effects of the Invention) As described above, in the piezoelectric displacement element according to the present invention, since the tips of the electrodes are not connected, stress concentration, cracks, breakage, etc. do not occur, and the displacement characteristics are not hindered. , is of very high practical value.
第１図は圧電変位素子の原理を示す図、第２図は本発明
の一実施例を示す図で（イ）は平面図、（ロ）は正面図
、（ハ）は底面図、に）は側面図、第３図は本発明によ
る完成圧電素子の斜視図である。
１．２，６．７・・・圧電素子、３．８・・・並列型ノ
＜イモルフ、９・・・電極、４．５．１５・・・支持体
、］、 Ｏ、ｉ ｉ・・・リード線。
（６）
第１図
（イ）
（ロ）
第３図Fig. 1 is a diagram showing the principle of a piezoelectric displacement element, and Fig. 2 is a diagram showing an embodiment of the present invention, in which (a) is a plan view, (b) is a front view, and (c) is a bottom view. 3 is a side view, and FIG. 3 is a perspective view of a completed piezoelectric element according to the present invention. 1.2, 6.7... Piezoelectric element, 3.8... Parallel type immorph, 9... Electrode, 4.5.15... Support body, ], O, i i... ·Lead. (6) Figure 1 (a) (b) Figure 3
Claims (3)
になるように重ねて接着し接着した圧電素子の上下面及
び接着面に電極を設け、中央部を支持し片持梁とし、電
圧印加によりたわみ変位を生しる圧電変位素子において
、変位が最大となる先端付近の電極部分を欠除させたこ
とを特徴とする圧電変位素子。(1) Two ring-shaped piezoelectric elements are stacked and bonded so that their polarization directions are the same, electrodes are provided on the upper and lower surfaces of the bonded piezoelectric elements, and the bonded surface, and the central part is supported to form a cantilever beam. 1. A piezoelectric displacement element that produces deflection displacement upon application of a voltage, characterized in that an electrode portion near the tip where the displacement is maximum is omitted.
時、電極長さｌをｌ−、；ｄ−ｄとしたことを特徴とす
る特許請求の範囲第（１）項記載の圧電変位素子。(2) The piezoelectric device according to claim (1), characterized in that when the inner diameter of the ring-shaped piezoelectric element of the driving part is d, the electrode length l is l-, ;dd. displacement element.
いる特許請求の範囲第（１）項記載の圧電変位素子。(3) The piezoelectric displacement element according to claim (1), wherein the electrode on the adhesive surface is divided by a central support portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58208963A JPS60102777A (en) | 1983-11-09 | 1983-11-09 | Piezoelectric displacement element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58208963A JPS60102777A (en) | 1983-11-09 | 1983-11-09 | Piezoelectric displacement element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60102777A true JPS60102777A (en) | 1985-06-06 |
| JPH0438153B2 JPH0438153B2 (en) | 1992-06-23 |
Family
ID=16565050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58208963A Granted JPS60102777A (en) | 1983-11-09 | 1983-11-09 | Piezoelectric displacement element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60102777A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6386488A (en) * | 1986-09-30 | 1988-04-16 | Matsushita Electric Ind Co Ltd | Piezoelectric actuator |
| US6629343B1 (en) * | 1999-09-10 | 2003-10-07 | Hypertension Diagnostics, Inc. | Method for fabricating a pressure-wave sensor with a leveling support element |
| US6689069B2 (en) | 1998-03-20 | 2004-02-10 | Hypertension Diagnostics, Inc. | Apparatus and method for blood pressure pulse waveform contour analysis |
-
1983
- 1983-11-09 JP JP58208963A patent/JPS60102777A/en active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6386488A (en) * | 1986-09-30 | 1988-04-16 | Matsushita Electric Ind Co Ltd | Piezoelectric actuator |
| US6689069B2 (en) | 1998-03-20 | 2004-02-10 | Hypertension Diagnostics, Inc. | Apparatus and method for blood pressure pulse waveform contour analysis |
| US6629343B1 (en) * | 1999-09-10 | 2003-10-07 | Hypertension Diagnostics, Inc. | Method for fabricating a pressure-wave sensor with a leveling support element |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0438153B2 (en) | 1992-06-23 |
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